Ulvac PKS-016, Инструкция по эксплуатации

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2) It is recommendable to install a vacuum valve [A] between the equipntent
and the pump. (See Fig. 2)
[Fig. 2]
Standard vacuum system piping for PKS
When the pump stops, close vacuum valve [A] to keep the equipment under
vacuum, then open leak valve [B] to vent the pump, thus preventing oil
counter-flow within the pump.
3) It is advisable to install a metallic flexible connection between the pump
intake and vacuum piping to eliminate vibration.
Caution: A wire net (i.e., suction filter) is provided within the pump
intake to prevent larger solids from entering the pump. Please do
not remove this wire mesh.
Note: This net should be cleaned periodically according to your specific
maintenance schedule.