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VAT 61232-KEGJ-0002, Инструкции по установке, эксплуатации и обслуживанию

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Installation, Operating & Maintenance Instructions 

Series 612 DN 40 (I.D. 1.5”), RS485

 

 

 

 

VAT Vakuumventile AG, CH-9469 Haag, Switzerland 

Tel +41 81 771 61 61   Fax +41 81 771 48 30   [email protected]   www.vatvalve.com

 

289917EA

 

2011-07-07 

7/69 

 

1.1.1 Valve 

unit 

 

Valve unit 

Pressure range at 20

°

C 

1 x 10E-8 mbar to 1.2 bar (abs) 

Leak rate to outside at 20

°

C

 

 

1 x 10E-9 mbar l/s 

Cycles until first service 

2’000’000 (unheated and under clean conditions) 

Admissible operating temperature 

10°C to +150°C 

Mounting position 

Any. 

Control unit for ISO-KF version needs support when mounted on horizontal 
piping and control unit does not hang. 

Wetted materials 

 

- Body 

Stainless steel 316L (1.4404 or 1.4435) 

- Plate 

Stainless steel 316L (1.4404 or 1.4435) 

- Shaft 

Stainless steel 316L (1.4404 or 1.4435 ) 

- Plate screws 

- Rotary feedthrough seals atmosphere side 

Stainless steel 316L (A4) 

FKM (e.g. Viton®) 

- Rotary feedthrough seals vacuum side 

FKM (e.g. Viton®) 

- Slide bearing for shaft 

iglidur® X 

Max. differential pressure on plate 

1000 mbar 

Min. controllable conductance (C

min

) 

[N

2

 molecular flow] 

0.25 l/s 

Conductance in open position [N

2

 molecular flow] 

80 l/s 

Dimensions 

Refer to dimensional drawing of specific valve ordering number  

(available on request) 

 
 

Содержание 61232-KEGJ-0002

Страница 1: ...icated on each product as per the label below or similar made in Switzerland Fabrication No 612 A Fabrication number sample picture Explanation of symbols Read declaration carefully before you start a...

Страница 2: ...ms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original...

Страница 3: ...tion 20 3 1 Introduction 20 3 1 1 Local operation 21 3 1 2 Remote operation 21 3 1 3 Safety mode 22 3 1 4 Service indication 22 3 2 Operation under increased temperature 22 3 3 Behaviour during power...

Страница 4: ...9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 4 69 6 Drawing 64 7 Spare parts 65 7 1 Control and actuating unit 65 7 2 Valve unit...

Страница 5: ...30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 5 69 1 Use of product This product is a Butterfly control valve for downstream pressure control in vacuum systems Use product for clean and dry...

Страница 6: ...utputs 3 Input voltage Input current Breaking capacity 70 VDC or 70 V peak max 0 5 ADC or 0 5 A peak max 10 W max connector INTERFACE Analog outputs 3 optional 0 10 VDC 1 mA max connector INTERFACE PF...

Страница 7: ...y Control unit for ISO KF version needs support when mounted on horizontal piping and control unit does not hang Wetted materials Body Stainless steel 316L 1 4404 or 1 4435 Plate Stainless steel 316L...

Страница 8: ...69 2 Installation 2 1 Unpacking Valves DN63 2 and larger must not be lifted solely by the actuator 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and away...

Страница 9: ...ensor s 2 according to the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 4 Connect pressure sensor cable 3 to sensor s and then to valve conne...

Страница 10: ...of ISO KF flanges Tightening torques for ISO KF flange connections depends on the type of seal which is used Follow recommendations of seal manufacturer 2 4 Admissible forces Forces from the weight of...

Страница 11: ...dmissible forces at controller Attention Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regards...

Страница 12: ...onnected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Length of co...

Страница 13: ...ax B1 min B2 min d1 d2 copper tinned 200 mm 25 mm 25 mm 4 5 mm customized Note Connection plates of ground strap must be total plane for a good electrical contact Note The connection point at chassis...

Страница 14: ...dule SPS that converts 15 VDC from the 24 VDC Concepts External 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC sensors Refer to chapter Power and sensor connec...

Страница 15: ...1 Sensor power wiring via controller Note Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector...

Страница 16: ...e shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not...

Страница 17: ...4 1 Sensor power wiring via controller Note Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connect...

Страница 18: ...e shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not...

Страница 19: ...vice cable and software from VAT You can either use our freeware Control View which can be downloaded from www vatvalve com or purchase our Control Performance Analyzer Alternatively the VAT Service B...

Страница 20: ...tion Valve opening Fingers and objects must be kept out of the valve opening and away from moving parts Risk of injury Do not connect the controller to power before the valve isn t installed complete...

Страница 21: ...monitoring basic diagnostic Control Performance Analyzer supports parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnostic Whe...

Страница 22: ...eaned or an obstruction is present A service request is indicated when the control unit detects that motor steps are apparently not effective This may happen when the valve unit is heavily contaminate...

Страница 23: ...is a 4 digit display located on the panel It displays configuration status and position information For details refer to following tables Power up Description Digit 1 Digit 2 Digit 3 Digit 4 1 E 0 0...

Страница 24: ...en activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode for details D 0 100 valve position 0 closed 100 open Power failure F Service request 1 valve requires cleanin...

Страница 25: ...tion of the sensor offset voltage Refer to chapter ZERO for details 5 LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEARN for details Note...

Страница 26: ...URATION 2 Setup example Description RS485 selected half duplex operation device address 015 Command s 2210151000 CR LF Answer s 22 CR LF 3 6 2 Valve and sensor configuration Basic valve configuration...

Страница 27: ...stem setup The LEARN routine determines the characteristic of the vacuum system Based on this the PID controller is able to run fast and accurate pressure control cycles This characteristic depends on...

Страница 28: ...Pa m 3 s pWP pressure of working point Pa qWP CWP pWP CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar qWP CWP 78 7 pWP CWP requi...

Страница 29: ...to the position setpoint Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS485 control commands for details Select or enter position setpo...

Страница 30: ...below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas conditions...

Страница 31: ...or details Set gain factor in menu Setup Control Parameter Send PID CONTROLLER CONFIGURATION 3 10 1 2 Sensor delay adjustment Sensor delay adjustment effects Stability Default value is 0 Adjustment ra...

Страница 32: ...ng on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situ...

Страница 33: ...s 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed until required response is achieved Local operation Control View Control Performance Analyzer or...

Страница 34: ...1 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 34 69 Active digital inputs have higher priority than RS485 commands a Configuration with switches for digital inputs Note Do...

Страница 35: ...witzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 35 69 b Configuration with voltage source for digital inputs Note Do not connect other pins than...

Страница 36: ...N nodes are connected in a multipoint RS485 network A termination resistance is necessary on both ends of the line to eliminate reflections Use 120 resistors R on both ends The RS485 network must be...

Страница 37: ...RS485 control command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuration Conf...

Страница 38: ...essary Commands and values are case sensitive Data length of value depends on command Number of characters is specified in the description Some commands do not require the value element CR is Carriage...

Страница 39: ...g of position SETPOINT Note Reading returns position setpoint only in case pressure control is not selected Set H CR LF H CR LF HOLD This function stops the valve at the current position It is effecti...

Страница 40: ...POSITION CONTROL 3 CLOSED 4 OPEN 5 PRESSURE CONTROL 6 HOLD 7 LEARN 8 INTERLOCK OPEN by digital input 9 INTERLOCK CLOSED by digital input C power failure D safety mode E fatal error read FATAL ERROR S...

Страница 41: ...CONTROL STATUS data length 8 characters a 0 no pressure control e g if position control is selected 1 wide range control PD control 2 close up control PID control cdefgh reserved do not use The contro...

Страница 42: ...c 0 power failure battery ready 1 power failure battery not ready d 0 compressed air supply ok 1 compressed air supply not ok efgh reserved do not use This function returns warning information about...

Страница 43: ...LEARN gasflow missing g 0 ok 1 sensor unstability during LEARN h reserved do not use This function checks the status of LEARN and indicates if the conditions during LEARN were ok Get i 34 CR LF i 34...

Страница 44: ...et i 72 CR LF i 72 xxxxxxxxxx CR LF POWER UP COUNTER data length 10 characters xxxxxxxxxx number of power ups This function returns the number of control unit power ups Get i 80 CR LF i 80 abcdefgh CR...

Страница 45: ...munication to service port is interrupted the valve will automatically change to remote operation Set s 20 abcdefgh CR LF s 20 CR LF Get i 20 CR LF i 20 abcdefgh CR LF INTERFACE CONFIGURATION 1 data l...

Страница 46: ...cdefgh CR LF s 01 CR LF Get i 01 CR LF i 01 abcdefgh CR LF SENSOR CONFIGURATION data length 8 characters a 0 no sensor 1 1 sensor operation sensor 1 input 2 2 sensor operation with automatic changeove...

Страница 47: ...e between the valve and the host computer for POSITION PRESSURE and SENSOR READING Note In case ZERO has been performed gauge offset for PRESSURE and SENSOR READING is compensated Note In case 2 senso...

Страница 48: ...arting with a zero xxxxxxx Pressure limit for LEARN value depends on configuration refer to RS485 setup commands RANGE CONFIGURATION for details This command starts LEARN By OPEN VALVE CLOSE VALVE or...

Страница 49: ...0 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 A 5 0 B 5 5 C 6 0 D 6 5 E 7 0 F 7 5 G 8 0 H 8 5 I 9 0 J 9 5 K 10 0 efgh 0000 reserved do not change This command selects gain factor sensor...

Страница 50: ...flow to many characters E 000002 CR LF Commands CR or LF missing E 000010 CR LF missing E 000011 CR LF Unknown command E 000020 CR LF E 000021 CR LF Invalid value E 000022 CR LF E 000023 CR LF Value o...

Страница 51: ...21 and position is 009999 fatal error rotation angle of valve plate limited during power up Valve plate centric adjusted Valve unit heavy contaminated Valve plate mechanically obstructed Adjust valve...

Страница 52: ...s Refer to Display shows M100 in this table Display shows M C Maintenance mode active Pin 14 of service connector is connected to ground Plate will close Further movement of plate is blocked Note Prio...

Страница 53: ...details Select PRESSURE CONTROL mode Refer to Pressure control for details Perform LEARN Refer to Setup procedure for details PRESSURE CONTROL not optimal Setup done completely LEARN done ZERO perform...

Страница 54: ...rformed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No A Fabrication number has always to be specified All supplies e g compress...

Страница 55: ...tenance period is the lifetime of the vacuum grease being limited under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT can...

Страница 56: ...you can not access the coupling screw turn plate by hand until you can access the coupling screw with Allen Wrench Allen Wrench 2mm Remove control and actuating unit from valve unit 3 Unfasten and re...

Страница 57: ...8 Clean shaft feedthrough and valve body Lint and dust free cloth soaked with isopropyl alcohol 9 Lubricate seal contact surface of valve body with a slight film of vacuum grease 0 025 ml 10 Lubricat...

Страница 58: ...Required tool Mount mechanical unit to valve body 15 Assemble mechanical unit in reverse order as disassembled steps 6 to 5 16 Align pedestal parallel to valve body and tighten the 2 mounting screws...

Страница 59: ...com www vatvalve com 289917EA 2011 07 07 59 69 Description Required tool 20 Assemble control and actuating unit to valve unit Tighten mounting screws adequately Allen Wrench 3mm Mount control and actu...

Страница 60: ...PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The curves...

Страница 61: ...All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel removed Note A...

Страница 62: ...1 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 62 69 Description Required tool 1 Remove the panel screws Pozidriv screw driver size 1 2 Remove female screw loc...

Страница 63: ...rd 6 Remove or replace interface board 7 Remove or replace option board 8 Insert master board and interface board in reverse order as disassembled at correct positions see steps 6 5 9 Insert option bo...

Страница 64: ...Maintenance Instructions Series 612 DN 40 I D 1 5 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 64 6...

Страница 65: ...ure that the appropriate spare parts are supplied 7 1 Control and actuating unit Item Description Valve size Product ordering number All sizes 612 Control and actuating unit 494531 Option board with S...

Страница 66: ...C 249775 Control Performance Analyzer package for Windows consisting of software and cable 600SP 99LB 000 Control View software for Windows 248126 free download from www vatvalve com or available on o...

Страница 67: ...and Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 67 69 7 4 1 Centering ring with Viton o ring Description Valve size Product ordering number DN 40 1 612...

Страница 68: ...expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging storage...

Страница 69: ...nance Instructions Series 612 DN 40 I D 1 5 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289917EA 2011 07 07 69 69 This...

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