IM 1E10D0-01E
5-6
5. OUTLINE
250 and 300mm (10 and 12in) Wafer Type
Unit : mm (inch)
Ground Termimal
80.5 (3.2)
48 (3.2)
111 (4.4)
20.5 (0.8)
68 (2.7)
H
1
H
2
H
L
*1
T
*2
SD5d.EPS
N-
ø
h
ø
C
ø
D
ø
86 (3.4)
*1 When no earth ring is selected the face to face length is shorter by approx. 1.6mm (0.06in).
The face to face length is longer by approx. 22mm (0.87in) for earth ring(P,T).
The face to face length is longer by approx. 8.4mm (0.33in) for optional code/FRG.
*2 The thickness(T) is longer by approx. 4.2mm (0.17in) for optional code/FRG.
Unit : mm
(Approx, inch)
Thickness
(P,T Earth ring)
4.3
4.6
3.6
4.8
4.6
6.3
6.6
5.9
8.2
7.9
7.7
7.8
8.2
9.8
9.6
(9.4) (10.1) (7.8) (10.5)
(13.9)(14.5)(13.0)(18.1)(17.4)(17.0)(17.3)(18.1)(21.7)(21.2)
Flange Type
Height
Nominal Size
Model
Face to face length
Pitch circle dia.
Weight
34
36.4
33.1
32
30
32
34.6
31.5
32
30
32
31.5
28.2
30
28
T
*2
293
162
19.1
127
165.1
22.4
114.3
155.4
19.1
88.9
124
270
139
113
244
J1
J2
A1
A2
D4
J1
J2
A1
A2
D4
162
156
157
136
125
131
108
105
113
293
287
288
267
256
262
239
236
H
2
244
50 (2)
165
25.4
18
152.4
19.1
155
19
18
23.6
150
15.7
127
19
140
40 (1.5)
14
15.7
19
115
108
125
20.5
25 (1)
J2
ø
h
T
*2
H
1
H
A2
A1
J1
N
90
79.2
85
105
98.6
110
4
120
120.7
125
4
4
4
8
4
17.2
19
17
20.5
21
19
22.1
21
19
D4
21
21
23
200 (7.9)
200 (7.9)
200 (7.9)
L
*1
80
61
51
SE202DJ,SE202EJ
(lb)
kg
(0.7)
(0.6) (0.8) (0.6)
(0.7)
(0.6) (0.9) (0.7)
(0.7)
(0.7) (0.7) (0.7)
(3.5)
(3.1) (3.5) (3.3)
(4.1)
(4.3)
(3.9) (4.5)
(0.7) (0.8) (0.8)
(4.9)
(5.0)
(4.8)
(4.7)
(1.1)
(1.3) (1.1) (1.3)
(1.1)
(0.7) (0.8) (0.8)
(0.8)
(0.7)
(1.4)
(0.9)
(1.3)
(0.8)
(6.1)
(5.9)
(6.1)
(5.0)
(5.5)
(4.3)
(4.5)
(4.9)
(1.1)
(1.2)
(0.9)
(1.0)
(0.9)
(1.3)
(1.4)
(1.3)
(1.3)
(6.5)
(6.5)
(6.0)
(1.2)
(4.4)
(10.6)
(10.1)
(10.3)
(9.6)
(9.6)
(9.3)
(9.6)
(5.2)
(4.3)
(4.4)
(4.1)
(11.5)
(11.5)
(11.3)
(13.0)
(10.5)
(6.4)
(6.4)
(6.1)
(6.2)
(5.4)
(5.5)
(4.9)
(4.9)
(0.7) (0.7)
(1.1)
(2.0)
(2.4)
(3.1)
Flange outside dia.
Dia. of holes
Number of holes
Thickness
(Except P,T Earth ring)
ø
D
ø
C
(10.1)
Lining
Fluorocarbon PFA
Fluorocarbon PFA
Fluorocarbon PFA
SE204DJ,SE204EJ
SE205DJ,SE205EJ
Bolt hole pitch
⬚
⬚
45
45
45
45
45
45
45
45
45
45
45
45
45
22.5
22.5
(M4)
Face to face length
(6.9)
(8.0)
(7.1)
(8.0)
(7.7)
200 (7.9)
(M4)
30.8
29
26
28.8
26.8
T
*2
3.1
3.6
3.2
3.6
3.5
15.8
17.8
15
66.5
60.5
70
70
18
95
95
88.9
95.3
15
15
15.7
15.7
T
*2
ø
h
95
19.8
65
14
J1
J2
A1
A2
D4
L
*1
268 (10.6)
137 (5.4)
80.5 (3.2)
48 (1.9)
111 (4.4)
20.5 (0.8)
68 (2.7)
L
*1
T
*2
60.5 (2.4)
Unit : mm (Approx. inch)
(3.7)
(0.6)
(1.1)
(2.8)
(0.6)
(3.7)
(0.7)
(1.1)
(2.8)
(0.6)
(3.5)
(0.6)
(1.0)
(2.4)
(0.6)
(3.8)
(0.7)
(1.1)
(2.6)
(0.6)
(3.7)
(0.8)
(1.2)
(2.6)
(0.6)
Flange outside dia
Dia. of holes
Pitch circle dia.
Thickness
(Except P.T Earthring)
Weight kg (lb)
Lining
Flange Type
Ground Terminal
Thickness (P.T Earthring)
Fluorocarbon PFA
Nominal size
Model
SE115DJ , SE115EJ
15 (0.5)
4-
ø
h
ø
D
ø
C
ø86 (3.4)
ø
C
ø
D
SD4d.eps
*1
When no earth ring is selected the face to face length
is shorter by approx. 1.6mm (0.06in).
The face to face length is longer by approx. 22mm (0.87in)
for earth ring(P,T).
The face to face length is longer by approx. 8.4mm (0.33in)
for optional code/FRG.
*2
The thickness(T) is longer by approx. 4.2mm (0.17in)
for optional code/FRG.
15mm (0.5in)) Flange Type
25mm (1in) to 50mm (2in) Flange Type
SD3-2.eps
ø
D
Ground Terminal
(M4)
111 (4.4)
80.5 (3.2)
48(1.9)
20.5 (8.1)
68(2.7)
ø
86 (3.4)
L*
1
H
H
1
(
ø
D)
Unit : mm (Approx. inch)
Model
Nominal Size
Weight
L
*1
350
300
H
H1
SE325DJ
250
SE330DJ
300
39
340
471
388
519
310
358
48.3
(86.0)
(106.5)
kg (lb)
Lining
Height
(10)
(12)
Outside diameter
Face to face length
(18.5)
(13.4)
(20.4)
(15.3)
(12.2)
(14.1)
(11.8)
(13.8)
Fluorocarbon PFA
ø
D
*1 : When no earth ring is selected, the face to face
length is shorter by approx. 2mm (0.08in).
