Ulvac G-Tran Series Скачать руководство пользователя страница 1

Страница: 1 / 54

No. SK00-8431-EI-023-04

G-TRAN SERIES

SENSOR UNIT

MODEL SC1 COLD-CATHODE ION GAUGE

INSTRUCTION MANUAL

This manual is for the SC1 cold-cathode ion gauges
of the following serial numbers.

Serial No. 02300G and higher

Read this manual before operation and keep it at
hand for immediate reference.

Components Division,

ULVAC , Inc.

http://www.ulvac.co.jp/

Содержание G-Tran Series

Страница 1: ...DE ION GAUGE INSTRUCTION MANUAL This manual is for the SC1 cold cathode ion gauges of the following serial numbers Serial No 02300G and higher Read this manual before operation and keep it at hand for immediate reference Components Division ULVAC Inc http www ulvac co jp ...

Страница 2: ......

Страница 3: ... symbols are used throughout this instruction manual to call the operator s attention to safety The terminology used in safety symbols is classified below Indicate status of urgency of danger when failure to comply with DANGER results in serious personal injury or death The work ignoring this warning will lead to serious damage to human life or factory facility including this equipment at a high p...

Страница 4: ...he equipment connected to this unit and a risk of fire When this unit is insulated from the vacuum chamber ground the case section D sub connector shell section with a class D class 3 ground Don t disassemble Do not disassemble the vacuum gauge Don t modify Do not modify the vacuum gauge If it is modified its functions are not warranted Also fire or electric shock may result Operating environment ...

Страница 5: ...he sensor head is energized with a discharge voltage of 2 6 kV DC If you touch it when this gauge is actuated you will get electric shock Operating environment Do not use the gauge in a place where it may be splashed with water If wetted it may fail or electric leak or fire can result Keep out foreign matter If foreign matter like metal fragments or combustibles are admitted into the vacuum gauge ...

Страница 6: ...esistance of the anode is not higher than 10 000 MΩ Check center axis of anode After reassembly make sure that the anode pin is at the center of the magnetic pole 2 There is a possibility of contact with the magnetic pole or low pressure indication Scar and dust on O ring and O ring groove These can cause leak Make sure that the O rings and the O ring groove are free of scars and dust Dry parts Af...

Страница 7: ...n 13 Added Certificate of Contamination Delete all page headers Feb 8 2013 03 Section 1 1 Change Overview Section 3 1 Added explanation of scale factor 2 Section 3 3 Added ISG1 to the Display Section 7 Added a note on contact leak current Section 9 2 Added a note Section 10 Correction of cautions Section 12 Change warranty Section 13 Revision of pollution certificate Section 15 Added Torr Dec 2 20...

Страница 8: ...9 7 OUTPUT SIGNALS 10 7 1 Control Operation 100 7 1 1 High Voltage ON OFF HV ON OFF 100 7 2 Output Signals 100 7 2 1 Setpoint actuating signal SET 1 ON OFF SET 2 ON OFF 100 7 2 2 Discharge valid signal Discharge OK NG 100 8 SETTING OF SETPOINT 111 9 FUNCTIONS 122 9 1 Setpoint SET 1 ON OFF SET 2 ON OFF 122 9 1 1 Setpoint 122 9 1 2 Setting of setpoint 122 9 1 3 Setpoints of measuring unit and displa...

Страница 9: ...r Head 255 10 7 1 Reassembly 255 10 7 2 Checking the Anode Position 255 10 8 Insulation Check 266 10 8 1 When a insulation resistance tester is available at hand 266 10 8 2 If a insulation resistance tester is not available at Hand 266 10 9 Leak Test 288 10 10 Installing the Sensor Unit and Sensor Head 29 10 11 Maintenance 29 11 TROUBLESHOOTING 300 12 WARRANTY 322 13 Certificate of Contamination 3...

Страница 10: ... 1 spacer and magnetic pole 2 pushed out 200 Fig 10 9 Insulation check of anode 211 Fig 10 10 Anode 211 Fig 10 11 Polishing the anode example 222 Fig 10 12 Magnetic poles 222 Fig 10 13 Magnetic poles 1 and 2 before and after polishing 222 Fig 10 14 Spacer 233 Fig 10 15 Spacer before and after polishing example 233 Fig 10 16 Rounding the spacer 233 Fig 10 17 Inside view 244 Fig 10 18 O ring and O r...

Страница 11: ...orr The sensor head and the main unit are integrated in one unit Simple structure having only a measuring section Best suited to applications that require no indicators only if data and signals can be taken out Dedicated indicators digital are available as option The gauge has independent setpoints two Small in size and does not take up much space for installation Note the following differences de...

Страница 12: ...e 10 to 40 C Control input signal HV ON OFF Data output 0 V to 10 VDC non linear Measurement data Setpoint actuating set value 1 data Setpoint actuating set value 2 data Control output signal Open collector output negative logic 24 VMAX 50 mAMAX saturation voltage is 1V Setpoint actuating signal 1 ON OFF Setpoint actuating signal 2 ON OFF Discharge confirm signal OK NG LED display POWER SET 1 ERRO...

Страница 13: ...VAC power supply type Model ISG1 24VDC power supply type Sensor head See 3 1 Key Specifications Compatible Sensor Head Display cable 2 m 5 m and 10 m between measuring unit and display unit Test results certificate Calibration certificate Calibration certificate JCSS Calibration certificate 3 4 Service Parts Anode SC1 Cathode SC1 Magnetic pole 1 Magnetic pole 2 Spacer ...

Страница 14: ...ription Function I O connector I O connector for power supply data and signal D sub 15 pin See section 4 3 for pin No CCG sensor fixing plate Metal plate that fixes the sensor head to the SC1 C ring Ring that fixes the magnet Do not remove it POWER PROTECT HV SET 1 SET 2 ULVAC G TRAN SC1 3 2 1 ...

Страница 15: ...s supplied to the sensor unit PROTECT lamp PROTECT Not used HV lamp HV Lights when HV ON signal input SET 1 lamp SET 1 Lights when setpoint 1 is actuated SET 2 lamp SET 2 Lights when setpoint 2 is actuated SET 1 setting trimmer SET 1 Sets the value of setpoint 1 by adjusting the trimmer SET 2 setting trimmer SET 2 Sets the value of setpoint 2 by adjusting the trimmer ...

Страница 16: ...mote host display unit 3 Setpoint actuating signal 1 4 Discharge OK NG 5 HV ON OFF 6 NC 7 Setpoint 1 set value 8 Measurement value nonlinear output 9 Power ground Power 10 OUT COM setpoint Remote host display unit 11 Setpoint actuating signal 2 12 NC 13 NC 14 Setpoint 2 set value 15 Analog GND Do not make wiring connection to NC Malfunction or damage can result ...

Страница 17: ...sition so that measurement is least affected by them 2 Installing the sensor head Install the sensor head in such a manner that the plane of the sensor mounting port is parallel to gas flow Ensure that gas does not enter the sensor head in the form of beam See Fig 5 1 O rings to be used in installing the sensor head should be as free from outgas as possible Use of rubber pipes or grease that relea...

Страница 18: ...tection GND Power GND 9pin and GND 10pin 15pin are common inside after being filtered through the filter Use power 24V 1pin and power GND 9pin in power line connection If other GND is used measurement may be affected by noise See Fig 5 2 Fix the cable so that undue force is not exerted to the connections of the cable Securely tighten the connector fixing screws In supplying power to the sensor uni...

Страница 19: ...Gas type dependency The pressure value and accuracy for this unit differ by the type of gas measured The accuracy for this unit is based on measuring nitrogen gas Be careful when using gases other than nitrogen Start measurement more than one minute after turning on power and the output is stabilized Do not turn off the power to the sensor head during a sequence of measurements The characteristics...

Страница 20: ...rnal transistor will be actuated if the measured value is lower than the set pressure Lo output when setpoint is ON See section 4 3 for the pin numbers See section 8 7 2 2 Discharge valid signal Discharge OK NG If the discharge current is flowing normally when the high voltage is turned ON Discharge Valid will be OK and the internal transistor will operate Lo output when Emission Valid is OK The D...

Страница 21: ... pin or 15 pin GND In the case of setpoint 1 ST The set voltage is output between the setpoint set value and ground by turning the setpoint setting trimmer The output voltage is the same as on the measured pressure curve Read the voltage value of a pressure point to be set from the conversion table graph on Fig 9 1 Fig 9 2 or list on page 35 and turn the trimmer for adjustment so that the voltage ...

Страница 22: ...l See section 8 Values that can be set are 1 0 10 5 to 1 Pa 7 5 10 8 Torr to 7 5 10 3 Torr as with the measurement range 9 1 3 Setpoints of measuring unit and display unit The setpoint of the display unit and that of the measuring unit sensor unit box unit are independent of each other Therefore both will be effective if setpoints are taken out separately from the display unit and measuring unit H...

Страница 23: ...condition as it does not discharge 9 2 1 Measurement value voltage output form All measurable pressure ranges are output by an analog voltage of 0 to 10 volts non linear See section 15 1 and section 38 for the relationship between the pressure Fig 9 1 Fig 9 2 and the measurement value output voltage The measurement value voltage is output between the measured value of I O connector 8 pin and GND 1...

Страница 24: ...ut voltage In normal measurement Voltage corresponding to measured pressure When discharge is not set up 10 V or more Below measurable lower limit Voltage corresponded to pressure reference only Below measurable greatly lower limit 1 10 V or more 1 There is possibility that output voltage is less than 0V due to change of environmental temperature when output voltage is around 0V If output voltage ...

Страница 25: ...commended Thin plastic rod Sandpaper 180 400 Polishing the electrode Use of metal file is strictly forbidden 180 240 or 400 is recommended Wiper Cleaning the electrode Wiper for use in a low level dust producing clean room is recommended Alcohol Cleaning the electrode 10 3 Necessary Equipment Satisfactory performance of SC1 may not be attained if the following equipment is not available Descriptio...

Страница 26: ...t 0 1 T at the center of the inner diameter If brought close to a metal object it will be attracted with strong force and may catch your finger or other 10 4 1 Removing Screws Remove the 3 M3 screws marked with arrows in Fig 10 1 using a Philips screwdriver for M3 screws Fig 10 1 Bottom view of sensor unit 10 4 2 Removing the Sensor Head Remove the sensor head from the sensor unit slowly Here be c...

Страница 27: ... 5 1 Exploded View of Sensor Head Anode Cathode magnetic pole 1 Cathoede spacer Cathode magnetic pole 2 Cap screw O ring Disassembling the Sensor Head Reassembling the Sensor Head Fig 10 3 Exploded view of sensor head 1 2 4 3 6 5 5 3 6 4 2 1 ...

Страница 28: ...p screw Before the cap screw is removed After the cap screw is removed Turn to remove Fig 10 4 Removing the cap screw 10 5 2 2 Removing the anode Impact to anode pin and glass part This can be a cause of leak Do not bend the anode pin or give an impact to the black glass portion Push the metal portion on the outer periphery of the anode gradually to make the anode aslant Take this step from each o...

Страница 29: ...scar the O ring and O ring groove when removing the O ring The scar can cause leak Note that the use of a metal screwdriver can scar the O ring or O ring groove Use a thin plastic slotted screwdriver to remove the O ring Fig 10 7 Removing the O ring After removing the O ring Pull to remove After removing the anode ...

Страница 30: ...tic pole 2 Insert a rod cleaned with degreased cotton from the port side of the sensor head to push out magnetic pole 1 spacer and magnetic pole 2 Fig 10 8 Magnetic pole 1 spacer and magnetic pole 2 pushed out Push out Magnetic pole and spacer pushed out ...

Страница 31: ... problem but if it is less than 10 000 MΩ replace the anode with a new one If a insulation resistance tester is not available at hand check insulation after reassembly Refer to 6 Fig 10 9 Insulation check of anode 10 6 2 Cleaning the Anode Do not polish the glass portion of the anode It can be a cause of leak Also use care not to give a load to the bottom of the glass portion when polishing the pi...

Страница 32: ... Fig 10 12 The surfaces should be of metallic color If they are discolored or stained polish them with sandpaper First polish them with rough sandpaper 180 or 240 until the color becomes metallic and then finish with finer sandpaper of 400 Fig 10 12 Magnetic poles Before polishing After polishing Fig 10 13 Magnetic poles 1 and 2 before and after polishing Magnetic pole 1 Magnetic pole 2 ...

Страница 33: ...sh the spacer after stretching it First polish it with rough sandpaper 180 or 240 until the color becomes metallic and then finish with finer sandpaper of 400 Wind the spacer around the side of magnetic pole 1 and shape it into a round shape Here be careful not to bend the spacer Fig 10 14 Spacer Before polishing After polishing Fig 10 15 Spacer before and after polishing example Fig 10 16 Roundin...

Страница 34: ...that the O ring is free of scar and dust Observe the surface condition of the O ring and O ring groove shown in Fig 10 18 If the O ring is scarred or deformed replace it with a new one If the O ring groove is scarred replace the sensor head If the O ring or O ring groove is contaminated with dust or dirt wipe it with a cloth wetted with alcohol and then allow it to dry up O ring G30 FPM Fig 10 18 ...

Страница 35: ...e indication may be low 10 7 1 Reassembly Reassemble the sensor head referring to the exploded view in Fig 10 3 The reassembling procedure is reverse to the disassembling procedure 10 7 2 Checking the Anode Position Observe the anode from the port side of the sensor head and make sure that the anode pin is at the center of the magnetic pole 2 as shown in Fig 10 19 If it is not at the center reasse...

Страница 36: ... check insulation in a combustible gas atmosphere When turning on the high voltage to this instrument under atmospheric pressure do not make check in combustible gas atmosphere If a high voltage of about 2 6 kV DC is applied spark will be emitted and may cause fire If a insulation resistance tester is not available at hand check the anode and magnetic pole for contact and connect the sensor unit f...

Страница 37: ...ter Fig 10 22 Check with the sensor unit connected wiring example Table 10 1 SC1 Pin Assignment Pin No Name Pin No Name 1 24 V DC power supply 9 Power GND 2 Setpoint actuating signal 1 10 GND 3 Discharge check signal OK NG 11 Setpoint actuating signal 2 4 HV ON OFF 14 Setpoint 2 set value 7 Setpoint 1 set value 15 GND 8 Output voltage ...

Страница 38: ...g 10 23 and make sure that the leak rate is below the allowable level of 1 10 10 Pa m3 s 7 5 10 13 Torr m3 s If a helium leak detector is not available at hand use the build up method or other to make sure that there is no leak Fig 10 23 Leak check position Check leak here ...

Страница 39: ... head should turn without resistance if it is inserted correctly If it is inserted correctly the sensor head should fit into the depth of the SC1 circuit Fix it with screws Fig 10 24 Installing the sensor unit and sensor head 10 11 Maintenance Depending on the usage the electrode section may be worn out until cleaning up cannot cope with the problem In that event replace parts with new ones Fig 10...

Страница 40: ...le range Normal Erroneous wiring or disconnection between sensor unit and remote host Correct the wiring and check continuity by a circuit tester P 7 Line voltage is low Check line voltage by a circuit tester Line voltage 24V 2V Voltage near 10 volts is outputted and does not change Possible cause Corrective action Insulation failure between anode and cathode because of conductive material deposit...

Страница 41: ... external noise Change the cable installation location Or use the unit by turning off equipment that can be a source of noise Examine the method of laying cable Take actions against noise separately The output value largely differs from the expected value Possible cause Corrective action Sensitivity is very poor due to contamination of the sensor head Change the sensor head with another one and ch...

Страница 42: ...or to the local ULVAC representatives for repair Return charge shall be paid by Buyer Disclaimer 1 Failure occurred after expiration of warranty period 2 Failure caused by force majeure such as fire storm and flood damage earthquake lightning strike war etc 3 Failure occurred due to carelessness handling or faulty usage 4 Products remodeled disassembled or repaired without ULVAC s acceptance 5 Fai...

Страница 43: ...arks Contaminant Check an applicable box I guarantee that above returned item s is not contaminated with harmful substances Above returned item s is contaminated with the following harmful substances Name of contaminant molecular formula Characteristics 1 2 3 4 5 To ULVAC Inc Attn Date YYYY MM DD Your company Division Contact Phone Fax E mail Please pack returned item s carefully before shipment A...

Страница 44: ... hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Printed Circuit Board X O O O O O Chassis O O O O O O Connector O O O O O O DC DC Converter O O O O O O Label O O O O O O Gauge Head O O O O O O O indicating that content of the hazardous substance or element in all homogeneous materials of the part does not exceed the requirements for concentrat...

Страница 45: ...0E 04 4 799 3 10E 05 2 022 8 10E 05 3 119 4 10E 04 4 826 3 20E 05 2 062 8 20E 05 3 132 4 20E 04 4 853 3 30E 05 2 100 8 30E 05 3 145 4 30E 04 4 879 3 40E 05 2 137 8 40E 05 3 157 4 40E 04 4 905 3 50E 05 2 172 8 50E 05 3 170 4 50E 04 4 930 3 60E 05 2 206 8 60E 05 3 182 4 60E 04 4 955 3 70E 05 2 239 8 70E 05 3 194 4 70E 04 4 979 3 80E 05 2 272 8 80E 05 3 206 4 80E 04 5 003 3 90E 05 2 303 8 90E 05 3 21...

Страница 46: ...E 03 7 724 1 10E 02 8 423 9 20E 04 5 757 5 20E 03 7 744 1 20E 02 8 491 9 30E 04 5 770 5 30E 03 7 763 1 30E 02 8 550 9 40E 04 5 783 5 40E 03 7 782 1 40E 02 8 603 9 50E 04 5 795 5 50E 03 7 800 1 50E 02 8 651 9 60E 04 5 808 5 60E 03 7 818 1 60E 02 8 694 9 70E 04 5 820 5 70E 03 7 836 1 70E 02 8 733 9 80E 04 5 832 5 80E 03 7 853 1 80E 02 8 768 9 90E 04 5 844 5 90E 03 7 870 1 90E 02 8 801 1 00E 03 5 856...

Страница 47: ...16 5 20E 02 9 227 5 40E 02 9 237 5 60E 02 9 246 5 80E 02 9 255 6 00E 02 9 263 6 20E 02 9 271 6 40E 02 9 278 6 60E 02 9 284 6 80E 02 9 290 7 00E 02 9 296 7 20E 02 9 302 7 40E 02 9 307 7 60E 02 9 312 7 80E 02 9 317 8 00E 02 9 321 8 50E 02 9 332 9 00E 02 9 341 9 50E 02 9 349 1 00E 01 9 356 1 10E 01 9 369 1 20E 01 9 379 1 30E 01 9 388 1 40E 01 9 396 1 50E 01 9 403 1 60E 01 9 410 1 70E 01 9 415 1 80E 0...

Страница 48: ... 06 4 799 2 33E 07 2 022 6 08E 07 3 119 3 08E 06 4 826 2 40E 07 2 062 6 15E 07 3 132 3 15E 06 4 853 2 48E 07 2 100 6 23E 07 3 145 3 23E 06 4 879 2 55E 07 2 137 6 30E 07 3 157 3 30E 06 4 905 2 63E 07 2 172 6 38E 07 3 170 3 38E 06 4 930 2 70E 07 2 206 6 45E 07 3 182 3 45E 06 4 955 2 78E 07 2 239 6 53E 07 3 194 3 53E 06 4 979 2 85E 07 2 272 6 60E 07 3 206 3 60E 06 5 003 2 93E 07 2 303 6 68E 07 3 218 ...

Страница 49: ... 83E 05 7 724 8 25E 05 8 423 6 90E 06 5 757 3 90E 05 7 744 9 00E 05 8 491 6 98E 06 5 770 3 98E 05 7 763 9 75E 05 8 550 7 05E 06 5 783 4 05E 05 7 782 1 05E 04 8 603 7 13E 06 5 795 4 13E 05 7 800 1 13E 04 8 651 7 20E 06 5 808 4 20E 05 7 818 1 20E 04 8 694 7 28E 06 5 820 4 28E 05 7 836 1 28E 04 8 733 7 35E 06 5 832 4 35E 05 7 853 1 35E 04 8 768 7 43E 06 5 844 4 43E 05 7 870 1 43E 04 8 801 7 50E 06 5 ...

Страница 50: ...9 216 3 90E 04 9 227 4 05E 04 9 237 4 20E 04 9 246 4 35E 04 9 255 4 50E 04 9 263 4 65E 04 9 271 4 80E 04 9 278 4 95E 04 9 284 5 10E 04 9 290 5 25E 04 9 296 5 40E 04 9 302 5 55E 04 9 307 5 70E 04 9 312 5 85E 04 9 317 6 00E 04 9 321 6 38E 04 9 332 6 75E 04 9 341 7 13E 04 9 349 7 50E 04 9 356 8 25E 04 9 369 9 00E 04 9 379 9 75E 04 9 388 1 05E 03 9 396 1 13E 03 9 403 1 20E 03 9 410 1 28E 03 9 415 1 35...

Страница 51: ...41 15 3 Related Drawings 15 3 1 Compatible Sensor Heads GAUGE PORT Fig 15 1 Compatible sensor heads Sensor head model name Mounting port diameter C 21 15 18 mm dia C 23 UFC034 C 24 NW16 C 25 NW25 ...

Страница 52: ...42 Fig 15 2 Dimensional drawing ...

Страница 53: ...43 other Terminal block 24VDC power supply Commercially available power supply AC power supply Fig 15 3 Connection reference drawing 1 ...

Страница 54: ...44 Fig 15 4 Connection reference diagram 2 Main power DC 24V Remote I O Recorder Output RS485 SC1 １CH Display ISG1 ...

Результаты поиска

Содержание G-Tran Series

Отзывы:

Ulvac G-Tran Series, Инструкция по эксплуатации, Страница: 1 / 54

Результаты поиска

Содержание G-Tran Series

Отзывы: