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TELEVAC MX7M, Инструкция по эксплуатации


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Instruction Manual

MX7M Active Gauge

To protect the sensor from damage, if the sensor high voltage is toggled on when in either Menu
Control or Pin Control mode the pressure is above 1

×

10

−

2

Torr, overcurrent protection will turn the

sensor off. If the sensor is in Menu Control mode, then a command to turn on the sensor will need
to be sent via communication or through the front panel to toggle the high voltage on again. If Pin
Control is enabled, then the unit will attempt every to turn the high voltage on every 60 seconds until
overcurrent protection does not occur.

2.4 Menu Navigation

The MX7M contains many operator customizable features. Changing these features is possible through
the menu or via RS-485 or USB communications. To navigate the menu simply use the buttons found
on top of the MX7M . The four buttons include the SEL button, an UP arrow, a DOWN arrow, and an
ENT button. Using the SEL button allows the operator to change between menu categories. Using the
ENT button allows the user to enable value editing and save values in addition to toggling between
options where appropriate. Using the UP and DOWN arrows allows navigation through menu options.
The UP and DOWN arrow buttons are also used to edit values.

2.5 Menu Structure

1. Measurement Screen

2. High Voltage Toggle

3. System Settings

(a) Units

i. Torr

ii. mbar

iii. kPa

(b) Gas Type

i. Hydrogen

ii. Helium

iii. Neon

iv. Argon

v. Krypton

vi. Carbon Dioxide

(c) Resolution

i. Low Resolution

ii. High Resolution

(d) Vsense Control

i. Menu Control

ii. Pin Control

(e) Diagnostics

i. FW Date

ii. FW Version

4. Calibration

(a) 1

×

10

−

6

Torr

(b) 1

×

10

−

5

Torr

(c) 1

×

10

−

4

Torr

(d) 1

×

10

−

3

Torr

email: [email protected]

tel: +1 215 947 2500

web: frederickscompany.com

mx7m_im rev C

7 of 23

Содержание MX7M

Страница 1: ...X7M Cold Cathode Ionization Gauge Instruction Manual The Fredericks Company Televac 2400 Philmont Avenue Huntingdon Valley PA 19006 email sales frederickscompany com tel 1 215 947 2500 fax 1 215 947 7464 ...

Страница 2: ...SB Communications Error Codes 23 3 7 Firmware Updates 23 List of Tables 1 Operating Specifications 2 2 Gas Conversion Factors 10 3 Replacement Component Part Numbers 15 4 RS 485 Communication Specifications 17 5 USB Communication Specifications 17 6 RS 485 and USB General Read Commands 18 7 RS 485 and USB General Write Commands 19 8 RS 485 and USB Set Point Commands 20 9 USB Commands for Setting R...

Страница 3: ...with a PC or through the unit s front panel using four capacitive touch buttons located on the top of the unit The MX7M has two set points one relay and one open collector and a selectable analog output option The analog output is a configurable 0 10 V output that includes options for linear linear by decade and logarithmic formats 1 3 Operating Specifications Table 1 Operating Specifications Oper...

Страница 4: ...Instruction Manual MX7M Active Gauge 1 4 Dimensions Figure 1 MX7M Dimensional Drawing email sales frederickscompany com tel 1 215 947 2500 web frederickscompany com mx7m_im rev C 3 of 23 ...

Страница 5: ...or the customer s failure to comply with these requirements READ Instructions Read all safety and operating instructions before operating the product RETAIN instructions Retain the safety and operating instructions for future reference HEED warnings Adhere to all warnings on the product and in the operating instructions FOLLOW instructions Follow all operating and maintenance instructions ACCESSOR...

Страница 6: ...as a key that only allows for the MX7M to mate with the sensor in the proper orientation Rotate the MX7M until the correct alignment is obtained and the MX7M is able to slide onto the 7M sensor Connect the power connector to the top of the unit and be sure to tighten the screws so that a firm connection is maintained Try to avoid connecting the MX7M to the vacuum chamber by long or narrow piping a...

Страница 7: ... one of the following two options from the Measurement Screen press SEL to navigate to the Vsense Control then press ENT to unlock the con trol press UP to toggle the status to ON and then press ENT to save the change The high voltage should now turn on In Menu Control mode the high voltage can also be toggled by sending the appropriate command to turn on the sensor through RS 485 or USB Communica...

Страница 8: ...ly use the buttons found on top of the MX7M The four buttons include the SEL button an UP arrow a DOWN arrow and an ENT button Using the SEL button allows the operator to change between menu categories Using the ENT button allows the user to enable value editing and save values in addition to toggling between options where appropriate Using the UP and DOWN arrows allows navigation through menu opt...

Страница 9: ...2 On 6 Output a Analog Output i Linear A 10 V Pressure B 0 V Pressure Non settable ii Linear by Decade iii Linear by Decade 7F iv Logarithmic A 10 V Pressure B 0 V Pressure b RS 485 Output i Address ii Baud Rate email sales frederickscompany com tel 1 215 947 2500 web frederickscompany com mx7m_im rev C 8 of 23 ...

Страница 10: ...ser must turn on the high voltage by sending a command over communications or by navigating to the High Voltage Toggle menu screen Once at the High Voltage Toggle screen press ENT to unlock the screen press UP or DOWN to change the setting and then press ENT to save the change The high voltage will then turn on and a pressure indication will be displayed on the Measurement Screen If the pressure i...

Страница 11: ...via software through the menu or via communications or hardware means via two pins on the DB 15 connector For more information on the difference between hardware and software control see Section 2 3 E Diagnostics The MX7M contains a diagnostic screen for use by Televac service representatives to trou bleshoot the unit The Diagnostic screen contains the FW version of the unit and the date the softw...

Страница 12: ...to adjust the gauge reading below a reference pressure of 5 10 4 Torr or above 2 10 3 Torr E Analog Output Adjustment The MX7M allows for an offset calibration of the MX7M to provide maximum accuracy for users where long cable lengths are affecting the accuracy To calibrate the analog output adjust the pressure of the vacuum system to a stable pressure corresponding to the a value near the maximum...

Страница 13: ... list of commands Listed below are the fields within the RS 485 Output screen a Address b Baud Rate 2 7 Analog Output The MX7M provides the option for outputting the pressure reading in an analog form Operators who wish to use PLCs to monitor processes should find this function useful There are four different analog output formats to choose between The formats include Logarithmic Linear by Decade ...

Страница 14: ...in replacement for previous Televac offer ings It uses the units digit of the voltage reading to communicate the decade of the pressure reading and the units after the decimal to communicate the specific pressure using the very generalized expression below where A B C and D are digits ranging from 0 9 Vo t ge A BCD Press re Torr 10A 10 BCD For example a voltage reading of 8 367 Volts corresponds t...

Страница 15: ...DOWN arrow to navigate to the 10 V exponent selection screen Press ENT to unlock and then the UP or DOWN arrow to select the value Press ENT to save the value Press the DOWN arrow to navigate to the 0 V exponent selection screen Press ENT to unlock the screen and the UP or DOWN arrow to select the 0 V value Figure 3 Graph of MX7M Sample Analog Output Functions email sales frederickscompany com tel...

Страница 16: ... tube does not remove all build up bead blast the vacuum wetted portions of the anode assembly at 30 PSI using 70 to 140 mesh glass beads labeled with red and blue in the diagram Be careful not to damage the knife edge of the sensor 8 Blast the vacuum wetted portions of the body with glass beads labeled with blue in the diagram concentrating on the pole piece and O ring areas but making sure to cl...

Страница 17: ...Instruction Manual MX7M Active Gauge Figure 4 Cross sectional Diagram of the 7M Sensor email sales frederickscompany com tel 1 215 947 2500 web frederickscompany com mx7m_im rev C 16 of 23 ...

Страница 18: ...ate with the MX7M 3 1 Changing Communications Settings The communication parameters baud rate address etc are changed through the local menu Please see the section in this manual entitled Explanation of Menu Items and Navigation for more information on navigating and editing within the menu Below are provided some specifics on the RS 485 and USB Communications of the MX7M 3 2 Communications Specif...

Страница 19: ...by decade 7F y high value exponent sign zz high value exponent a low value exponent sign bb low value exponent R6 xx Read gas type where xx is N2 Nitrogen AR Argon H2 Hydrogen HE Helium NE Neon KR Krypton C2 Carbon Dioxide R7Y ppseePPSEE Read SPL ppsee and SP2H PPSEE settings Y 1 Open Collector Y 2 Relay R8 x Read sensor voltage control where x is 1 menu control 2 pin control R10 x Read high volta...

Страница 20: ...ow value exponent sign bb low value exponent W53 3 Set analog output format to linear by decade W6xx xx Set gas type where xx is N2 Nitrogen AR Argon H2 Hydrogen HE Helium NE Neon KR Krypton C2 Carbon Dioxide Response is new gas type W7YppsePPSE ppseePPSEE Set thresholds for set point Y where ppsee SPL PPSEE SPH Response is new threshold settings for SPL ppsee and SPH PPSEE Y 1 Open Collector Y 2 ...

Страница 21: ...ponse is new pressure reading WC4xyy ppsee Set 1E 3 calibration adjustment response is new pressure reading WC5xyy ppsee Write analog output adjustment Return value is pressure reading Table 9 USB Commands for Setting RS 485 Communications Settings Command Response Description C1 xxxx Return serial baud rate where xxxx is 0096 9600 0192 19200 0384 38400 0576 57600 1152 115200 Return new value befo...

Страница 22: ...point 2 OFF given by PPSEE 0W10001 CR 0001 Units are in kPa 0W10002 CR 0002 Units are in Torr 0W10003 CR 0003 Units are in mbar 0W4xx CR GG Change gas type N2 Nitrogen Air AR Argon 0S1 CR PPSEE Pressure reading is PPSEE 0RC1 CR Baaa Read 1E 6 Torr Adjustment 0RC2 CR Baaa Read 1E 5 Torr Adjustment 0WC1Baaa CR PPSEE 1E 6 Torr Adjustment is Baaa reading is PPSEE 0WC2Baaa CR PPSEE 1E 5 Torr Adjustment...

Страница 23: ...3 CR ppseePPSEE Set point 2 ON given by ppsee Set point 2 OFF given by PPSEE W10001 CR 0001 Units are in kPa W10002 CR 0002 Units are in Torr W10003 CR 0003 Units are in mbar W4xx CR GG Change gas type N2 Nitrogen Air AR Argon S1 CR PPSEE Pressure reading is PPSEE RC1 CR Baaa Read 1E 6 Torr Adjustment RC2 CR Baaa Read 1E 5 Torr Adjustment WC1Baaa CR PPSEE 1E 6 Torr Adjustment is Baaa reading is PP...

Страница 24: ...ponse Description S1 ppsee Read pressure data where ppsee is pp mantissa s sign ee exponent When in the Starting state unit returns Starting When in the Low state unit returns Low When high voltage is off unit returns 0 S2 yymmdd Read firmware version where yy last two digits of year mm month dd day 3 7 Firmware Updates The MX7M has the ability to update the firmware when in the field over the USB...

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