Veeco Dimension 3100, Руководство пользователя

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Stage System
Stage Menu Commands
Rev. D Dimension 3100 Manual 79
Figure 5.2i Resultant Reference Line
5.2.6 Programmed Move
The Programmed Move function allows the stage to be automatically positioned using a series of
memorized positions. These positions are programmed into the controller’s computer, then
executed automatically in sequence. This function is particularly useful for statistical quality
assurance runs on large numbers of identical samples, and as a basic inspection aid.
To use this option, select the Programmed Move function under the Stage pop-down menu. The
screen displays a panel of options (see Figure 5.2j ).
Figure 5.2j Programmed Move Prompt
The name of the move program currently loaded is displayed in the Program name panel (in the
above example, the program is called “move”). Moves are first programmed using the Teach
function. Later they may be executed using the Run function.
X X
Reference Line
+X -X
+Y
-Y
Reference Line
1 2
Programmed Move
Program name:
Run Teach
move
Quit