Veeco Dektak 150, Руководство пользователя

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9-4 Calibration and Maintenance
c. Click any underlined scan parameter to open the Scan Parameters dialog box.
d. Select Use Current Location .
e. In the Profile Section, select Hills&Valleys .
10 Perform the preliminary scans:
a. Select Run > Scan Here . The scan should be at least 2500
μ m
in length
.
b. As you observe the profile trace in the Data Plot window, do the following, as necessary:
•
If the profile trace goes out of range, re-level the stage.
•
If the first falling edge is not at 375
μ
m
on a vertical standard or the first rising edge is not at 375
μ
m
on a step-height standard , adjust the scan start position until it is within 50
μ m.
The plot should resemble the one shown in
Figure 9-3
.
Figure 9-3: Plot from Calibration in the 65
kÅ Range
Calculating the Average Step Height
1 Select Calibration > Vertical from the menu bar.
2 If the VCF was not cleared for the 65
kÅ range prior to the preliminary measurements
, select the 65
kÅ range
and click Clea r (see
Figure 9-1
).
3 Select Run > Auto Program from the menu bar (or press the F5 key on the keyboard) to run the five scans
using the 65K_SIMETRICS.prog automation program.
4 Follow the instructions in the Calibration Wizard that appears. During the automation program, the
database logs the Average Step Height (ASH) from all five scans.
Reference cursor
and bandwidth
Measurement cursor