TECHNICAL INFORMATION
The pump can be water cooled or air cooled: in the
first case the customer can use the dedicated
channels on the pump body, in the second case
an external optional fan is available.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01
μ
m.
The pump can operate in any position and can be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 16 NW flange (KF25 – optional).
PUMP
CONNECTOR
CABLE
CONTROLLER
Controller Description
The dedicated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer and is composed of two PCBs which in-
clude power supply and 3-phase output, analog
and input/output section, microprocessor and digi-
tal section.
The power supply, together with the 3-phase out-
put, converts the single phase AC mains supply
into a 3-phase, low voltage, medium frequency
output which is required to power the pump.
The controller can be operated by a remote host
computer via the serial connection. A Windows-
based software is available (optional).
TECHNICAL SPECIFICATION
Pumping speed
With CFF 8” or
ISO 160:
N
2
: 280 l/s
He: 230 l/s
H
2
: 210 l/s
With CFF 6” or
ISO 100:
N
2
: 250 l/s
He: 220 l/s
H
2
: 200 l/s
Compression ratio
N
2
: >2 x 10
8
He: 1 x 10
5
H
2
: 2 x 10
4
Base pressure *
(with recommended
forepump)
mechanical:
< 2 x 10
-10
mbar (< 1.5 x 10
-10
Torr)
diaphragm:
2 x 10
-8
mbar (1.5 x 10
-8
Torr)
Inlet flange
CFF 8" O.D.
ISO 160
CFF 6” O.D.
ISO 100
Foreline flange
KF16 NW (KF25 – optional)
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
forepump
mechanical: Varian DS 102
dry pump: Varian SH 100
Operating position
any
Cooling
requirements
Natural air convection
Forced air or water optional
Operating ambient
temperature
+ 5° C to + 35° C
Coolant water
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout temperature
120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
Vibration level
(displacement)
<
0.01
μ
m at inlet flange
Noise level
≤
45 dB (A) at 1 meter
Pwr supply (mains):
Input
voltage:
Input
freq.:
Max input pwr:
Stand-by
pwr:
Max oper. power:
100 - 240 Vac
50 - 60 Hz
300 VA
10 W
150 W with water or air cooling
Protection fuse
4 A
Pwr supply (24 Vdc):
Input
voltage:
Max input pwr:
Stand-by
pwr:
Max oper. power:
24 Vdc
200 W
10 W
150 W with water or air cooling
Protection fuse
8 A
Compliance with:
UNI EN 292-1
UNI EN 292-2
EN-CENELEC 55011
IEC 1000-4-2 (ex 801-2)
IEC 1000-4-3 (ex 801-3)
IEC 1000-4-4 (ex 801-4)
EN 61010-1 (IEC 1010-1)
EN 1012-2
Power cable
With European or NEMA plug
3 meters long (optional)
Serial communica-
tion (Navigator kit)
RS232 cable with a 9-pin D type
male connector and a 9-pin D type
female connector, and Navigator
software (optional)
Storage temperature
-20° C to +70° C
Input
75 Vac, three phase, 963 Hz
Lubricant permanent
lubrication
Installation category
II
Pollution degree
2
Storage temperature
- 20° C to + 70° C
Weight kg (lbs):
Kit:
Controller:
ISO 100 and 160: 4.5 (10)
CFF 6” and 8”: 8 (17.6)
1 (2.2)
* (
According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the comple-
tion of test dome bake-out, with a Turbopump fitted with a Con-
Flat flange and using the recommended pre-vacuum pump)
70
87-900-946-01(F)
