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ULVAC CRYOGENICS INCORPORATED
(For IM-120)
(1)
Turn OFF the RUN/STOP switch of EMP-20W.
(2)
Check that the supply pressure of dry air is 0.5 MPa or above.
(3)
When the nitrogen gas pressure is 0.2MPa and flow rate is 15NL/min, turn ON the
RUN/STOP switch of EMP-20W to restart.
8.5.4 Emergency
off
In case of an emergency, press the emergency off button on the front to disconnect the
control power supply and stop all the operation of EMP-20W.
CAUTION
An emergency shutdown might damage the equipment. Do not use this button except in
emergency.
To restart, turn the emergency off button to the right.
Содержание EMP-20W
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