Mechanical Specifications and Installation
MPS75SL/SLE Hardware Manual
2.3.1. For XY Assemblies and Special Cases
To access the inner mounting holes, the stage table must be moved. The following is the procedure for
moving the table and mounting the stage (see
).
N O T E :
If the stage is not connected to a power source, the stage should move freely by hand. Do not
attempt to manually move the stage if it is connected to a power source.
1. Manually move the stage to one end of travel, revealing two of the hidden mounting holes for the stage.
2. Mount the stage to the base with M4 socket head cap screws (SHCS).
3. Once half of the mounting screws have been installed, move the stage to the opposite end of travel to
access the remaining screws.
4. Mount the stage to the base using the remaining mounting holes with M4 SHCS.
If the stage is equipped with optional bellows, refer to
for bellows disassembly instructions.
Figure 2-9:
Access To All Mounting Holes
24
Chapter 2
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