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FRG-700 Inverted Magnetron Pirani Gauge

 

 

 

 

3

 

 

Warranty 

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of 
shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to re-
place, or refund of an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by 
this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole opinion of 
Seller, are due or traceable to defects in original materials or workmanship. All obligations of Seller under this warranty shall 
cease in the event of abuse, accident, alteration, misuse, or neglect of the equipment. In-warranty repaired or replaced parts are 
warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts. 
After expiration of the applicable warranty period, Customer shall be charged at the then current prices for parts, labor, and trans-
portation. 

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or damage caused by use of its 
Products other than in accordance with proper operating procedures. 

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of law), statutory or other-
wise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by opera-
tion of law), statutory or otherwise. Statements made by any person, including representatives of Seller, which are inconsistent or 
in conflict with the terms of this warranty shall not be bin-ding upon Seller unless reduced to writing and approved by an officer of 
Seller. 

 
 
 

 

Warranty Replacement and Adjustment 

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received 
within the applicable warranty period by Seller or its authorized representative. Such claims should include the Product serial 
number, the date of shipment, and a full description of the circumstances giving rise to the claim. Before any Products are re-
turned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions 
as to how and where these Products should be returned must be obtained. Any Product returned to Seller for examination shall 
be prepaid via the means of transportation indicated as acceptable by Seller. Seller reserves the right to reject any warranty claim 
not promptly reported and any warranty claim on any item that has been altered or has been returned by non-acceptable means 
of transportation. When any Product is returned for examination and inspection, or for any other reason, Customer shall be res-
ponsible for all damage resulting from improper packing or handling, and for loss in transit, not withstanding any defect or non-
conformity in the Product. In all cases, Seller has the sole responsibility for determining the cause and nature of failure, and 
Seller’s determination with regard thereto shall be final. 

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will be notified and the Pro-
duct returned at Customer’s expense; in addition, a charge for testing and examination may be made on Products so returned. 

3/1/00 

 
 

Содержание FRG-700 series

Страница 1: ...vacuum technologies FRG 700 Inverted Magnetron Pirani Gauge INSTRUCTION MANUAL Manual No tqna48e1 Revision November 2008...

Страница 2: ...2 FRG 700 Inverted Magnetron Pirani Gauge Copyright 2008 Vacuum Technologies...

Страница 3: ...epresentatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be bin ding upon Seller unless reduced to writing and approved by an officer of Seller Warranty...

Страница 4: ...the right to make technical changes without prior notice All dimensions in mm The Inverted Magnetron Pirani Gauge FRG 700 has been designed for vacuum measurement in the pressure range of 5 10 9 1000...

Страница 5: ...ges With CF Flanges 12 3 2 Electrical Connection 13 3 2 1 Use With an VARIAN Controller 13 3 2 2 Use With Another Control Device 13 4 Operation 14 4 1 Measurement Principle Measuring Behavior 14 5 Dei...

Страница 6: ...ocess media Consider possible reactions e g explosion of the process media due to the heat generated by the product Adhere to the applicable regulations and take the necessary precautions for all work...

Страница 7: ...85 k referenced to supply common Status Pin 6 p 10 2 mbar Pirani only mode Low 0 V p 10 2 mbar Cold cathode not ignited Pirani only mode Low 0 V p 10 2 mbar Cold cathode ignited Combined Pirani cold c...

Страница 8: ...curacy 10 V Supply common signal common conducted separately Materials exposed to vacuum Vacuum connection Measuring chamber Feedthrough Internal seals Anode Ignition aid Pirani measuring tube Pirani...

Страница 9: ...FRG 700 Inverted Magnetron Pirani Gauge 9 Dimensions mm 18 DN 25 ISO KF DN 40 CF F 24 92 63 5 28 55 60 75 Weight FRG700KF25 FRG700CF35 700 g 980 g...

Страница 10: ...n the event of a fault The gauge must be electrically connected to the grounded vacuum chamber The connection must conform to the requirements of protective connection according to EN 61010 CF connect...

Страница 11: ...stment should be possible after the gauge has been installed be sure to install it so that the HV and ATM trimmer potentiometers can be accessed with a screw driver 17 When making a CF flange connecti...

Страница 12: ...difficult to separate the magnet unit and the measuring chamber 7 d Make the flange connection between the gauge and the vacuum system e Remount the magnet unit and lock it with the hexagon head scre...

Страница 13: ...m 8 poles FCC 68 1 8 Electrical connection Pin 1 Supply 15 30 VDC Pin 2 Supply common Pin 3 Signal output measuring signal Pin 4 Identification Pin 5 Signal common Pin 6 Status Pin 7 8 n c 10 10 Ident...

Страница 14: ...d only at pressures 1 10 2 mbar The identification output pin 6 indicates the current status of the gauge Pressure Lamp on the gauge Operating mode Pin 6 p 1 10 2 mbar Pirani only mode Low 0 V p 1 10...

Страница 15: ...tion as well as reduced up time and maintenance cycles With constantly low pressures p 1 10 6 mbar the gauge can be operated for more than one year without cleaning cleaning the gauge 19 Contamination...

Страница 16: ...acuum component When handling vacuum components take appropriate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare...

Страница 17: ...s when working in this area The gauge is factory calibrated If used under different climatic conditions through extreme temperatures aging or contamination and after exchanging the sensor the characte...

Страница 18: ...rn the potentiometer counter clockwise by 1 3 of a turn s Vent the gauge with air or nitrogen to atmospheric pressure and wait at least 10 minutes t Turn the nameplate clockwise until the mechanical s...

Страница 19: ...ench AF 1 5 Allen wrench AF 3 Open end wrench 7 0 mm Pliers for circlip Polishing cloth 400 grain or Scotch Brite Tweezers Cleaning alcohol Mounting tool for ignition aid Ignition aid Pirani element 1...

Страница 20: ...g cloth rub the inside walls of the measuring chamber and the polarity insert to a bright finish The sealing surfaces must only be worked concentrically o Rinse the measuring chamber and the polarity...

Страница 21: ...l ignition aid 10a into the measuring chamber p Insert the Pirani element 13 with the FPM seal 13a slid over it into the corresponding bore hole q Carefully place the pressure piece 9 on the measuring...

Страница 22: ...fore performing any tightness tests put the product out of operation and remove the electronics unit w Mount the magnet unit 4 and lock it with the screw 3 Carefully mount the electronics unit 2 Make...

Страница 23: ...ignited Wait until the gas dis charge ignites in case of contamination with insu lation layers the cold cathode may completely fail to ignite Cleaning 19 The FRG has only been activated with p 3 10 9...

Страница 24: ...ng to the spare parts list Pos Description Ordering number 12 13a 11 10a Maintenance kit consisting of 1 support ring 1 O ring FPM 3 69 1 78 1 O ring FPM 10 82 1 78 3 ignition aid FRG700MAINT 13 12 13...

Страница 25: ...s Contaminated parts can be detrimental to health and environment Before beginning to work find out whether any parts are contami nated Adhere to the relevant regulations and take the necessary pre ca...

Страница 26: ...overrange Pa mbar torr Measuring signal U V Pressure p Meas signal U V Pressure p mbar Pressure p Torr Pressure p Pa 0 5 Sensor error 0 5 1 82 Underrange 1 82 2 0 2 6 3 2 3 8 4 4 5 0 5 6 6 2 6 8 7 4...

Страница 27: ...8 2 4 6 8 Water vapor peff mbar Indication range above 10 2 mbar Xe Kr Ar CO2 Freon 12 Pressure indicated gauge calibrated for air 6 4 2 6 4 2 6 4 2 10 4 8 6 4 2 10 6 2 4 6 10 5 10 4 Ar 10 5 8 6 4 2...

Страница 28: ...conversion formula peff K pressure indicated where gas type K air O2 CO N2 1 0 Xe 0 4 Kr 0 5 Ar 0 8 H2 2 4 Ne 4 1 He 5 9 These conversion factors are average values A mixture of gases and vapors is o...

Страница 29: ...FRG 700 Inverted Magnetron Pirani Gauge 29 Notes...

Страница 30: ...Varian Vacuum Technologies 121 Hartwell Avenue Lexington MA 02421 USA Tel 781 861 7200 Fax 781 861 5437 Original English custserv varianinc com t qna48e1 www varianinc com...

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