Varian 969-9860 Скачать руководство пользователя страница 13

TECHNICAL INFORMATION

8

87-900-847-01 (B)

Starting the Pump

If the forepump and vent device are not operated by the
controller, close the vent valve and switch on the
forepump.

NOTE

With the FRONT panel operation selected, the
REMOTE and RS232 operations are inoperative;
conversely, the CYCLE NUMBER and PUMP
CURRENT pushbuttons are always active, even when
the operating mode selected is REMOTE or RS 232.

  Press the START push-button or use the remote or

RS 232 start signal, the display shows:

P U M P

I

S

S T A R T

I

N G

1

2

X X

K R P M

where:

1 2

 = contrast inverted identifies the set point

condition:

 

is displayed when relay R1 is de-energized.

 

is displayed when relay R2 is energized.

XX KRPM

 = indicates the actual theoretical

rotational speed of the pump as a function of the
controller output frequency (range 3 to 99 KRPM).

  After START command, frequency output will be at

the maximum level, then the frequency will
decrease to a value proportional to the pump
rotational speed (1/4 of nominal frequency if the
pump is completely stopped).

The pump will accelerate to its normal rotational
speed and when this speed is reached, the display
will be as follows, even if any previous display
selection was made, and the normal condition has
been reached.

N O R M A L

O P E R A T

I

O N

X X

K R P M

where: 

XX

 = indicates the rotational speed.

During acceleration of the pump or during any
operating condition, it is always possible to select
the other parameters to be displayed (PUMP
CURRENT or CYCLE NUMBER push-buttons).

If this is the case when the pump reaches the
normal speed, the display reverts to the previous
figure.

Operating the Pump

After the starting period, if the system has a vacuum
leak or the pressure in the pump/chamber is high (from
1 mbar to atmosphere), the pump continues to operate
indefinitely. If the gas load at the turbopump inlet flange
continues to stay high, the power drawn by the
turbopump increases up to the maximum value. Than
the Turbo-V pump is slowed down in proportion to the
gas load at least until it reaches 3 KRPM.

Even if any previous display selection was made.
This will occur either in NORMAL operation or with the
LOW SPEED selected. As soon as the gas load
decreases, the pump will automatically accelerate to
reach normal operation. The pump can be stopped at
any rotational speed and can be restarted at any
rotational speed from either the front panel buttons or
the remote connections. The controller automatically
synchronizes the output to the rotational speed of the
pump and then accelerates linearly up to the nominal
speed or within steps if the Soft Start has been
selected.

Low Speed Operation

NOTE

With the FRONT panel operation selected, the remote
and RS 232 operations are inoperative; conversely, the
CYCLE NUMBER and PUMP CURRENT pushbuttons
are always active, even when the operating mode
selected is REMOTE or RS 232.

This feature is provided for operating the pump at
moderate high pressure with high gas throughput. To
operate in this low speed mode, engage the LOW
SPEED push-button, either before starting the pump or
after it is operating.

If LOW SPEED is selected before starting the pump,
the display shows as follows:

P U M P

R E A D Y

:

P U S H

S T A R T

B U T

T O N

L S

where: 

LS

 = means low speed mode is selected.

Содержание 969-9860

Страница 1: ...87 900 847 01 B APRIL 2002 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI INSTRUCTION MANUAL Hand held Terminal Model 969 9860 vacuum technologies ...

Страница 2: ...Hand held Terminal ...

Страница 3: ......

Страница 4: ......

Страница 5: ...SCRIPTION 5 USE 5 General 5 Monitor Mode 5 Program Mode 5 FRONT REMOTE 232 Selection 5 Monitor Relay Programming 6 Reset Command 7 Starting the Pump 8 Operating the Pump 8 Low Speed Operation 8 Speed Adjustment 9 Pump Shutdown 10 Power Failure 10 Remote Control Mode Operation 10 RS 232 Control Mode Operation 10 ERROR MESSAGES 11 ...

Страница 6: ...le Durante l operazione di disimballaggio prestare particolare attenzione a non lasciar cadere l Hand Held Terminal e a non sottoporlo ad urti Non disperdere l imballo nell ambiente Il materiale è completamente riciclabile e risponde alla direttiva CEE 85 399 per la tutela dell ambiente Comandi indicatori e connettori dell Hand Held Terminal Di seguito sono illustrati il pannello dell Hand Held Te...

Страница 7: ...ändigen örtlichen Verkaufsstelle gemeldet werden Beim Auspacken vorsichtig vorgehen damit dem Gerät nicht herunter fällt oder Stößen ausgesetzt wird Das Verpackungsmaterial muß korrekt entsorgt werden Es ist vollständig recyclebar und entspricht der EG Richtlinie 85 399 für Umweltschutz Steuerungen Anzeigen und Anschlüsse des Handterminals Nachstehend werden die Steuertafel des Handterminals Für w...

Страница 8: ... particulièrement à ne pas laisser tomber le contrôleur et à ne lui faire subir aucun choc Ne pas jeter l emballage dans la nature Le matériel est entièrement recyclable et il est conforme aux directives CEE 83 399 en matière de protection de l environnement Commandes indicateurs et connecteurs du hand held terminal On présente ci dessous le tableau de commande du hand held terminal Pour de plus a...

Страница 9: ...ffice When unpacking the Hand held terminal ensure that it is not dropped or subjected to any form of impact Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directive 85 399 Hand held Terminal Controls Indicators and Connectors The following paragraph illustrates the Hand held terminal panel More details are contained in the ap...

Страница 10: ...speed of the pump as a function of the controller output frequency range 17 to 99 KRPM C is the temperature of the outer ring of the upper bearing range 00 to 99 C X during operation a selected set point condition 1 or 2 contrast inverted appears when the programmed threshold speed value is not reached Press the CYCLE NUMBER once and the display shows X X X X C Y C L E X X X X X m P U M P L I F E ...

Страница 11: ...following figure Monitor Relay Programming The display shows S P E E D T H R E S H O L D S E L E C T I O N X X K R P M where XXKRPM is the switch point of relay R1 at the preset turbopump speed adjustable from 00 to 99 KRPM The speed threshold will condition the R1 and R2 operation see the following cycle diagram Select the first number by pressing the CYCLE NUMBER push button then enter the value...

Страница 12: ... I F E X X X X X h R E S E T X X X where PUMP LIFE is the elapsed operating time range 000 to 99999 hours RESET XXX YES or NO If YES is selected the pump life shall be reset to 000 After selecting YES press the PUMP CURRENT push button to enter the command and the display shows as follows I 0 0 0 A P 0 W X K R P M X X C NOTE When PUMP LIFE is reset to 000 the CYCLE number is also reset to 000 ...

Страница 13: ...en the pump reaches the normal speed the display reverts to the previous figure Operating the Pump After the starting period if the system has a vacuum leak or the pressure in the pump chamber is high from 1 mbar to atmosphere the pump continues to operate indefinitely If the gas load at the turbopump inlet flange continues to stay high the power drawn by the turbopump increases up to the maximum ...

Страница 14: ...essing CYCLE NUMBER and PUMP CURRENT pushbuttons together for at least 4 seconds the processor enters in a routine where it is possible to adjust the rotational speed The display shows H I G H S P E E D S E L E C T X X X X X R P M where XXXXX is the pump rotational HIGH SPEED value selected In this routing the CYCLE pushbutton is used to increase the speed value and the LOW SPEED pushbutton is use...

Страница 15: ...tarts the interconnected devices and the turbopump in the proper sequence The display shows P U M P I S S T A R T I N G 1 2 X X K R P M until normal operation achieved Remote Control Mode Operation If remote signals are used to operate the controller it must be programmed for remote operation see paragraph Program Mode and when ready to start the display shows as in the following figure P U M P R ...

Страница 16: ... pump NOTE If the controller transformer temperature exceeds 90 C the pump is shut off and the display will be as shown in the following figure F A U L T C O N T R O L L E R O V E R T E M P E R A T U R E The message will stay on until the temperature decreases below threshold value Press the STOP RESET pushbutton twice to start the pump NOTE If in normal condition the current drawn by the pump is ...

Страница 17: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Страница 18: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Страница 19: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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