28
10.9.
Leak Test
Spray helium from the leak check position shown in Fig. 10-23 and make sure that the
leak rate is below the allowable level of 1
×
10
-10
Pa
m
3
/s(7.5
×
10
-13
Torr
m
3
/s).
If a helium leak detector is not available at hand, use the build-up method or other to
make sure that there is no leak.
Fig. 10-23 Leak check position
Check leak here
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