3 Product and Functional Description | 3.2 Main Components
ZEISS
3.2 Main Components
3.2.1 Vacuum System
Purpose
For operation of the microscope, the gun head, the column, and the specimen chamber have to
be evacuated. The vacuum is essential to operate the gun and to prevent collisions of electrons
with gas molecules.
2
3
4
1
5
7
6
8
10
9
Fig. 10: Schematics of the vacuum system of a microscope with Gemini 1 and Gemini 3 columns
1
2
3
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5
8
9
10
6
7
Fig. 11: Schematics of the vacuum system of a microscope with Gemini 2 column
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Instruction Manual ZEISS GeminiSEM series | en-US | Rev. 2 | 349500-8138-000
