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Installation, Operating & Maintenance Instructions
Series 612 DN 40 (I.D. 1.5”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
289917EA
2011-07-07
29/69
3.7 Close
valve
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Push CLOSE button
Send CLOSE VALVE
3.8 Open
valve
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Push OPEN button
Send OPEN VALVE
3.9 Position
control
The valve position is directly controlled according to the position setpoint.
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Select or enter position setpoint
Send POSITION CONTROL
3.10 Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control performance.
Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow,
gas type).
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Select or enter pressure setpoint
Send PRESSURE CONTROL