Ulvac DOP-80SP, Инструкция по эксплуатации

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8
< Guidelines for Replacement and Cleaning >
Replace or clean components if performance is reduced and/or the following symptoms appear.
Table 6.2 Locations for Maintenance and Inspection
Period of
operation
Inspection item Inspection details
Method of
inspection
Every 3000
hours
Cup packing
Abnormal wear, hardening,
cracking. Visual
inspection
Suction and exhaust
valves
Deformation, chipping.
Visual
inspection
O rings
Deformation, Abnormal wear
hardening, cracking. Visual
inspection
Gaskets Deformation, hardening, cracking.
Visual
inspection
Bearings Abnormal noises. Listen
Power cords
Cracking
Visual
inspection
Loosening of terminals
Tighten a
screw
6.4 Replacing and Cleaning Consumables
See Warning (18),(19),P05
See Caution (11),P06
See Note (14),P06
Tools Required for Setup
Have the following tools on hand and perform the replacement while referring to the diagram.
If there is no repair technician available , or if you do not have access to the required tools, please make the appropriate
request to our repair services department.
・
Required Tools
1. Torque wrench - bit size 4 mm (5.0 Nm)
2. Phillips head (+) screwdriver- No.2
3. Torque screwdriver- No.2 (0.8 Nm, 3.0 Nm)
4. Rag
5. Solvent for wiping (something that has no effect on rubber, such as ethanol)
6. vacuum grease
7. Loctite 242 or Loctite 243
*Use items No.4 and 5 to wipe down any dirty area when replacing the part.
! Warning
!
Caution
! Note
(1) The interior of the pump is extremely hot immediately after operation. After stopping
the pump, leave it for 30 minutes or more and begin replacing consumables and
cleaning only after checking that it has cooled sufficiently.
(2) To prevent ingestion of microscopic particles in the air, use a dust mask and gloves
when replacing components and cleaning.
(3) To prevent injury, wear gloves when replacing consumables.