Ulvac GCD-051X, Инструкция по эксплуатации

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Table 4 Periodic inspection table
Frequency Item
Details Measures
Amount Refill the oil. Oil
Color (Reddish brown, dark blown,
and cloudy white are not good.)
This pump uses carbon in internal
member of framework.
Oil may become black when it
runs. However, there is not it in the
aberration.
Replace the oil.
Sound Abnormal sound
Vibration Abnormal vibration
Check nuts and bolts for
looseness. If not clear, contact us.
Once/3
days
Current
value Difference from the rated value Check the cause of an overload.
If not clear, contact us.
Surface
temperature Surface temperature
(The temperature higher than the
room temperature by 50
℃
or more
is abnormal.)
Check the cause of an overload.
If not clear, contact us. Once/week
Oil leakage Oil leakage from the shaft seal
section and plugs.
Replace seals, or contact us.
Evacuation
wire mesh Clogged with dust Clean the wire mesh. Once/3,000
operation
hours or
once/6
months
Oil Even if no problem is recognized,
be sure to replace the oil. Replace the oil.
Once/year Spider Damage or fracture Replace the spider.
2) Inspection of the amount of pump oil
Refill the pump oil so that the pump oil level is kept within the range of the lines showing
the upper and lower limits on the oil level gauge during operation.
3) Inspection of oil leakage
When oil leaks from the shaft seal section or drain plug seal section, repair is required. Our
specified O-rings and seals are always available from the service departments shown at the
back of this manual. When necessary, contact them.
4) Inspection of evacuation wire mesh
If the wire mesh is clogged with dust included in the evacuated gas, the pump’s efficiency
may deteriorate.
5) Inspection of abnormal sounds and vibration
Check the nuts and bolts for looseness.