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Operation

3-8

Pressure

Pressure

Voltage

≥

133 Pa

≥

1E +0 Torr

10

1.3 E1 Pa

1E-1Torr

1

6.6 Pa

5E-2Torr

0.5

1.3 Pa

1E-2Torr

0.1

≤

1.3E-1 Pa

≤

1E-3Torr

0.01

Error E03

Error E03

10.156 (over scale)

Optional Linear recorder output for TC configuration (requires optionally puchased firmware)

Full Scale

Full-Scale

Access

Setting

Setting

Code

1.3E-1 Pa

1E-3 Torr

93 (Default)

1.3E-2 Pa

1E-4 Torr

94

1.3E-3 Pa

1E-5 Torr

95

1.3E-4 Pa

1E-6 Torr

96

Linear recorder output option for BA and CC configurations

Pressure

Pressure

Voltage

≥

1.3E-1 Pa

≥

1E -3 Torr

10

1.3E-2 Pa

1E-4 Torr

1

6.6E-3 Pa

5E-5 Torr

0.5

1.3E-3 Pa

1E-5 Torr

0.1

≤

1.3E-4 Pa

≤

1E-6 Torr

0.01

Exx/Off

Exx/Off

0

Using a full-scale setting of 1E-3 Torr as an example:

Figure 3-4b. Optional Linear Recorder Output Characteristics

Содержание sentorr

Страница 1: ...senTorr Gauge Controller Instruction Manual Varian Vacuum Technologies 121 Hartwell Avenue Lexington Massachusetts 02421 781 861 7200 Manual No 6999 08 165 Revision G February 1999...

Страница 2: ...8188 FAX 905 819 8348 France Telephone 33 16 986 3838 FAX 33 16 928 2308 Germany Darmstadt Telephone 49 61 51 70 32 05 FAX 49 61 51 70 32 79 Italy Telephone 39 11 997 9111 FAX 39 11 997 9350 Japan Tel...

Страница 3: ...herein Seller shall have no liability under any war ranty express or implied either in fact or by operation of law statutory or otherwise Statements made by any person including representatives of Se...

Страница 4: ...Associates All warnings and cautions should be read carefully and strictly observed Consult local state and national agencies regarding specific requirements and reg ulations Address any safety opera...

Страница 5: ...failure to do so could cost you your life WARNING _____________ Check that your Ion Gauge Controller and vacuum system are sepa rately grounded to a common ground Placement of a ground wire between th...

Страница 6: ...ned to provide reasonable protection against harmful interfer ence when the equipment is operated in a commercial environment This equipment generated uses and can radiate radio frequency energy and i...

Страница 7: ...pt Hyst Key All models with set point option 3 1 Emis Key All models 3 1 Baud Rate Key All models 3 2 Degas Key BA2 BA2c BA UHV UHV2c models with degas option 3 2 3 2 Parameter Programming 3 2 3 3 Set...

Страница 8: ...pert models E beam degas on the UHV models The set point option includes four set points one for each gauge tube plus an additional set point that can be assigned to any one of the three gauge tubes T...

Страница 9: ...0 1 mA to 9 9 mA Analog output 1 V decade 0 V for OFF and xxE conditions Optional Linear Recorder Out available Auto on standard available on BA2 BA2c and UHV2c configurations only set to TC1 only Col...

Страница 10: ...sensitive Options Available Bayard Alpert Configurations Up to three optional plug in printed circuit boards can be user installed in the UHV UHV2c BA2 BA2c and BA configurations with the following r...

Страница 11: ...Optic 2 RS 422 3 RS 485 4 Introduction and Description A single pressure display features four digits two for the mantissa and two for the exponent There is a pressure readout for each gauge with the...

Страница 12: ...munication All of the keypad functions except for the baud rate settings and the display output are accessible through the RS232 bi directional computer link The RS485 422 computer interface option is...

Страница 13: ...Introduction and Description 1 6...

Страница 14: ...ack to disengage the front lip Lift off the cover 2 Set the line voltage by moving line voltage selector switch S1 Figure 2 1 to either the 115 VAC for 110 VAC or 115 VAC 50 60 Hz or 230 VAC position...

Страница 15: ...2 2 Preparation for Use Figure 2 2 Rear Panel Connections Figure 2 1 Setting Line Voltage...

Страница 16: ...2 3 Preparation for Use Figure 2 3 Panel Cutout Dimensions Note Bezel Trim Kit R0130301 can be used to hide gaps between senTorr case and panel...

Страница 17: ...2 4 Preparation for Use...

Страница 18: ...ode and saves the setting when pressing Enter after the last digit 3 UP and DOWN Arrows All Models These keys are used to increment and decrement respectively digit values when entering data 4 Stdby K...

Страница 19: ...422 ONLY The default settings are 9600 baud with no parity and an address of 00 10 Degas Key BA UHV Models with degas option Can only activate if the pressure at the Bayard Alpert ion gauge is less t...

Страница 20: ...ellow LED is left flashing in the Program mode unattended for more than 5 seconds the default will automatically return the annuncia tor to the Run mode A changed value will not be saved unless it has...

Страница 21: ...the programmed pressure When the TC1 pressure rises 10 percent above the programmed Auto On pressure the ion gauge will turn off The Auto On feature can be temporarily overridden by pressing the Emis...

Страница 22: ...to indicate that the set point pressure being displayed is the hysteresis level The Stpt Hyst key will not function if the set point has not been programmed 3 4 SET POINT RELAYS CAUTION ________ The...

Страница 23: ...ut characteristics of the recorders Ion Gauge Algorithm Converting recorder output voltage to pressure To calculate the pressure from the voltage output Example recorder output 4 28 volts DC To get th...

Страница 24: ...Operation 3 7 Figure 3 4a Standard Recorder Output Characteristics...

Страница 25: ...Scale Full Scale Access Setting Setting Code 1 3E 1 Pa 1E 3 Torr 93 Default 1 3E 2 Pa 1E 4 Torr 94 1 3E 3 Pa 1E 5 Torr 95 1 3E 4 Pa 1E 6 Torr 96 Linear recorder output option for BA and CC configurati...

Страница 26: ...e Function 33 A Unlock keypad default 27 A Lock keypad except for Enter Units and arrow keys to allow further access code entry 17 A Lock keypad except for Enter Units arrow Emis and Degas keys to pre...

Страница 27: ...er outages or when powered down Upon restoring power the senTorr verifies the RAM content If the RAM is good the parameters will remain as previously saved if the RAM is corrupted all parameters will...

Страница 28: ...ing assistance or for the replacement of a board or unit contact Varian Vacuum Products Service at 1 800 882 7426 4 2 ERROR CODES O2 E Pressure burst caused by a sudden rise in pressure at the ion gau...

Страница 29: ...atical The sensitivity of the tube is affected by dif ferent gases which in turn are responsible for the tube outpute being manipulated by the pressure equa tion There will be some loss in resolution...

Страница 30: ...mA the current will remain constant throughout the entire pressure range Another reason why a user might consider lowering the emission current pertains to the applications that require higher pressu...

Страница 31: ...ductive type of material away from the back of the controller when troubleshooting The Customer is responsible for taking the necessary safety precau tions to avoid electrical shock when performing th...

Страница 32: ...t through the front panel key function GAS CORR By entering the gas constant the gauge will divide the result by the gas correction constant and display the correct adjusted value However a proper und...

Страница 33: ...CO2 1 4 1 4 1 5 1 5 1 4 Relative Ionization Gauge Substance Formula Gas Correction Factor Carbon Disulfide CS2 5 0 4 7 4 8 Carbon Monoxide CO 1 05 1 05 1 1 Carbon Tetrachloride CCI4 6 0 6 3 Cesium Cs...

Страница 34: ...5 1 6 1 4 to 1 8 1 5 1 5 Methanol CH3OH 1 8 1 9 Mehtyl Acetate CH3COOCH3 4 0 Mythyl ether CH3 2O 3 0 3 0 Relative Ionization Gauge Substance Formula Gas Correction Factor Naphthalene C10H8 9 7 Neon N...

Страница 35: ...en cleaned of all hazardous residue and that the residue remaining is of a non hazardous nature __________ Hereby certify that the product s listed below have been contaminated by the fol lowing toxic...

Страница 36: ...____ Machine ___________________________ Original Purchase Order No _________________________ Purchase Order Date _______________________ Company Name ___________________________________________ Conta...

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