System Description
Vacuum System
Thermo Fisher Scientific
iCAP Q Operating Manual (P/N 1288090, Revision B)
3-11
Vacuum System
The ICP source operates at atmospheric pressure while the mass
analyzer and detector requires a high vacuum for optimum
performance. The iCAP Q instrument has a three-stage pumping
system realized by a rotary pump and split-flow turbomolecular pump.
shows a schematic view of the vacuum stage in the
instrument.
Labeled Components: 1=interface vacuum,2=intermediate vacuum, 3=high
vacuum
Figure 3-11.
Vacuum stages in the instrument
1
3
2
Содержание iCAP Q
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