8
<Replacement Guide>
Replace or clean components if performance is reduced or the following symptoms become apparent.
Table.3 Locations for Maintenance and Inspection
Period of
operation
Inspection item
Replacement guidelines
Method of
inspection
6,000 hours
Diaphragms
Deformation, crack, hardening
Visual
inspection
Air filters
Dirt, clogged, hardening
Visual
inspection
Head gaskets
Damage, leak
Visual
inspection
Suction / Exhaust
valves
Deformation, crack
Visual
inspection
Bearing
Abnormal noises
Listen
6.4 Replacing and Cleaning Consumables
See Warning (19), P05
See Caution (11)(12), P06
※
The pump becomes very hot after operation. After stopping the pump, leave it
for 30 minutes to cool, and replace and clean components only after it has
cooled to a safe temperature.
※
Always put on dust mask and gloves before replacing diaphragms and valves.
Any fine particles produced by mechanical wearing may become airborne
causing a health risk if inhaled.
※
Always use gloves to prevent injury when replacing diaphragms.
Prepare the following tools and refer to drawing when working replacement. When having difficulty in
preparing the tools, ask Ulvac Service Section.
・
Tools
1. Hexagonal wrenches : 5mm
2. Philips screwdriver
: No.2
3. LOCTITE
®
agent
: 242
･
Tightening torque
Pump head
①
：
13N
･
m
（
M6
②
）
Pump head cover
⑥
：
2N
･
m
（
M4
⑦
）
Diaphragm keep plate
③
：
5N
･
m
（
M5
④
）
Suction/exhaust valve
⑪
：
0.8N
･
m
（
M3
⑩
）
Caution: Before replacing consumable parts, be sure to turn OFF the power.
!
Caution
!
Warning
