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Introduction

Introduction

The 4200A-SCS and embedded Clarius software provides

clear, uncompromised measurement and analysis. The

Clarius software is furnished with embedded measurement

expertise and ready-to-use applications that enable you

to perform your research with speed and confidence. The

4200A-SCS-PKA High-Resolution I-V package includes

everything you need to perform I-V measurements. The

Clarius user interface provides touch-and-swipe or

point-and-click control for advanced test definition, parameter

analysis, graphing, and automation capabilities for modern

semiconductor, materials, and process characterization.
For additional support information, see

tek.com/keithley

The 4200A-SCS documentation includes:
•

Quick Start Guide:

This document. It provides unpacking

instructions, describes basic connections, reviews

basic operation information, and provides a quick test

procedure to ensure the instrument is operational.

•

Clarius Manual:

Provides comprehensive information

about projects, tests, data analysis, data calculation, user

libraries, and customizing Clarius.

• Hardware manuals

for setup and maintenance,

source-measure units (SMUs), capacitance-voltage units

(CVUs), pulse-measure units (PMUs) and

pulse-generator units (PGUs), and prober and external

instrument control.

• Programming

guides

for the library LPT, Keithley

User Library Tool (KULT), and Keithley External Control

Interface (KXCI).

For complete documentation for the 4200A-SCS, see the

4200A-SCS Learning Center

The Learning Center

contains instructional videos, PDFs, and HTML content. To

access the Learning Center, click Help in the Clarius menu,

press F1 while using Clarius, or select the desktop icon.

Содержание Keithley 4200A-SCS-PKA

Страница 1: ...Model 4200A SCS PKA High Resolution I V Parameter Analyzer Quick Start Guide ...

Страница 2: ...r high transient overvoltages often associated with local AC mains connections Certain Keithley measuring instruments may be connected to mains These instruments will be marked as category II or higher Unless explicitly allowed in the speciﬁcations operating manual and instrument labels do not connect any instrument to mains Exercise extreme caution when a shock hazard is present Lethalvoltage may...

Страница 3: ...ad the associated information very carefully before performing the indicated procedure The CAUTION heading in the user documentation explains hazards that coulddamage the instrument Such damage may invalidate the warranty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument Always read the associated i...

Страница 4: ...ative humidity non condensing Storage temperature 15 C to 60 C 5 to 90 relative humidity non condensing CAUTION Carefully consider and configure the appropriate output off state source levels and compliance levels before connecting the instrument to a device that can deliver energy Failure to consider the output off state source levels and compliance levels may result in damage to the instrument o...

Страница 5: ...tart Guide This document It provides unpacking instructions describes basic connections reviews basic operation information and provides a quick test procedure to ensure the instrument is operational Clarius Manual Provides comprehensive information about projects tests data analysis data calculation user libraries and customizing Clarius Hardware manuals for setup and maintenance source measure u...

Страница 6: ...ox 5 Inspect the instrument for any obvious signs of physical damage Report any damage to the shipping agent immediately CAUTION The 4200A SCS weighs approximately 27 kg 60 lb and requires a two person lift CAUTION Do not lift the 4200A SCS using the front bezel In the 4200A SCS PKA bundle you receive the 4200A SCS Parameter Analyzer with Keyboard Mouse Power line cord Safety interlock cable 4201 ...

Страница 7: ... SMU triaxial cables two 4 Safety interlock cable 5 4200 PA remote preamplifier 6 4200 TRX 2 ultra low noise triaxial cables two 7 CAP 31 protective caps with triaxial connectors two 4200A SCS PKA Quick Start Guide not shown this document Refer to the packing list for additional items that might have shipped with your instrument Items shipped may vary from items pictured here ...

Страница 8: ... the device under test DUT to protect the operator from flying debris in the event of a system or DUT failure Make sure any test fixture connected to the system protects the operator from contact with hazardous voltages hot surfaces and sharp objects Use shields barriers insulation and safety interlocks to accomplish this Double insulate all electrical connections that an operator can touch Double...

Страница 9: ...ure of the fixture is open It also enables the 4200A SCS to output higher voltages when the exterior enclosure of the fixture is closed When the safety interlock signal is asserted the switch is closed and the signal is connected to 12 V all the voltage ranges of the SMUs are functional When the safety interlock signal is not asserted the switch is open the 200 V range on the SMUs is disabled limi...

Страница 10: ...age fixtures such as the 8101 PIV are intended for applications that are less than 40 V For these applications an interlock is not needed High voltage test fixtures can be used with applications that are greater than 40 V The test fixture has a safety interlock switch connected to its lid When the lid is closed the interlock circuit is closed asserted and SMU 200 V ranges are enabled Conversely th...

Страница 11: ...st fixture Test connections If you are testing discrete devices you need a test fixture that is equipped with 3 lug triaxial connectors The 8101 PIV test fixture which is included with the 4200A SCS PKA allows the 4200A SCS to be connected to a discrete device For connections to a probe station for wafer testing see the 4200A SCS Learning Center NOTE The outer shield of the triaxial cables connect...

Страница 12: ...Connect a test fixture and DUT to the 4200A SCS If you are using the supplied test fixture connect the MOSFET and test fixture as shown in this diagram ...

Страница 13: ...to triaxial cable that connects 4200 PA to a test fixture 3 4200 MTRX 1 Ultra low noise SMU triaxial cable mini triaxial connects 4201 SMU units to a test fixture 4 TG 439 nMOSFET DUT 1 Plug into the test socket that is labeled DC ONLY 5 8101 PIV Component Test Fixture 1 With sample devices 6 4200 PA Remote Preamplifier 1 7 4201 SMUs 2 ...

Страница 14: ...rounded outlets When proper connections are made the instrument chassis is connected to power line ground through the ground wire in the power cord In addition a redundant protective earth connection is provided through a screw on the rear panel This terminal should be connected to known protective earth In the event of a failure not using a properly grounded protective earth and grounded outlet m...

Страница 15: ...male end of the line cord into a properly grounded ac line power receptacle 3 Turn on the 4200A SCS by pushing the power switch The switch is lit when power is on The instrument starts up NOTE When first starting a Clarius application you must answer Yes to an on screen license agreement Answering No makes your system nonfunctional until you reinstall the software ...

Страница 16: ...t to 60 Hz If the setting is wrong the 4200A SCS cannot properly reject the powerline measurement noise To change powerline frequency 1 Close Clarius 2 Run KCon 3 From the System Configuration list select 4200A SCS 4 Change the Powerline Frequency as needed 5 Select Save ...

Страница 17: ...Connect ...

Страница 18: ... on a MOSFET The first time Clarius opens the project tree is displayed and the default project is loaded The next graphic shows the tests in this project To work with a test 1 Select vds id located under 4terminal n fet ...

Страница 19: ...test 2 The vds id settings should be SMU3 Provide a voltage step function for four different gate voltages 2 V 3 V 4 V and 5 V SMU2 Perform a 51 point sweep of drain voltage 0 V to 5 V at each gate voltage A current measurement is made at each voltage sweep point 3 Change the settings as needed 4 Select Save ...

Страница 20: ...ct only that test will run For example in the following graphic when you select only the vds id test will run In the following example one test is run To run the vds id test 1 In the project tree select vds id to highlight it 2 On the toolbar select When the test is running Run shows two arrows circling the icon and Stop turns red When the test is complete Run and Stop return to normal ...

Страница 21: ...nce of tests check the tests you want to run then check and select the device subsite or project item that contains the tests For example in the following graphic when you click all the checked tests under 4terminal n fet run ...

Страница 22: ...u can use the Analyze sheet which is similar to a Microsoft Excel spreadsheet and the graph To view vds id test results 1 Select Analyze 2 Select an icon next to View to choose the type of information you would like to see Data and graph Data only Graph only ...

Страница 23: ...to an external file To save your test data 1 Select Save Data 2 On the Save Test Data As dialog box select one of the following buttons Save Sheet Select this to save only the sheet Save Graph1 Select this to save only Graph1 Save Graph2 if available Select this to save only Graph2 Save All Select this to save the sheet and graphs ...

Страница 24: ...h Settings button To customize a graph 1 Select Graph Settings 2 To include a Legend and Title select those options from the Graph Settings menu 3 To use different colors for the graph series select Graph Properties then select Series The Data Series Properties dialog box is displayed 4 Select the colors for each series of data 5 Click OK The series are displayed in the selected colors ...

Страница 25: ...I V Test ...

Страница 26: ...t fixture Also check the connections from the DUT to the test fixture socket I cannot unplug the mini triaxial cable 4200A MTRX from the SMU What should I do The mini triaxial connector is a locking connector To remove it pull the knurled part of the connector back A configuration error has been detected and I cannot launch Clarius What should I do This occurs when the physical configuration does ...

Страница 27: ...ius Manual Provides comprehensive information about projects tests data analysis data calculation user libraries and customizing Clarius Hardware manuals for setup and maintenance source measure units SMUs capacitance voltage units CVUs pulse measure units PMUs and pulse generator units PGUs and prober and external instrument control Programming guides for the library LPT Keithley User Library Too...

Страница 28: ... S and foreign patents issued and pending Information in this publication supersedes that in all previously published material Specification and price change privileges reserved TEKTRONIX and TEK are registered trademarks of Tektronix Inc All other trade names referenced are the service marks trademarks or registered trademarks of their respective companies 4200A PKA 903 01 Rev B August 2021 P4200...

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