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TABLE OF CONTENTS 

Page 

I.

 

INTRODUCTION ....................................................................................................................................... - 1 -

 

A.

 

Scope of Use............................................................................................................................................... - 1 -

 

B.

 

Parts List – What’s included ...................................................................................................................... - 1 -

 

C.

 

Power Supply ............................................................................................................................................. - 1 -

 

D.

 

Specifications ............................................................................................................................................. - 1 -

 

E.

 

Labels and Warnings .................................................................................................................................. - 2 -

 

F.

 

Suggested Services / supplies ..................................................................................................................... - 3 -

 

G.

 

Optional Services / supplies ....................................................................................................................... - 3 -

 

II.

 

INSTALLATION AND OVERVIEW ........................................................................................................ - 4 -

 

A.

 

Installing Ultrapol Advance ....................................................................................................................... - 4 -

 

B.

 

Operating the Ultrapol Advance Safely...................................................................................................... - 7 -

 

C.

 

Overview of Functions ............................................................................................................................... - 8 -

 

D.

 

Operator Controls/Features ...................................................................................................................... - 11 -

 

E.

 

Work holders and Accessories ................................................................................................................. - 12 -

 

III.

 

CALIBRATION ......................................................................................................................................... - 15 -

 

A.

 

Mechanical Alignment ............................................................................................................................. - 15 -

 

B.

 

Optical Alignment (Ultracollimator) ........................................................................................................ - 19 -

 

IV.

 

PREPARATION FOR FLAT POLISHING ............................................................................................ - 19 -

 

A.

 

Mounting a Bare Die Sample ................................................................................................................... - 19 -

 

B.

 

Aligning Sample for Parallel Polishing with  the Ultracollimator ............................................................ - 20 -

 

C.

 

Load Control ............................................................................................................................................ - 21 -

 

D.

 

Correcting for Observed Tilt during polishing ......................................................................................... - 22 -

 

V.

 

APPLICATIONS ....................................................................................................................................... - 23 -

 

A.

 

Topside Delayering of Single Die IC’s .................................................................................................... - 23 -

 

B.

 

Backside Preparation ................................................................................................................................ - 23 -

 

C.

 

Cross-sectioning of Die / Packages .......................................................................................................... - 25 -

 

D.

 

Other Lapping & Polishing Applications ................................................................................................. - 25 -

 

VI.

 

PREVENTATIVE MAINTENANCE ...................................................................................................... - 26 -

 

A.

 

Clean Up ................................................................................................................................................... - 26 -

 

B.

 

Flushing the recirculation pump ............................................................................................................... - 26 -

 

C.

 

Reconditioning the Polyurethane Lap (6208.9) ........................................................................................ - 27 -

 

VII.

 

ACCESSORIES, CONSUMABLES & SPARES .................................................................................... - 28 -

 

APPENDICES ....................................................................................................................................................... - 31 -

 

Appendix A – Timer Manual ............................................................................................................................. - 32 -

 

Appendix B – CE Certification .......................................................................................................................... - 35 -

 

Appendix C – Wiring Diagram .......................................................................................................................... - 36 -

 

 

 
 
 
 

Содержание ULTRAPOL Advance

Страница 1: ...ping and Polishing Machine User Manual 3255 1 Issue 2 3 Updated June 2017 1025 E Chestnut Ave Santa Ana CA 92701 Toll Free US 1 877 542 0609 Tel 1 714 542 0608 Fax 1 714 542 0627 e mail info ultratecu...

Страница 2: ...Note System shown above is complete with the Ultracollimator system...

Страница 3: ...Number has been tested and certified to meet the guidelines of 21 CFR 1040 10 and 1040 11 for CDRH Compliance The Ultrapol Advance is a Class IIIa laser autocollimator assisted device that incorporat...

Страница 4: ...nment Ultracollimator 19 IV PREPARATION FOR FLAT POLISHING 19 A Mounting a Bare Die Sample 19 B Aligning Sample for Parallel Polishing with the Ultracollimator 20 C Load Control 21 D Correcting for Ob...

Страница 5: ...1 Set of loading weights 100g 200g 2 500g 3278 1 Squeegee 6170 1 Quick release plate 1mm hole 6170 2 Quick release plate 2mm hole 6377 U Allen wrench set 7 64 w handle 7 64 and 9 64 Optional Features...

Страница 6: ...ollow Specifically guidelines 21 CFR 1040 10 and 1040 11 detail the standards that all laser products must meet To comply with Federal regulations all laser system manufacturers must ensure that their...

Страница 7: ...acollimator unit housing F Suggested Services supplies Strong flat workbench with 1m x 1m available Hot and Cold water available Lint free wipes Acetone Isopropyl alcohol Double sided tape D I Water Q...

Страница 8: ...l with the base plate At this point the base lock lever may be turned to lock the head into position ii Coolant Coolant is an important part of the polishing process The Solenoid Water Actuation syste...

Страница 9: ...220V wall socket Power for the Mast head assembly is achieved by connection of the black wire connector extending from the tool head into the labeled socket on the back of the Base Unit Place the bla...

Страница 10: ...e Ultracollimator box and L bracket or in one piece L bracket already secured to the Ultracollimator box 1 Attach L bracket onto the back of the ULTRAPOL advance mast using the 4 screws provided for e...

Страница 11: ...o use the Ultrapol Advance or will be in the area where the Ultrapol Advance is in use should be aware of the potential hazards associated with the equipment Observe the following precautions when ope...

Страница 12: ...ual a h k j i g f b c d e Baser Unit a Main Power switch b Sample rotation On Off switch and speed knob c Sample oscillation On Off switch and speed knob d Timer Timer Manual Appendix A e Tachometer L...

Страница 13: ...Z direction micro adjust m Locking screw for slippable scale n Slippable scale o Floating head lock p Mast position lock q Load control knob r Analog dial height indicator s Lift lever t Tilt quick re...

Страница 14: ...Video 1 z LCD Power ON OFF aa Y axis crosshair adjustment bb Beam Brightness cc X axis crosshair adjustment dd Beam ON OFF switch ee Ultracollimator shutter attenuator ff Second X axis crosshair adjus...

Страница 15: ...e 9 The third button down Video 2 Vision camera mode 10 The crosshairs in Ultracollimator mode can be adjusted using the knobs for either the vertical or horizontal lines If equipped with the Ultracol...

Страница 16: ...ignment channel on the bottom of the holder means that the plate is mounted at the same rotational position ii SEM Stub Holder See Order Codes Below Hitachi Compatible Holder shown The Quick Release S...

Страница 17: ...al Stub 6175 P Philips Stub only stainless steel 6178 P Philips Stub only aluminum 6172 J JEOL compatible 6400 QR Holder optical Stub 6178 J JEOL Stub only aluminum 6172 F FEI FIB compatible QR Holder...

Страница 18: ...at the holder can be used with the Ultracollimator To do so simply place the optical flat in place and mount the sample into the holder Place the holder into the quick release and observe the dot on t...

Страница 19: ...lace the work holder with micrometer attached on the quick release 4 Turn pump coolant oscillation and lap switches to the OFF position 5 Be sure that the oscillation sweep is closed off all the way s...

Страница 20: ...to 100 11 Repeat steps 8 10 until both positions have no height difference Y plane alignment 12 o clock and 6 o clock positions 12 Turn the rotation switch to ON and dial speed to 1 Press START Stop t...

Страница 21: ...nce Preferably one that does not have any film attached to it 2 Turn pump coolant oscillation and lap switches to the OFF position 3 Mount the sample holder into the quick release and lock into positi...

Страница 22: ...t knob to bring the micrometer needle to 100 9 Rotate back to the pivot point If the readout on the micrometer is not at 100 turn the Z micro adjust dial on top of the head to bring the head down so t...

Страница 23: ...djust the location of the DOT to the center 11 Once DOT is in the center tighten the screws on the back of the monitor 12 Place CALIBRATING crosshairs adjusted on the back with a flat head screwdriver...

Страница 24: ...s obscuring the line of sight of the ULTRACOLLIMATOR B Aligning Sample for Parallel Polishing with the Ultracollimator 1 Once the system is calibrated and your sample mounted mount the sample holder i...

Страница 25: ...longer on the bottom stop 6 Now slightly turn pressure control knob CW so that the center shaft returns to the bottom most position 7 Using your hand lift the center shaft slightly then lower the cen...

Страница 26: ...e same side as the knob to DESCEND Turning the tilt knob counterclockwise CCW is vice versa the same side elevates effectively lowering the opposite side Both tilt knobs work with this same principle...

Страница 27: ...ress START The amount of lap time varies from each sample type to sample type driven by density of device composition and size of the die A good starting point would be a one minute cycle to observe t...

Страница 28: ...icro adjust ii Lapping For backside you could use various grit size films to remove material The typical steps for material removal are various size diamond films in successive order as follows 30 m 1...

Страница 29: ...er devices D Other Lapping Polishing Applications The need to produce surfaces by precision sawing lapping and polishing operations is widespread throughout manufacturing industry and research ULTRA T...

Страница 30: ...ush recirculation pump see 6 2 B Flushing the recirculation pump It is necessary to flush out the recirculation pump after use every day or if changing slurries to prevent cross contamination Flushing...

Страница 31: ...to CCW 5 Turn pump coolant ON 6 Point the nozzle towards the center of the lap 7 Press START 8 Turn lap RPM to 100 9 Use a single sided razor blade to scrape surface of lap as shown in the image Hold...

Страница 32: ...5 5 M 8432 1 1 5 M 8433 1 3 5 M 8434 1 5 5 M 8437 1 6 5 M 8435 1 9 5 M 8436 1 15 5 M 8438 1 30 5 8 PSA Backed Discs Order No Micron Size Quantity M 8203 1 0 5 100 M 8221 1 1 100 M 8202 1 2 100 M 8222...

Страница 33: ...P or older series ULTRAPOL unit NOTE To qualify customer must purchase ULTRAPOL advance plus ULTRACOLLIMATOR 6170 1 Standard QR Sample Holder for Microscopy preparations optical 6178 1 Mounting Stand...

Страница 34: ...inch diameter Each 2390 5 Resilient Surface Pad 8 inch Diameter Pack of 3 NOTE The resilient surface pad is used to achieve a PC polish on fiber optic connectors It is placed onto an anodized aluminu...

Страница 35: ...31 APPENDICES...

Страница 36: ...be illuminated when the time base is Hours Minutes or Minutes Seconds Set Value Settable value used to trigger the timed output Numeric Keys Each of the number keys is used to increment the value of...

Страница 37: ...inutes Hours Minutes Seconds Factory Setting Hours Minutes Decimal Position Sets the decimal position for the time display Choices are no decimal point 0 1 10ths position 0 0 or hundredths position 0...

Страница 38: ...nd P keys If inactive Off the timing operation can only be reset through the remote input Security Level 4 different levels of security are available 0 Full Access 1 SP locked out 2 Access to Program...

Страница 39: ...REQUENCY ELECTROMAGNETIC FIELD IMMUNITY TEST EN61000 4 4 95 ELECTROMAGNETIC COMPATIBILITY EMC PART 4 TESTING AND MEASUREMENT TECHNIQUES SECTION 4 ELECTRAL FAST TRANSIENT BURST IMMUNITY TEST BASIC EMC...

Страница 40: ...P N 102760 Table Motion Potentiometer 2 Position Switch P N 101773 2 Position Switch P N 101773 Panel Mount Jack 2 5 P N 101167 12VDC Motor P N 101158 2 Position Switch P N 101773 Lighted Switch P N...

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