Veeco Dimension 3100, Руководство пользователя

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Stage System
Stage Menu Commands
Rev. D Dimension 3100 Manual 81
7. Click on OK in the Teach Mode panel when the stage has moved to a desired position (see
Figure 5.2m ).
Figure 5.2m Teach Mode Prompt
8. To add another position, repeat Step 4 - Step 6 until all desired positions have been
programmed up to a maximum of 100 steps.
Note: Each time the Teach Program panel is reentered, the Program step increments
by another count and automatically assigns a program step number.
9. When all stage positions are entered into the program, click Save in the Teach Program
panel, then click Quit . Verify the program is entered and saved under the correct program
name.
Note: Save steps before exiting the Teach Program panel; otherwise, programmed
steps will be lost.
10. Enter additional programs in the same manner, using a separate program name for each.
Other Information Regarding the Teach Program Option
To remove a step from the programmed sequence:
1. Go to the Stage pop-down menu to the Programmed Move panel, and select Teach
Program .
2. Select Program step from the Teach Program panel.
3. Enter the step number to be removed or drag the mouse to index to the step number. The
stage simultaneously moves to the new step position.
4. Select the Remove Step option.
Note: When individual program steps are removed, all subsequent steps are “moved
up” by one count.
5. Click Save to save the edited version of program.
Teach Mode
Ok
Hold down the left button to move the SPM
Hold down the right button to zoom.
Hold down either top button to lock last move.
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