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０．Preface

0.1 Before using this pump

We, ULVAC KIKO,Inc. thank you for purchasing our vacuum pump. When receiving

our vacuum pump, please confirm the product is the same Model No. as you ordered.

Also, check to make sure there are no damages.

To ensure a long life for this pump, read this manual carefully prior to

installation, operation, and maintenance. Also, pay attention to

ascertain the details of safety, specification, and operational

precautions of this pump.

manual shall not be copied without permission by ULVAC KIKO ,Inc. Printed

in JAPAN.

Содержание G-10DA

Страница 1: ...e using the product be sure to read this manual Keep this manual in a place where it can be referred to at any time and look after it carefully The contents of this instruction manual are subject to change without prior notice due to improvements in performance and the functions of the product ULVAC KIKO Inc ...

Страница 2: ... to make sure there are no damages To ensure a long life for this pump read this manual carefully prior to installation operation and maintenance Also pay attention to ascertain the details of safety specification and operational precautions of this pump Copyright by ULVAC KIKO Inc All right reserved All material in this manual shall not be copied without permission by ULVAC KIKO Inc Printed in JA...

Страница 3: ...esent an immediate threat of death or serious injury Warning Indicates hazardous situations which may present a potential to death or serious injury Caution Indicates hazardous situations where a potential hazard or unsafe practice could cause personal injury or equipment damage Note Indicates undesirable situations where a potential hazard could cause equipment damage or abnormal operation ...

Страница 4: ...normal action and electric shock Switch off power before checking or repairing the pump to avoid any problems electric shock or personal injury caused by suddenly starting up Connect an electrical wire cord to ground potential terminal tightly to avoid electric shock caused by mechanical trouble or electrical leakage Do not plug exhaust port or place any materials inside of exhaust port because it...

Страница 5: ...nd the pump so as to obstruct cooling air Abnormal temperature rising may cause burns or fires Do not touch the motor while the pump is in operation or when the pump is still hot immediately after it stops Touching it will result in burns Electric wiring should be carried out in accordance with Electric Regulation and Instructions Miswriting may cause fires Switch off electric power right away in ...

Страница 6: ...uct Installation Operating condition This pump is a type of precision equipment therefore it is necessary to satisfy the following items for store product 1 Operational temperature and humidity 7 40 C 85 RH 2 Installation place should be at an altitude no higher than 1000m above sea levels for storing or operation 3 Required conditions while storing or operating a Do not use corrosive or explosive...

Страница 7: ...uilt in type thermal protector is equipped for the motor Additional leakage etc protectors are recommended Do not apply any voltages other than specifically rated for the motor of this pump The over load protector does not operate normally consequently it may cause burning the motor or firing ...

Страница 8: ...ration 10 1 1 Hazardous of product and safety precautions 10 1 1 1 DANGER Leakage of hazardous gases and materials 10 1 1 2 WARNING Electric shock 10 1 1 3 WARNING Warning explosion 11 1 1 4 CAUTION High temperature 11 1 2 Safety data sheet SDS 12 2 General description of the pump 13 2 1 Principal features 13 2 2 Dimensional drawings 14 3 Setting up 15 3 1 Installation 15 3 2 Oil charging 15 3 3 V...

Страница 9: ...l mist trap option 24 5 Specification 25 5 1 Ultimate pressure 25 5 2 Pumping speed 25 5 3 Required electricity 25 6 Maintenance inspection repair 27 6 1 Maintenance 27 6 2 Scheduled inspection 27 6 3 Oil change 29 6 4 Replacement of the coupling 31 6 5 Trouble shooting list 32 7 Product disposal 34 8 Maintenance parts 35 8 1 Maintenance parts list 35 8 2 Disassembly drawing 36 Warranty Safety Dat...

Страница 10: ...quency 18 Fig 6 Characteristics of vacuum pumping speed 26 Fig 7 Characteristics of motor power 26 Fig 8 Replacement of the coupling 31 Fig 9 Disassembly drawing of G 5DA 36 Fig 10 Disassembly drawing of G 10DA 37 Table 1 Specification 13 Table 2 Characteristics of the thermal protector 23 Table 3 Scheduled inspection 28 Table 4 Trouble shooting list 32 Table 5 G 5DA Maintenance parts list 35 Tabl...

Страница 11: ... pump body when checking or disposing dispose the pump After wearing suitable protector for evacuating hazardous materials check or abolish the pump Before checking or disposing the pump non hazardous treatment must be requested for the authorized professional specialist then check or the pump Disposal must be requested for the professional specialist authorized by the administration 1 1 2 Electri...

Страница 12: ...obstruct gas flowing to the inlet port When using oil mist trap exchange or clean them to avoid gas flowing 1 1 4 High temperature Cause Preventive Procedure Burn at high temperature Temperature of the pump is high as shown below pump body 70 80 motor 70 80 High temperature surface of the pump may cause to burn as a result of direct skin contact by accident Do not touch the pump body during operat...

Страница 13: ...et When applying other vacuum pump oils besides the description in this manual contact your local ULVAC KIKO Inc Sales and Service Center SDS presents the reference information of hazardous chemical material to keep safety precautions When handling the pump oil it is necessary to take proper and practical treatments which are adapted handling the oil After understanding the above mention these tre...

Страница 14: ...t G 5DA G 10DA Type Sliding vane 2 stages Pumping speed L min 50Hz 5 10 60Hz 6 12 Ultimate pressure Pa 6 7 1 3 Motor W Poles 40 4 60 4 Volts V 100 100 Full load current A 50Hz 0 92 1 38 60Hz 0 73 1 22 Motor revolution r min 50Hz 1 250 1 250 60Hz 1 550 1 565 Pump oil Recommended SMR 100 Capacity mL 180 250 Note 1 Ultimate pressure indication by Pirani gauge 2 Vapor pressure viscosity or characteris...

Страница 15: ...s Fig 1 General assembly drawing of G 5DA Motor Single phase 100V 40W 4Poles capacitor run Weight 5 0kg with motor Fig 2 General assembly drawing of G 10DA Motor Single phase 100V 60W 4Poles capacitor run Weight 5 5kg with motor ...

Страница 16: ...t be placed on a level place in an upright position as shown in Fig 1 Fig 2 3 2 Oil charging Remove the Exhaust port and then fill the oil one time charge to the pump or recommended oil SMR 100 up to specified quantity through the Exhaust port In first oil charging pour the oil up to maximum scale of oil gauge Then attach the exhaust port Refer to Fig 3 Oil quantity must be checked or adjusted to ...

Страница 17: ...ata Sheet When the contaminated oil touching the skin or coming into the eye accidentally follow the item first aid treatment of 1 2 Safety Data Sheet Do not apply other vacuum pump oils besides our recommended If applying other vacuum pump oils it may cause the performance deterioration or shortening the lifetime of the pump ...

Страница 18: ...he vessel as shown in Fig 4 Fig 4 Vacuum pumping system diagram 3 Vacuum tubing between inlet port and another port is provided with vacuum rubber hose Do not eliminate mesh filter for preventing different objects come into the inlet port of the pump 3 4 Electric wiring 1 This pump has performed beforehand electric wiring by the side of a pump 2 Plug the power wire cord in the power outlet of 100V...

Страница 19: ... and to the voltage change and frequency change in Domain B it shall operate with main rated values and shall be used practically convenient However operation with it is convenient and safe is maintained on practical use it means not resulting in the grade which shortens a life remarkably and the characteristic a temperature rise etc do not apply correspondingly in the state of rating Moreover mai...

Страница 20: ... may cause electric shock Perform electric wiring correctly in accordance with the Electric Equipment Technical Standard and Internal Wiring Regulation Incorrect wiring will result in fire Electric wiring should be carried out in accordance with Electric Regulation and Standard Miss wiring may cause fire ...

Страница 21: ...he interval for changing oil When evacuating much quantity of water moisture change oil frequently If operating pump a long term as taking water moisture into the pump this may cause deterioration of oil lubricity corrosive acceleration of parts inside the pump also trouble of the pump When evacuating chemicals acid or like change the pump oil after stopping the pump immediately to prevent operati...

Страница 22: ...ation is not so smooth take action needed as described below Check oil quantity and charge proper quantitative oil When stopping the pump for long term 3days or more at low temperature pump oil will come into the pump cylinder At end of former operation vented air into the pump may also cause same situation If restarting the pump at this condition over load protector may be operated Then carry out...

Страница 23: ...ys close vacuum valve A and then open leak valve B If this procedure is neglected the pump oil fills the cylinder making restart difficult or causing damage to the pump The pump oil also may flow back to the vacuum chamber side If vacuum valve A is not closed air may leak into the device side through the pump increasing the pressure 4 4 Start up procedures in cold climate In winter season when ope...

Страница 24: ...he motor is very hot when the thermal protector has actuated Never touch it with your hand When the cause of the malfunction has been eliminated check that the motor has cooled down turn on the switch to restart operation see 6 5 Trouble shooting list Firing hazard As the surface of the pump body is higher temperature 70 80 during operation do not touch it until cooled down after stopping the pump...

Страница 25: ...icted in an operation When the filter clogged with oil change the filter The maximum pressure inside this pump is 0 03MPa GAUGE For pressure reading excess 0 03MPa Gauge in exhaust port change the filter Explosion hazard Keep the operational restriction in setting the oil mist trap When the filter clogged with oil change the filter ...

Страница 26: ...e high ultimate pressure Any volatile contents dissolved into the pump oil will vaporize and it may cause higher ultimate pressure If there is any leakage or gas source in the vacuum tubing the ultimate pressure will be high 5 2 Pumping speed Pumping speed of the oil rotary pump must be changed with sort of gases Generally pumping speed will be max in high pressure range and will be proportional t...

Страница 27: ...26 Fig 6 Characteristics of vacuum pumping speed Fig 7 Characteristics of motor power ...

Страница 28: ...p life Turn off power switch certainly before inspection Never turn on power switch for inspection It may cause personal injuries Directly after stopping the pump the pump body is high temperature Wait until it will be cooled down and inspect it Burning hazard 1 Periodical changing the pump oil Pump oil should be deteriorated with operating time After checking the oil contamination and viscosity c...

Страница 29: ...cal Representative Every 3000 Hr or Every half year Mesh filter inlet port Dust clogging Clean the mesh filter Pump oil Inspect oil certainly Change oil Every year Coupling Broken coupling Change coupling 2 Inspecting the pump oil quantity Recharge the specified pump oil as oil level is always in the range red circle marking of oil gauge during operating 3 Inspecting the pump oil leakage When happ...

Страница 30: ...tact your local ULVAC KIKO Inc Sales and Service Center When requesting overhaul or repair the pump inform the sort of evacuated gases on the Check sheet for repair attached at end of this manual and submit the sheet by all means When evacuating toxic gases the pump body and the oil may cause toxic We cannot overhaul or repair the pump evacuated some sort of toxic gases 6 3 Oil change Oil deterior...

Страница 31: ...rt and operate the pump for 5 sec We can discharge the remained oil inside the pump effectively 2 Disconnect the standard exhaust pipe unplug the drain port and then drain off the oil 3 Plug the drain port charge the recommended new oil as fixed quantity from the exhaust port Refer to Fig 3 4 If the oil contamination is heavy operating the pump for several minutes with the new pump oil will be nec...

Страница 32: ... the casing and separate the motor form the pump Check the coupling carefully from any troubles After coupling inspection re attachment should attach coupling so that the coupling be fitted for the rotor shaft pump side To assemble the motor into the pump it is required that the direction of the motor shaft should be suited to the coupling as shown by fig 8 Fig 8 Replacement of the coupling Connec...

Страница 33: ...3 5 4 5 4 4 6 2 6 2 Irregular rotation of the pump Abnormal input voltage Inferior wire connect ion to the pump High oil viscosity at low temperature Coming different objects into the pump Adjust input voltage within 10 Connect wire again to the pump Warm atmosphere above 7 Eliminate different objects then overhaul and repair the pump 3 5 3 4 4 4 No pressure reduction Low pumping capacity for vacu...

Страница 34: ...upling Overhauling and repairing clean the oil aperture Overhauling and repairing Replace parts 3 5 3 2 6 4 Abnormal high temperature on the pump surface R T 50 Continuous operating at high suction pressure Insufficient quantity of the oil Oil shortage low cooling effect High temperature evacuating gases No circulating oil Clogging the oil aperture of the pump cover Temperature of the pump surface...

Страница 35: ...eck and dispose the pump in accordance with laws and regulations by the local administration When evacuating toxic gases which present hazardous situations to the human body entrust the pump should be disposed with authorized professional specialist ...

Страница 36: ...20 4 1 29 O ring _S 9 1 30 O ring _P 6 1 31 O ring _P 18 1 32 O ring _S 101 1 1 Table 6 G 10DA Maintenance parts list Product name No Parts name Q ty G 10DA Maintenance kit 8 1st Vane 2 9 2nd Vane 2 10 Vane spring 3 11 Outlet valve 2 20 Coupling 1 22 Oil level gauge 1 32 Oil seal_HTC 9 22 7 1 33 Oil seal_VC 10 20 4 1 34 O ring _S 9 1 35 O ring _P 6 1 36 O ring _P 18 1 37 O ring _S 101 1 1 Note For...

Страница 37: ...36 8 2 Disassembly drawing Fig 9 Disassembly drawing of G 5DA ...

Страница 38: ...37 Fig 10 Disassembly drawing of G 10DA ...

Страница 39: ...modifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Malfunctions that occur when not using a rated power supply g Malfunctions that occur when there is an abnormal rise in internal pressure due to the pump exhaust outlet being blocked during operation etc h Malfunc...

Страница 40: ...afety and Health Law designates particular substances as the materials to be notified 2 Usage Status Operation Method Approx hours per day years and months Continuous Operation Intermittent Operation Usage __________________________________ 3 Failure Status Unusual Noise Abnormal Pressure Abnormal Actuation Oil Leakage Other Symptoms _______________________________ 4 Detail of Request Repair Overh...

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