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INSTRUCTIONS FOR USE 

 23 

87-900-875-01(C) 

GENERAL INFORMATION 

This equipment is destined for use by professionals. The user 
should read this instruction manual and any other additional 
information supplied by Varian before operating the equipment. 
Varian will not be held responsible for any events occurring due 
to non-compliance, even partial, with these instructions, im-
proper use by untrained persons, non-authorized interference 
with the equipment or any action contrary to that provided for 
by specific national standards. 
The Turbo-V300HT series pumps are turbo-molecular pumps 
for high and ultra-high vacuum applications and can pump any 
type of gas or gas compound. They are not suitable for pump-
ing liquids or solid particles. The pumping action is obtained 
through a high speed turbine (max. 56000 rpm) driven by a 
high-performance 3-phase electric motor. The Turbo-V300HT 
pumps are free of contaminating agents and, therefore, are 
suitable for applications requiring a "clean" vacuum. 
The following paragraphs contain all the information necessary 
to guarantee the safety of the operator when using the equip-
ment. Detailed information is supplied in the appendix "Techni-
cal Information". 

This manual uses the following standard protocol:

 

 

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WARNING!

 

The warning messages are for attracting the attention of the 
operator to a particular procedure or practice which, if not fol-
lowed correctly, could lead to serious injury. 

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   CAUTION 

The caution messages are displayed before procedures which, 
if not followed, could cause damage to the equipment. 

NOTE 

The notes contain important information taken from the text. 

STORAGE 

When transporting and storing the pumps, the following envi-
ronmental requirements should not be exceeded: 

− 

temperature: from -20° to +70 °C 

− 

relative humidity: 0 - 95% (non-condensing) 

If the storage time is long start the pump using the SOFT 
START mode (see control unit manual). 

PREPARATION FOR INSTALLATION 

The pump is supplied in a special protective packing. If this 
shows signs of damage which may have occurred during 
transport, contact your local sales office. 
When unpacking the pump, be sure not to drop it and avoid 
any kind of sudden impact or shock vibration to it. 
Do not dispose of the packing materials in an unauthorized 
manner. The material is 100% recyclable and complies with 
EEC Directive 85/399. 

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   CAUTION 

In order to prevent outgassing problems, do not use bare 
hands to handle components which will be exposed to vacuum. 
Always use gloves or other appropriate protection. 

NOTE 

Normal exposure to the environment cannot damage the pump. 
Nevertheless, it is advisable to keep it closed until it is installed 
in the system, thus preventing any form of pollution by dust. 

 

INSTALLATION 

Do not install or use the pump in an environment exposed to 
atmospheric agents (rain, snow, ice), dust, aggressive gases, 
or in explosive environments or those with a high fire risk. Dur-
ing operation, the following environmental conditions must be 
respected: 

− 

maximum pressure: 2 bar above atmospheric pressure 

− 

temperature: from +5 °C to +35 °C 

− 

relative humidity: 0 - 95% (non-condensing) 

In the presence of magnetic fields the pump must be protected 
using a ferromagnetic shield. See the appendix "Technical In-
formation" for detailed information. 
The Turbo-V300HT series pumps must only be used with one 
of the special Varian controllers (series 969-9424, 969-9524, 
969-9870) and must be connected to a primary pump (see 
"Technical Information"). 
 

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CAUTION!

 

Do not remove the adhesive and protective cap before con-
necting the turbopump to the system. 
 
 

 

 

Содержание Turbo-V300HT

Страница 1: ...9 9040 series MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU ES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEK...

Страница 2: ...Turbo V 300HT...

Страница 3: ...CAL SPECIFICATION 26 INLET SCREEN INSTALLATION 28 HEATER BAND INSTALLATION 29 WATER COOLING KIT INSTALLATION 29 AIR COOLING KIT INSTALLATION 31 GAS PURGE VALVE INSTALLATION 31 VENT VALVE INSTALLATION...

Страница 4: ...e seguenti condizioni ambientali temperatura da 20 C a 70 C umidit relativa 0 95 non condensante Se il tempo di immagazzinamento molto lungo avviare la pompa nel modo SOFT START vedere il manuale del...

Страница 5: ...E Per la mandata all aria della pompa utilizzare aria o gas inerte esente da polvere o particelle La pressione di ingresso attra verso l apposita porta deve essere inferiore a 2 bar oltre la pressione...

Страница 6: ...en k nnen ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen m ssen folgende klimatische Verh ltni...

Страница 7: ...W hrend des Ausheizens d rfen weder die Pumpe noch eventuelle hei e Anschlu teile ber hrt werden denn es besteht Verbrennungsgefahr ACHTUNG F r die Bel ftung der Pumpe trockene staub und partikelfreie...

Страница 8: ...s renseignements importants isol s du texte EMMAGASINAGE Pendant le transport et l emmagasinage des pompes il faudra veiller respecter les conditions environnementales suivantes temp rature de 20 C 70...

Страница 9: ...ER Eviter de toucher la turbopompe ainsi que ses accessoires ventuels pendant les op rations de chauffage La temp rature lev e peut causer des l sions aux personnes ATTENTION Pour le refoulement de l...

Страница 10: ...car da os al equipo NOTA Las notas contienen informaci n importante extra da del texto ALMACENAMIENTO Durante el transporte y el almacenamiento de las bombas se deber cumplir con las condiciones ambie...

Страница 11: ...ocar la turbobomba y sus posibles accesorios durante las operaciones de calentamiento La alta temperatura puede provocar lesiones a las personas ATENCION Para el env o de aire de la bomba utilizar air...

Страница 12: ...s destacadas do texto ARMAZENAGEM Durante o transporte e a armazenagem das bombas n o devem ser superadas as seguintes condi es ambientais temperatura de 20 C a 70 C humidade relativa 0 95 n o condens...

Страница 13: ...tocar a turbobomba e os seus eventuais acess rios durante as opera es de aquecimento A elevada temperatura pode causar les es s pessoas ATEN O Para a sa da de ar da bomba utilizar ar ou g s inerte se...

Страница 14: ...anwezig zijn temperatuur van 20 C tot 70 C relatieve vochtigheid 0 95 niet condenserend Als de opslagperiode van lange duur is de pomp met de SOFT START wijze opstarten zie handleiding regeleenheid UI...

Страница 15: ...f inert gas zonder stof of vaste deeltjes De inlaatdruk via de hiervoor bestemde poort moet minder dan 2 bar boven de atmsoferische druk bedragen ATTENTIE Vermijd schokken trillingen of bruuske verpla...

Страница 16: ...ansport og oplagring af pumpene skal f lgende omgivelsesbetingelser v re overholdt temperatur fra 20 C til 70 C relativ fugtighed 0 95 ikke kondenserende Hvis pumperne oplagres gennem lang tid skal de...

Страница 17: ...kler Indgangstrykket gennem den s rlige bning skal v re under 2 bar PAS P Undg sammenst d vibrationer eller bratte bev gelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af le...

Страница 18: ...e krav p omgivningsf rh llanden g ller vid transport och f rvaring av pumpen temperatur fr n 20 C till 70 C relativ luftfuktighet 0 95 utan kondens Efter l ng f rvaring skall pumpen startas med MJUKST...

Страница 19: ...undvika br nnskador VIKTIGT Anv nd luft eller delgas fri fr n damm och partiklar f r luftning av pumpen Trycket vid inloppet f r vara h gst 2 bar ver atmosf riskt tryck VIKTIGT Undvik sammanst tninga...

Страница 20: ...pene transporteres eller lagres m f lgende milj messige krav oppfylles temperatur fra 20 C til 70 C relativ fuktighet 0 95 uten kondens Skal utstyret lagres lengre m pumpen MYKSTARTES se kontrollenhet...

Страница 21: ...er inaktiv gass ved lufting av pumpen Trykket ved inngangen m ikke v re mindre enn 2 bar over atmosf risk trykk FORSIKTIG Unng st t svingninger eller plutselige bevegelser av turbinpumpen n r den er i...

Страница 22: ...ymp rist a koskevien ehtojen olla t ytettyin l mp tila 20 C 70 C suhteellinen kosteus 0 95 ei tiivist v Jos varastointiaika on hyvin pitk tulee pumppu k ynnist SOFT START tavalla katso valvojan k ytt...

Страница 23: ...den loukkaantumisia HUOMIO P stett ess pumppuun ilmaa tulee k ytt ilmaa tai jalokaasua joissa ei ole p ly tai hiukkasia Sis njohtavan paineen siihen sopivan aukon l pi t ytyy olla alle 2 bar ia paitsi...

Страница 24: ...skeu SHMEIWSH SHMEIWSH SHMEIWSH SHMEIWSH Oi shmei seij peri coun shmantik j plhrofor ej pou coun apospaste ap to ke meno APOQHKEUSH APOQHKEUSH APOQHKEUSH APOQHKEUSH Kat th di rkeia thj metafor j kai t...

Страница 25: ...tij ergas ej q rmanshj H uyhl qermokras a mpore na prokal sei proswpik j bl bej PROSOCH PROSOCH PROSOCH PROSOCH Gia na diocete sete me a ra thn antl a crhsimopoie ste a ra adran j a rio kaqar ap sk n...

Страница 26: ...following envi ronmental requirements should not be exceeded temperature from 20 to 70 C relative humidity 0 95 non condensing If the storage time is long start the pump using the SOFT START mode see...

Страница 27: ...as free from dust or particles for venting the pump The pressure at the vent port must be less than 2 bar above atmospheric pressure CAUTION Avoid impacts oscillations or harsh movements of the pump w...

Страница 28: ...inless steel These are supported and accu rately positioned by spacer rings The Macrotorr stators are in the form of self positioning machined discs with pumping channels and an opening restricted by...

Страница 29: ...ical Varian SD 300 diaphragm Varian MD 60 Operating position any Cooling requirements Natural air convection Forced air or water optional Operating ambient temperature 5 C to 35 C Coolant water flow 2...

Страница 30: ...TION 27 87 900 875 01 C Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanica...

Страница 31: ...the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on each pump model and is supplied with a small tab for easy r...

Страница 32: ...d only when operat ing with an inlet pressure less than 10 4 mbar and with water cooling CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to prevent the...

Страница 33: ...ed into the suit able holes of the pump Cooling may be carried out either through an open circuit with eventual discharge of the water or us ing a closed circuit cooling system The water temperature m...

Страница 34: ...in the plate line up with those in the pump base Insert the respective washers and screws and tighten with a screwdriver Connect the fan to the controller GAS PURGE VALVE INSTALLATION A gas purge valv...

Страница 35: ...ower failure 5 sec maximum and enables an automatic vent operation Unscrew the threaded plug see figure below Screw the vent valve into the pump inserting the supplied adapter between the valve and th...

Страница 36: ...ring right position Assemble the seal ring and lock the vent device in position using the KF klamp VIBRATION ISOLATOR INSTALLATION Four vibration isolators for ISO and CFF inlet flange version pumps a...

Страница 37: ...o connect the Turbo V300HT pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure Then fix the two flanges with the clamps or claws as shown in the f...

Страница 38: ...s When using a mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil back streaming Connection C ELECTRICAL The...

Страница 39: ...pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas is descr...

Страница 40: ...ion no particular problem should be expected However if the effect is grater than the case should be carefully reviewed by Varian s specialist As a matter of fact in case of high magnetic fields also...

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