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Varian Turbo-V70LP, Инструкция по эксплуатации

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Varian Turbo-V70LP Скачать руководство пользователя страница 39

TECHNICAL INFORMATION 

Screw the flange mod. 969-9109 on the pump, 
taking care of the o-ring right position. 

TYPICAL LAYOUT DIAGRAM 

 

Assemble the seal ring and lock the vent device in 
position using the KF klamp. 

 

1. Turbo-V 

controller 

VIBRATION ISOLATOR INSTALLATION 

2. Vent 

valve 

A vibration damper model 969-9340 for ISO 63 
inlet flange version pump is available as accesso-
ries. 

3.  Vacuum pump shut-off valve (optional) 

4.  System vent valve (optional) 

 

5. Vacuum 

chamber 

It typically reduces the vibration transmitted from 
the Turbo-V 70LP pump to the system by a factor 
of 20. 

6. Ionization 

gauge 

7.  Fore-vacuum pump connecting flange 

 

8.  Oil mist eliminator 

Please refer to the relevant instruction manual. 

9.  Fore-vacuum pump with internal one-way 

valve 

10.  Fore-vacuum pump control relay 

11.  Connection for water cooling 

12.  Roughing line with valve (optional) 

13. Turbopump 

Connection A - HIGH VACUUM FLANGE 

To connect the Turbo-V70LP pump to the ISO 
inlet flange, remove the outer ring and position the 
centering ring as shown in the figure. 

 

Then fix the two flanges with the clamps or claws 
as shown in the figure. 

 34 

87-900-862-01(E) 

Содержание Turbo-V70LP

Страница 1: ...ies MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK SIKIRJA OD...

Страница 2: ...Turbo V 70LP...

Страница 3: ......

Страница 4: ......

Страница 5: ...DESCRIPTION OF THE TURBOPUMP 25 TECHNICAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 30 BASE FIXING KIT INSTALLATION 31 AIR COOLING KIT I...

Страница 6: ...rbomolecolari nel modo Soft Start quando ricevute e messe in funzione per la prima volta il tempo di immagazzinamento di una pompa turbomolecolare di 10 mesi dalla data di spedizione ATTENZIONE Se per...

Страница 7: ...inerte esente da polvere o particelle La pressione di ingresso attraverso l apposita porta deve essere inferiore a 2 bar ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa qu...

Страница 8: ...nden Anweisungen zu beachten W hrend des Transports der Handhabung und der Einlage rung der Pumpen d rfen die folgenden Grenzwerte nicht berschritten werden Temperatur von 20 C bis 70 C Relative Feuch...

Страница 9: ...werden Damit die Flanschgrenztemperatur der Turbopumpe 120 C nicht berschreitet sollte immer bei ausheizbaren Vakuumsystemen die TP mit Wasserk hlung arbeiten GEFAHR W hrend des Ausheizens d rfen wede...

Страница 10: ...le stockage des pompes doi vent imp rativement avoir lieu dans les conditions ambiantes suivantes temp rature de 20 C 70 C humidit relative de 0 95 non condensante A la premi re utilisation les pompes...

Страница 11: ...de toucher la turbopompe ainsi que ses accessoires ven tuels pendant les op rations de chauffage La temp rature lev e peut causer des l sions aux personnes ATTENTION Pour le refoulement de l air de la...

Страница 12: ...tales temperatura entre 20 C y 70 C humedad relativa entre 0 y 95 no condensante el cliente deber activar siempre las bombas turbomoleculares en modalidad Soft Start al recibirlas y ponerlas en funcio...

Страница 13: ...La alta temperatura puede provocar lesiones a las personas ATENCION Para el env o de aire de la bomba utilizar aire o gas inerte sin polvo o part culas La presi n de entrada a trav s de la puerta apr...

Страница 14: ...observadas as seguintes prescri es durante o transporte o deslocamento e a armazenagem das bombas as condi es ambientais devem ser as seguintes temperatura de 20 C a 70 C umidade relativa de 0 a 95 n...

Страница 15: ...opera es de aquecimento Utilizar sempre o resfriamento com gua durante as opera es de aquecimento PERIGO N o tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elev...

Страница 16: ...en in acht worden genomen tijdens transport verplaatsing en opslag van de pompen moet aan de volgende omgevingscondities worden voldaan temperatuur van 20 C tot 70 C relatieve vochtigheid van 0 tot 95...

Страница 17: ...ns het verwarmen altijd waterkoeling toe GEVAAR Raak de pomp en eventuele accessoires niet tijdens het verwarmen aan De hoge temperatuur kan lichamelijk letsel veroorzaken ATTENTIE Gebruik voor de luc...

Страница 18: ...unktion og driftssikkerhed i de turbomolekyl re pumper fra Varian S rg for at omgivelserne opfylder f lgende betingelser i forbindelse med transport flytning og opbevaring af pumperne temperatur fra 2...

Страница 19: ...ventuelt tilbeh r under opvar mningsman vrerne Den h je temperatur kan for rsage kv stel ser p personer PAS P Til pumpens luftafl b anvendes luft eller en inaktiv luftart der er fri for st v og partik...

Страница 20: ...f r att garantera optimal prestanda och drifts kerhet f r Varian turbomolekyl ra pumpar Vid transport flytt och lagring av pumparna ska f ljande omgivningsf rh llanden respekteras Temperaturomr de 20...

Страница 21: ...en av pumploppet f r temperaturen vid inloppet aldrig bli h gre n 120 C Under uppv rmningen m ste vattenkylningen anv ndas VARNING Vidr r inte turbopumpen eller n gra tillbeh r under uppv rmningen f r...

Страница 22: ...Varian turbo molekyl re pumper m f lgende anvisninger f lges Under transport flytting og lagring av pumpene m ikke f lgende milj forhold overstiges Temperatur fra 20 C til 70 C Relativ fuktighet fra...

Страница 23: ...under oppvarmingen ADVARSEL Ikke ber r turbopumpen eller noe av tilleggsutstyret under oppvarmingen De h ye temperaturene kan f re til brannskader FORSIKTIG Bruk st v og partikkelfri luft eller inakti...

Страница 24: ...aan seuraavia ymp r ivi olosuhteita ei tule ylitt l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Asiakkaan tulee aina k ynnist turbomolekyylinen pumppu soft start tavalla vastaanottaessaan...

Страница 25: ...tai sen lis osiin kuumentamisen aikana Korkea l mp tila voi saada aikaan henkil iden loukkaantumisia HUOMIO P stett ess pumppuun ilmaa tulee k ytt ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia...

Страница 26: ...kat th metafor th diak nhsh kai thn apoq keush twn antli n den pr pei na uperba nontai oi ex j periballontik j sunq kej qermokras a ap 20 C wj 70 C scetik ugras a ap 0 wj 95 mh sumpukn simh o pel thj...

Страница 27: ...NDUNOS Mhn agg zete thn tourmpoantl a kai ta di fora exart mat thj kat tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH Gia na diocete sete me a ra thn antl a cr...

Страница 28: ...s the following environmental specifications should not be exceeded temperature range 20 C to 70 C relative humidity range 0 to 95 non condensing the turbomolecular pumps must be always soft started w...

Страница 29: ...ies during the heating process The high temperatures may cause burns CAUTION Use air or inert gas free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar...

Страница 30: ...ed air cooling to cool the pump in the cases where it is used under heavy load or when natural convection is insufficient for cooling purposes A thermistor sensor is mounted near the upper bearing to...

Страница 31: ...requirements Natural air convection Forced air or water optional Operating ambient temperature 5 C to 35 C Coolant water flow 10 l h 0 05 GPM temperature 10 C to 30 C pressure 2 to 4 bar 30 to 60 Psi...

Страница 32: ...ph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum...

Страница 33: ...the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on either pump series and is supplied with a small tab for easy...

Страница 34: ...tact with the pump wall to obtain fast and efficient heating Switch on the heater while the turbopump is in op eration If for any reason the turbopump body overheats it will be automatically cut out b...

Страница 35: ...tic hoses from the water supply must be fitted to the two nozzles NOTE These hoses must be held on the respective noz zles using hose clips to avoid that the tube do not detach during operation The pl...

Страница 36: ...not protrude from the other end Use the Allen key supplied for this purpose Turn the pump upside down CAUTION Before overturning the pump remove the protec tion screen if fitted Insert the three feed...

Страница 37: ...w 9 l s 10 CFM input voltage 24 Vdc maximum power 2 16 W dimensions 60x60 mm 2 36x2 36 inches Open the package containing the feet and respec tive screws and install them as indicated in the in stalla...

Страница 38: ...w the adapter 1 into the vent hole 2 of the pump Fix the valve 3 to the adapter 2 Tighten the valve using a 16 mm hexagonal span ner CAUTION Do not overtighten the valve as this may damage the thread...

Страница 39: ...er It typically reduces the vibration transmitted from the Turbo V 70LP pump to the system by a factor of 20 6 Ionization gauge 7 Fore vacuum pump connecting flange 8 Oil mist eliminator Please refer...

Страница 40: ...the screw threads protruding from the flange and between the nuts and flange Note that the 2 75 CF flange has six blind holes Attach the units and tighten each one in turn Re peat the sequential tigh...

Страница 41: ...ed to the temperature sensor NTC type 30 K resistance at 25 C and pin E is connected to the pump ground If the temperature sensor is disconnected the pump will not start To prevent damage to the pump...

Страница 42: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 43: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 44: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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