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Using the NT VARIO pump as fore-vacuum pump (also known as a
”roughing pump” or ”backing pump”) for a high vacuum pump (e.g. turbo-
molecular with high fore-vacuum tolerance):
+
Use ”Pump down” function with ”
Speed
” set to ”HI” or
+
Use ”Vac control” function with ”
Set vacuum
” set to ”Turbo”.
Fore-vacuum for high vacuum pumps