Veeco MPS-3000 CE, Техническое руководство

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7. Select the cathode filament current.
Refer to the “Tables” on page 83 for initial filament currents for various
ion sources.
The current values assume that 0.25mm (0.010 in.) tungsten wire is used
for the cathode filament. If the actual filament is a different size and/or
material, other filament currents could be required.
a. Select the Cathode power supply with the MODULE switch and
Current with the FUNCTION switch. The words CATHODE and
CURRENT appear above the appropriate switches.
b. Select the chosen value by turning the Adjust knob. The new value
appears on the Cathode Filament Current display.
c. As the Adjust knob is turned, the cathode filament current is entered
automatically into the selected memory.
8. Select the neutralizer filament current limit.
Refer to the “Tables” on page 83 for current limits for various ion
sources.
a. Select the neutralizer power supply with the MODULE switch. The
word NEUTRALIZER appears above the switch.
b. Select Limit with the FUNCTION switch. The word LIMIT appears
above the switch.
c. Adjust the current limit upwards or downwards as needed. The
value appears on the Neutralizer Filament Current display.
Different sizes and different types of filament wire may require adjustments
to the neutralizer filament current limit. Neutralizer current limit will be fac-
tory-set at 6.5A.
d. The final selected value is stored automatically in the memory, as
indicated above the MEMORY switch.
9. Select the neutralizer filament current.
Refer to the “Tables” on page 83 for initial filament currents for various
ion sources.
a. Select the neutralizer power supply with the MODULE switch and
current with the FUNCTION switch. The words NEUT and CUR-
RENT appear above the appropriate switches.
b. Enter the chosen value by turning the Adjust knob. The value will
appear on the Neutralizer Filament Current display.
c. As the Adjust knob is turned, the neutralizer filament current is
entered automatically into the selected memory location.
NOTE
NOTE