Ulvac DAP-9D-DC24, Инструкция по эксплуатации

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3.7 Piping
1) Install piping carefully to prevent leaks.
2) Make sure to fix the suction/exhaust tube to the suction/exhaust outlet at the torque of 6 N
·
m. If it is tightened at a higher torque, the suction/exhaust outlet may get damaged.
3) Ensure that piping connected to the outlet does not cause back pressure. Maximum back
pressure is 0.03 MPa (gauge pressure).
4) In case of selecting the inlet pipe and exhaust pipe that are not from our products, please
select the exhaust pipe that has same or larger inner diameter length with the inlet pipe.
5) When evacuating a vessel, ensure that a shut-off valve is placed between the pump inlet
pipe and the vessel (see Fig.3.2). Also, please use a leak valve to prevent start-up failure
due to vacuum start.
Fig.3.2 Example of Piping Used When Evacuating a Vessel
3.8 Storage
Always store in a dry place.
4. Cautions for Operation
4.1 Cautions for Operation
See Danger (1)(2), P04
See Warning (7)(15)(16), P04 to P05
See Caution (3)(4)(5)(6), P06
See Note (4)(5)(6)(7)(8)(9), P07
4.2 Starting in Cold Weather
Cold weather will increase the viscosity of bearing grease and harden diaphragms, resulting
in the pump being difficult to start.
Make sure to use it in within the operating temperature range.
Vacuum pump
Filter
Leak valve
Shut-off valve Vessel
! Warning
!
Caution
! Note
! Danger