Aerotech ANT130XY Series, Hardware Manual

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1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130XY-060 Series Specifications
ANT130XY-060 ANT130XY-060 ANT130XY-060
Travel 60 mm x 60 mm 110 x 110 mm 160 mm x 160 mm
Accuracy
(1,2)
-PL1 ±2.5 µm ±4.0 µm ±5.0 µm
-PL2 (-E1, -E2) ±250 nm ±300 nm ±300 nm
-PL2 (-E4) ±200 nm ±225 nm ±225 nm
-PL3 (-E1, -E2) ±250 nm ±300 nm ±300 nm
-PL3 (-E4) ±200 nm ±225 nm ±225 nm
Bidirectional Repeatability
(2)
±75 nm
Resolution (Minimum
Incremental Motion)
-E1 1 nm
-E4 0.5 nm
Straightness
(2)
-PL1 ±1.5 µm ±1.5 µm ±2.0 µm
-PL2 ±1.5 µm ±1.5 µm ±2.0 µm
-PL3 ±250 µm ±300 µm ±300 µm
Flatness
(2)
-PL1 ±1.5 µm ±1.5 µm ±2.0 µm
-PL2 ±1.5 µm ±1.5 µm ±2.0 µm
-PL3 ±1.0 µm
Pitch 10 arc sec 12 arc sec 15 arc sec
Roll 10 arc sec 12 arc sec 15 arc sec
Yaw 5 arc sec 6 arc sec 8 arc sec
Orthogonality
(3)
-PL1 10 arc sec
-PL2 3 arc sec
-PL3 1 arc sec 0.5 arc sec 0.5 arc sec
Maximum Speed
(Upper Axis)
(4)
-E1, -E4 350 mm/s
-E2 145 mm/s
Maximum Acceleration
(No Load / Upper Axis)
(4)
1 g
In-Position Stability
(5)
-E1 <1 nm
-E4 <0.5 nm
Load Capacity (horizontal)
(6)
12.0 kg
Moving Mass
Upper Axis 1.4 kg 1.9 kg 2.3 kg
Lower Axis 4.2 kg 5.6 kg 6.9 kg
Stage Mass 5.7 kg 7.5 kg 9.2 kg
Material Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Specifications for -PL1 and -PL2 options are per-axis, measured 25 mm above the tabletop. Specifications for the -PL3
option are XY, measured 25 mm above the tabletop. -PL2 and -PL3 performance options require the use of an Aerotech
controller.
2. Certified with each stage.
3. Requires an Aerotech controller.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
6. Payload specifications assume that the payload is centered on-axis.
5. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system depend
upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
6. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
ANT130XY Hardware Manual 1.3. Basic Specifications
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