14
Installation Method
Connecting method and assembling procedures of glass unit
3-2. Piping between RE300 and glass set condenser
Piping method to glass set A condenser
Piping method to glass set B condenser
Piping method to glass set B condenser
IN
OUT
LEAK
IN
OUT
LEAK
Steam temperature
sensor
Cooling temperature
sensor
Rotor lift I/O
Bath I/O
Vacuum pump
drive output
DC24V power input
IN
OUT
Vacuum pump
IN
OUT
Cooling water
circulation system
Exhaust
Back surface of VR600/800
vacuum controller
IN
OUT
LEAK
IN
OUT
LEAK
Steam temperature
sensor
Cooling temperature
sensor
Rotor lift I/O
Bath I/O
Vacuum pump
drive output
DC24V power input
Back surface of VR600/800
vacuum controller
IN
OUT
Vacuum pump
IN
OUT
Cooling water
circulation system
Exhaust
IN
OUT
LEAK
IN
OUT
LEAK
Steam temperature
sensor
Cooling temperature
sensor
Rotor lift I/O
Bath I/O
Vacuum pump
drive output
DC24V power input
Back surface of VR600/800
vacuum controller
IN
OUT
Vacuum pump
Connect the attached
drain hose.
To drain
Put dry ice or ice.
排気
