15
WIKA Operating instructions/Betriebsanleitung, WU-2X
11553678.05 EN/DE 02/2019
Specifications
Models WU-20, WU-25 and WU-26
WU-20 / WU-25
WU-26
Pressure ranges
psi
30
60
100
160
250
350
500
1000
1500
bar
2
4
7
11
17
25
36
70
100
Over pressure safety *
)
psi
120
120
210
320
500
750
1100
2100
3000
Burst pressure *
)
psi
1800
1800
2200
2600
4800
6200
5800
8000
10500
Pressure ranges
psi
2000
3000
5000
bar
145
225
360
Over pressure safety *
)
psi
4200
6600
10500
Burst pressure *
)
psi
10500
10500
12000
Other pressure ranges, pressure units (e.g. MPa, kg/cm
2
) and absolute pressure on request
*
)
1 psi = 0.069 bar
Measuring principle
Metal thin-film sensor
Materials
■
Wetted parts
- Pressure Connection
316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR)
- Pressure sensor
2.4711 / UNSR 30003
■
Case
304 SS
Inboard helium leak test
< 1 x 10
-9
mbar l/sec (atm STD cc/sec) according to Semi F1
Surface finish
Electropolished, typical Ra ≤ 0.13 µm (RA 5); max. Ra ≤ 0.18 µm (RA 7) exceeds Semi F19
Dead volume
cm
3
WU-20 < 1.5, WU-25 < 1, WU-26 < 1
Permissible Medium
Speciality gases, vapours, liquids
Power supply U+
U+ in VDC
10 ... 30 with output signal 4 ... 20 mA / 0 ... 5 V
14 ... 30 with output signal 0 ... 10 V
Signal output and
RA in Ohm
4 … 20 mA, 2-wire
RA
≤ (U+ – 10 V) / 0.02 A
maximum ohmic load RA
0 ... 5 V, 3-wire
RA > 5 k
0 ... 10 V, 3-wire
RA > 10 k
Power Pmax
W
1
Adjustability zero
% of span
-3.5 up to +3.5 (via potentiometer) Current output signal
-2 up to +3.5 (via potentiometer) Voltage output signal
7. Starting, operation
EN
