MPS50SV Hardware Manual
Overview
1.2. Basic Specifications
Table 1-3:
MPS50SV Series Mechanical Specifications
Mechanical Specifications
(1)
MPS50SV-5
Travel
5 mm
Accuracy
1.0 mm/rev Ball Screw
Standard
±2.5 µm
Calibrated
(2)
±1.0 µm
0.5 mm/rev Lead Screw
Standard
±3.0 µm
Calibrated
(2)
±1.25 µm
Resolution (minimum incremental motion)
0.05 µm
Bidirectional
Repeatability
(2)
1.0 mm/rev Ball Screw
±0.75 µm
0.5 mm/rev Lead Screw
±1.0 µm
Straightness
±3.0 µm
Wedge Ratio
6.82:1
Maximum Speed
1.0 mm/rev Ball Screw
DC Motor (-M1)
0.8 mm/s
Stepper Motor (-M2)
0.15 mm/s
0.5 mm/rev Lead Screw
DC Motor (-M1)
0.4 mm/s
Stepper Motor (-M2)
0.1 mm/s
Load Capacity
(3)
6 kg
Stage Mass
1.4 kg
Material
Stainless-Steel Carriage;
Anodized Aluminum Body
1. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
2. With Aerotech controllers.
3. Payload specifications are for a single-axis system.
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Chapter 1
13
