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ULVAC CRYOGENICS INCORPORATED
ALARM MENU
When an error condition is encountered, ALARM button flashes. Touch the ALARM button to
confirm where the error is taking place. Figure 9-3 shows the ALARM MENU screen.
Figure 9-3
ALARM MENU
Table 9-3
ALARM MENU descriptions
Icon
Description
Reference
①
COMP ALARM
Compressor is in alarm state.
COMP ALARM
②
N2 ALARM
Nitrogen supply is in alarm state.
N2 ALARM
③
GN ALARM
Nitrogen gas generator is in alarm state.
GN ALARM
④
MENU
Move to MENU screen.
MENU
⑤
SUPPLY DESTN
ALARM
LN2 transfer destination is in alarm state.
SUPPLY DESTN ALARM
⑥
MAINTENANCE
ALARM
Maintenance interval is reached.
MAINTENANCE ALARM
⑦
ALARM
HISTORY
Displays alarm history.
ALARM HISTORY
⑧
MAIN
Move to MAIN screen.
9.1 MAIN screen
①
②
③
④
⑧
⑦
⑥
⑤
Содержание UMP-40W
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