Ulvac EMP-20W, Инструкция по эксплуатации

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22 ULVAC CRYOGENICS INCORPORATED
CO
M
00
0
00
1
00
2
00
3
00
4
00
5
00
6
00
7
00
8
00
9
01
0
01
1
01
2
01
3
01
4
01
5
COM 500 501 502 503 504 505 506 507
C1
600 601 602 603
50
0～
507
CO
M
C1
10
0
10
1
10
2
１
０
０～
１０
３
COM
600
～
603
CO
M
505 600 500 501 502 503 504 506 601 602 603
SV 1
000 001 007 012 003 004 006 009 010 013 014 015 002 005 008 011 100 101 102
SV 2 SV 3 PB
L 1
PB
L 2
PB
L 4
PL 2
INPU
T
OUT
PU
T
PL 1
PBL1
PB
1
PBL2 PBL3 PBL4
PB
2
3
PB
L
R1
LD
C
C2
604 605 606 607
６０
４～
６０
７C
OM
604 605 606
PBL5
PB
L 5
PL 3 R2 R3
10
9 8 6 5 4
10
9 5 4
10
3
PB
3
103
C2
10
4
10
5
１
０
４～
１０
７
COM
104
10
6
10
7
KE
YENC
E：
KV-
24
DT
+
KV
-E
８
X
＋
KV
-E８
R
P24
V
0V
P24V
0V
Di
sp
lay
RU
N/
STOP
Di
spl
ay
AUT
O
RE
ADY
Di
sp
la
y
AU
TO
SUP
PL
Y
Displ
ay
MA
NUAL
STA
RT
Dis
play
CO
MP
.ALA
RM
Disp
lay
N2
GAS
ALARM
COM
P.
Star
tup
signa
l
Reser
ve
Cryo
ge
ni
c
Ma
nual
El
ectro
magn
eti
c
Val
ve
Cr
yog
en
ic
Au
to
Ele
ctr
oma
gne
tic
Val
ve
Room
Tem
pera
ture
El
ectro
magn
eti
c
Val
ve
Coo
ling
Wate
r
El
ect
rom
ag
neti
c
Va
lv
e
Di
spla
y
ec
o
Di
spla
y
Ma
inte
nanc
e
GN
St
art
Sig
nal
Res
erv
e
Inpu
t
COM
Gene
rat
or
Lev
el
Sen
sor
Upp
er
Lim
it
Gene
rat
or
Lev
el
Sen
sor
100
%
Gene
rat
or
Lev
el
Sen
sor
75%
Gene
rat
or
Lev
el
Sen
sor
50%
Gene
rat
or
Lev
el
Sen
sor
25%
Gene
rat
or
Lev
el
Sen
sor
0%
Au
to
Tr
ans
fe
r
Leve
l
Se
ns
or
Co
nnec
ti
on
Sig
nal
Auto
Tran
sfer
Le
vel
Se
nso
r
Up
per
Li
mi
t
Au
to
Tr
ans
fe
r
Leve
l
Se
ns
or
Low
er
Lim
it
Auto
Tr
ans
fer
Le
vel
Se
nso
r
Lowe
st
Lim
it
N2
Ga
s
Su
pply
Sig
na
l
COMP
.
Ope
rati
on
Sig
nal
RUN／
ST
OP
Swi
tch
RESE
T
Swi
tch
AUTO
RE
AD
Y
Sw
itch
AUTO
SU
PP
LY
Switc
h
MANU
AL
ST
ART
Swit
ch
MANU
AL
ST
OP
Switc
h
eco
Swi
tc
h
Main
ten
an
ce
Reset
Swit
ch
GN
St
ar
ti
ng
Signa
l
rese
rve
Rese
rve
Rese
rve
Au
to
Tr
an
sfe
r
Le
vel
Sen
sor
Con
vert
er
GN
Oper
ati
on
Si
gnal
CO
MP
Oper
ati
on
Si
gnal
GN
Start
ing
Si
gn
al
Figure 7-2 EMP-20W Electric wiring-2 (Sequencer)