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Appendix
A-2
Relative Ionization Gauge
Substance
Formula
Gas Correction Factor
Acetaldehyde
C
2
H
4
O
2.6
Acetone
(CH
3
)
2
CO
3.6
4.0
3.6
Acetylene
C
2
H
2
1.9
2.0
Air
1.0
0.98
Ammonia
NH
3
1.3
1.2
1.3
Amylene:
ISO
·
ISO
·
C
5
H
10
5.9
cyclo
·
CY
·
C
5
H
10
5.8
Argon
Ar
1.3
1.1
1.2
0.9
Benzene
C
6
H
6
5.9
5.8
5.7
5.9
6.0
Benzoic Acid
C
6
H
5
COOH
5.5
Bromine
Br
3.8
Bromomethane
CH
3
Br
3.7
Butane:
n
·
n
·
C
4
H
10
4.9
4.7
ISO
·
ISO
·
C
4
H
10
4.6
4.9
Cadmium
Cd
2.3
3.4
Carbon Dioxide
CO
2
1.4
1.4
1.5
1.5
1.4
Relative Ionization Gauge
Substance
Formula
Gas Correction Factor
Carbon Disulfide
CS
2
5.0
4.7
4.8
Carbon Monoxide
CO
1.05
1.05
1.1
Carbon Tetrachloride
CCI
4
6.0
6.3
Cesium
Cs
4.3
2.0
4.8
Chlorine
CI
2
0.68
2.6
1.6
Chlorobenzene
C
6
H
5
Cl
7.0
Chloroethane
C
2
H
5
Cl
4.0
Chloroform
CHCl
3
4.7
4.8
4.8
Chloromethane
CH
3
Cl
2.6
3.2
3.1
Cyanogen
(CN)
2
2.8
3.6
2.7
Cyclohexylene
C
6
H
12
7.9
6.4
Deuterium
D
2
0.35
0.38
Dichlorodifloromethane CCI
2
F
2
2.7
4.1
Dichloromethane
CH
2
Cl
2
3.7
Dinitrobenzene
C
6
H
4
(NO
2
)
2
o
·
7.8
m
·
7.8
p
·
7.6
Ethane
C
2
H
6
2.6
2.8
2.5
Ethanol
C
2
H
5
OH
3.6
2.9
Ethyl Acetate
CH
3
COOC
2
H
5
5.0
Gas Correction Factor Table