Veeco Dimension 3100, Руководство пользователя

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Stage System
Stage Menu Commands
80 Dimension 3100 Manual Rev. D
Teaching a Programmed Move
To program (teach) a series of moves, complete the following:
1. Draw a simple map of the sample, along with each programmed position, before
programmed moves are entered. Note the origin point at the time of programming.
Note: If reducing cycle time is important, position order should be optimized to
reduce stage travel
2. Click on the Program name option in the Programmed Move panel (see Figure 5.2j ) and
enter the name to be used.
Note: Program names must be eight characters or less and follow DOS protocol.
3. From the Programmed Move panel, click on Teach . The screen prompts with (see Figure
5.2k ):
Figure 5.2k Editing or Creating New Program Prompts
4. Click
OK
to proceed with programming moves. A new panel displays, featuring the basic
teaching commands (see Figure 5.2l ).
5. To add a first step, click Add Step to invoke the Teach Mode panel (see Figure 5.2l ).
Figure 5.2l Teach Program Prompt
6. Use the controls to position the stage and sample to the desired location(s) to be programmed
into the computer.
Note: These controls are identical to the Focus Surface controls explained in Chapter
5 of this manual.
Programmed Move
Editing existing program
Ok
Programmed Move
Creating new program
Ok
Or
The program name already exists
on the computer The program name is new
(not previously used)
Teach Program
Program step:
Save
0
Add Step Remove Step
Move to (X, Y)
Quit