VACGEN OMNIAX Series Скачать руководство пользователя страница 30 | Manualshive

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APPENDIX D. LIQUID NITROGEN COOLING

WARNING

: VACGEN cannot advise on the safe use and handling of liquid gases which is entirely the

responsibility of the user. The use of liquid nitrogen in confined spaces can be extremely dangerous
as nitrogen gas levels can build up rapidly. Ensure that the area is well ventilated. Always wear
insulated gloves and safety goggles when handling liquid gases and surfaces that may be cold.

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Содержание OMNIAX Series

Страница 1: ...not represent a commitment on the part of VACGEN No part of this document may be copied or distributed transmitted transcribed stored in a retrieval system or translated into any human or computer la...

Страница 2: ...clearance or safety certificate in a form satisfactory to VACGEN has been completed and returned by the customer REPAIR The following additional terms and conditions apply in the event that the custom...

Страница 3: ...onstruction Any equipment returned to VACGEN must have the correct Declaration of Contamination securely fastened to the outside of the packaging Warning Harmful gases may be evolved if this equipment...

Страница 4: ...onal control X Y Micrometer or stepper motor Z Handwheel or stepper motor Pressure range 1 bar to 10 11 mbar Operating temperature 20o C to 55o C Baking temperature 230o C motors instrument cables and...

Страница 5: ...Page 5 of 35 sales vacgen com www vacgen com 44 0 1424 856 333 1 4 BASIC DIMENSIONS Figure 1 Basic dimensions and layout of Omniax...

Страница 6: ...If used with the 50mm ID support tube travel must be limited to 15mm vectorial 5 The XY travel is limited by the vectorial sum of the X and Y movement i e X2 Y2 Some examples are shown in the table be...

Страница 7: ...sponsibility of the user to consider the safety requirements of hazardous materials used with this equipment and the consequence of any leakage however caused Consider possible reactions with material...

Страница 8: ...housing With the shipping pin in position adjust the micrometers to read the central position of the stage The graduated thimble can be rotated to zero the scale Tighten the clamp and remove the ship...

Страница 9: ...protect against vectorial limits unless they are set to the 45o vector i e X Y 5 5mm for 612 5mm stages or X Y 17 6mm for 25 0 stages It is important that both microswitches are correctly adjusted so...

Страница 10: ...tches as position indicators or datum markers Stepper motors may overrun by several steps when a microswitch is activated particularly if traveling at speed Always check the datum position and reset a...

Страница 11: ...t overloading the top flange leaning on the equipment etc Caution Where motors are fitted the motor connector must not be disconnected unless the power to the drive has first been switched off Allow a...

Страница 12: ...ould the temperature sensing element be in contact with or attached to any part of the translator or the vacuum system i e it must always sense the air temperature Centralize the XY stage and on horiz...

Страница 13: ...or stiffness a Compare the action of the X and Y drives by hand operation at the neutral position see above to establish the neutral position Both movements should feel smooth and have the same degree...

Страница 14: ...hat all contact surfaces are covered by a film of grease Should the slide develop a dry squeak lubricate immediately Warning Keep clear of moving parts b Z slide hall bearings drive screw and worm dri...

Страница 15: ...tation and remove the OMNIAX from the vacuum chamber c Bolt the Omniax to a suitable stand that allows it to be worked on securely in the vertical position such as the transit stand supplied with the...

Страница 16: ...First remove the central assembly b Unscrew and remove the eight M6 bolts that secure the base of the Z slide casting to the top plate of the XY stage and lift this assembly away 4 2 4 Z bellows remo...

Страница 17: ...flared tube to the underside of the XY table The XY bellows can now be removed c All bellows are fragile and expensive to replace Please handle with care 4 2 6 Support tube bearing removal a Refer to...

Страница 18: ...The SDU SMC and SMC E series of powerful bipolar motor controllers can be used to operate any VACGEN motor or any other 4 phase hybrid stepper motor Z slide nut replacement MXNUTK Service kit for repl...

Страница 19: ...ill work satisfactorily over its full life A2 OPTION A STANDARD COMPENSATOR USA Description The HSA compensator comprises a floor mounted sprung lever mechanism a tube clamp attached to the translator...

Страница 20: ...Pull one of the end fittings from the push rod tube and cut the tube back by the required amount c Replace the end fitting When ready to install offer the OMNIAX to the chamber and WHILST SUPPORTING...

Страница 21: ...the springs First remove the translator from the system ALWAYS wear tough gloves and remove the spring from the axle rather than the outer end These values relate to OMNIAX translators that include XY...

Страница 22: ...as the track is raised with the ratio of extra width to extra height of 1 2 c Fit the extension pillar to the top of the Z slide This is secured by a single screw through the main pillar d Remove the...

Страница 23: ...at this measurement when the travel is at the other extreme A difference greater than 5mm may indicate that further adjustment is necessary Consult the factory The base of the end compensator and the...

Страница 24: ...H of the push rod tube from the measured value L H L 345 The push rod end fittings should be adjusted to their mid position when making this calculation b Pull one of the end fittings from the tube a...

Страница 25: ...thout connectors to allow connection to alternative drive and controller systems All motor variants are 4 phase 8 lead hybrid stepper motors that can be wired up in most normal configurations as shown...

Страница 26: ...angle being 0 9o 2 Limit the maximum current to the following values determined by the drive used Note that running at maximum current can cause motor to run hot and can give rise to resonance Maximu...

Страница 27: ...all connections secure Failure to do so may result in disconnection during use and this can permanently damage the motor drive For the same reason never disconnect a motor from its drive unless the po...

Страница 28: ...mental motor encoders B6 MOTOR SPARES Order Code Description ZSMPC3LH Cable Motor to SMC SME E or SDU controller DB08073 Cable Encoder to SMC E controller XSOC24 Connector socket Fitted to motor lad o...

Страница 29: ...ENcouples are provided with either heater module These are available as either Type K Chromel Alumel or Type N Nicrosil Nisil Type N is recommended where low magnetic permeability is important Tempera...

Страница 30: ...e and handling of liquid gases which is entirely the responsibility of the user The use of liquid nitrogen in confined spaces can be extremely dangerous as nitrogen gas levels can build up rapidly Ens...

Страница 31: ...ly isolated from the evaporator is supplied for mounting as near as possible to the sample D3 SETTING UP Position the copper condenser coil and polystyrene dewar as near as possible to the nitrogen en...

Страница 32: ...ogen emerge Excessive liquid mixed with the exhaust gas will reduce the cooling efficiency f Once the desired temperature has been reached the gas flow can be reduced further g On the completion of th...

Страница 33: ...Y Slides MT00B MT108B MT208B MT211B Motor Kits MMOTZST MT08X MT08Y Stands MHSA MHSB MHSC are suitable for incorporation or assembly into a vacuum system or other machinery These products may only be p...

Страница 34: ...pment YES NO Toxic YES NO Corrosive YES NO Explosive YES NO Biological Hazard YES NO Radioactive YES NO Other Harmful Substances Equipment and Components that have been contaminated WILL NOT be accept...

Страница 35: ...Page 35 of 35 sales vacgen com www vacgen com 44 0 1424 856 333 REVISION DATE COMMENTS INITIALS A Jan 1994 Original release MJD C Sept 1997 ECN2765 D Aug 2015 VACGEN rebrand AJL...

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