Tektronix KEITHLEY 2600B Series Скачать руководство пользователя страница 9

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In this section:

Welcome

Thank you for choosing a Keithley Instruments product. The Series 2600B System SourceMeter

instrument provides manufacturers of electronic components and semiconductor devices with an

instrument that combines source and measurement capabilities in a single instrument called a

source-measure unit (also called a SMU). This combination simplifies test processes by eliminating

synchronization and connection issues associated with multiple instrument solutions. A 2600B

provides a scalable, high throughput, highly cost-effective solution for precision dc, pulse, and low

frequency ac source-measure testing that also maintains code compatibility throughout the Series

2600B SourceMeter instruments.

This manual describes basic operation for the Models 2601B, 2602B, 2604B, 2611B, 2612B, 2614B,

2634B, 2635B, and 2636B.

Extended warranty

Additional years of warranty coverage are available on many products. These valuable contracts

protect you from unbudgeted service expenses and provide additional years of protection at a fraction

of the price of a repair. Extended warranties are available on new and existing products. Contact your

local Keithley Instruments office, sales partner, or distributor for details.

Contact information

If you have any questions after you review the information in this documentation, please contact your

local Keithley Instruments office, sales partner, or distributor. You can also call the Tektronix

corporate headquarters (toll-free inside the U.S. and Canada only) at 1-800-833-9200. For worldwide

contact numbers, visit

tek.com/contact-us

Section 1

Introduction

Содержание KEITHLEY 2600B Series

Страница 1: ...User s Manual 2600BS 900 01 Rev A August 2021 P2600BS 900 01A 2600BS 900 01A tek com keithley Series 2600B System SourceMeter Instrument...

Страница 2: ...System SourceMeter instrument User s Manual Series 2600B...

Страница 3: ...names are trademarks or registered trademarks of Keithley Instruments LLC Other brand names are trademarks or registered trademarks of their respective holders The Lua 5 0 software and associated docu...

Страница 4: ...d to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to mains Exerc...

Страница 5: ...lains hazards that could damage the instrument Such damage may invalidate the warranty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or m...

Страница 6: ...rs 3 1 Front panel 3 1 Rear panel 3 5 Menu overview 3 12 Menu navigation 3 12 Menu trees 3 12 Setting values 3 19 Beeper 3 21 Displayed error and status messages 3 21 Display operations 3 22 Display m...

Страница 7: ...rface 4 6 DUT test connections 4 6 Input output connectors 4 8 2 wire local sensing connections 4 12 4 wire remote sensing connections 4 12 Contact check connections 4 14 Guarding and shielding 4 16 I...

Страница 8: ...t User s Manual Table of contents Front panel tests 5 3 Keys test 5 3 Display patterns test 5 3 Upgrading the firmware 5 4 Using TSB to upgrade the firmware 5 5 Displaying the serial number 5 6 Next s...

Страница 9: ...also maintains code compatibility throughout the Series 2600B SourceMeter instruments This manual describes basic operation for the Models 2601B 2602B 2604B 2611B 2612B 2614B 2634B 2635B and 2636B Ex...

Страница 10: ...acking instructions describes basic connections and reviews basic operation information If you are new to Keithley Instruments equipment refer to the Quick Start Guide to take the steps needed to unpa...

Страница 11: ...o create your own test applications in C C VB NET or C programming languages It can also be called from other languages that support calling a DLL or ActiveX COM object Refer to IVI Foundation ivifoun...

Страница 12: ...to 240 V ac 50 Hz or 60 Hz autosensing 240 VA maximum Input and output connections See Front panel on page 3 1 and Rear panel on page 3 5 Environmental conditions For indoor use only Altitude Maximum...

Страница 13: ...er or coffee for instance on the top cover If it spills the liquid may enter the case through the vents and cause severe damage To prevent damaging heat build up and ensure specified performance use t...

Страница 14: ...elow to connect the 2600B to line power and turn on the instrument Operating the instrument on an incorrect line voltage may cause damage to the instrument possibly voiding the warranty To turn a 2600...

Страница 15: ...tact 4 To turn your instrument on press the front panel POWER switch to place it in the on I position 5 To turn your instrument off press the front panel POWER switch to place it in the off O position...

Страница 16: ...key to return to the main display To configure the line frequency from a remote interface Set the localnode linefreq or the localnode autolinefreq attribute To set the line frequency to 60 Hz send lo...

Страница 17: ...indicators and connectors 2600B controls indicators and the USB port are on the front panel on page 3 1 Make connections to the 2600B through connectors on the rear panel on page 3 5 Front panel The...

Страница 18: ...function voltage or current and places the cursor in the source field for editing MEAS Cycles through measure functions voltage current resistance or power LIMIT Places the cursor in the compliance l...

Страница 19: ...STATISTICS Includes MEAN STD DEV SAMPLE SIZE MINIMUM MAXIMUM PK PK TRIG Triggers readings MENU Accesses the main menu on page 3 12 You can use the main menu to configure many functions and features EX...

Страница 20: ...cursor control and then press the navigation wheel to view the value or submenu item 5 Navigation wheel Turn the navigation wheel to Move the cursor to the left and the right the cursor indicates the...

Страница 21: ...autorange is selected EDIT Instrument is in editing mode ERR Questionable reading or invalid calibration step FILT Digital filter is enabled LSTN Instrument is addressed to listen REL Relative mode i...

Страница 22: ...Section 3 Instrument description Series 2600B System SourceMeter instrument User s Manual 3 6 2600BS 900 01 Rev A August 2021 Figure 4 2602B and 2612B rear panel Figure 5 2604B rear panel...

Страница 23: ...Series 2600B System SourceMeter instrument User s Manual Section 3 Instrument description 2600BS 900 01 Rev A August 2021 3 7 Figure 6 2614B rear panel Figure 7 2634B rear panel...

Страница 24: ...Section 3 Instrument description Series 2600B System SourceMeter instrument User s Manual 3 8 2600BS 900 01 Rev A August 2021 Figure 8 2635B rear panel Figure 9 2636B rear panel...

Страница 25: ...rd G Connections are as follows LO LO S LO Sense LO G Guard S HI Sense HI HI HI Channel A 2634B 2635B 2636B Channel B 2634B 2636B These triaxial connectors provide input output connections for HI and...

Страница 26: ...seven GND pins and three 5 V pins The digital input and output pins are not available on the 2604B 2614B 2634B Pins provided One interlock pin seven GND pins and three 5 V pins The digital input and...

Страница 27: ...ground module Screw terminal connector on ground module 8 TSP Link Expansion interface that allows a 2600B and other TSP enabled instruments to trigger and communicate with each other Use a category 5...

Страница 28: ...RSOR arrow key to highlight an option Rotate the navigation wheel clockwise or counterclockwise to highlight an option Press the ENTER key or the navigation wheel to select an option Use the EXIT LOCA...

Страница 29: ...lusive 2 TSP Link is not available on the 2604B 2614B and 2634B 3 DIGOUT is not available on the 2604B 2614B and 2634B The following table contains descriptions of the main menu options and cross refe...

Страница 30: ...the flow control ENABLE Enables and disables the RS 232 interface TSPLINK Configure the instrument in a TSP Link network Series 2600B Reference Manual TSP Link system expansion interface NODE Selects...

Страница 31: ...cture is summarized in the following figures More detailed information follows the figures For directions on navigating the menu see Menu navigation on page 3 12 For other menu items see Main menu on...

Страница 32: ...ser s Manual 3 16 2600BS 900 01 Rev A August 2021 Figure 12 CONFIG menu tree COMMON menu models with two SMUs 1 Enter a value 2 Replace X with A for SMU Channel A such as in CHANA BUF or a B for SMU C...

Страница 33: ...ent User s Manual Section 3 Instrument description 2600BS 900 01 Rev A August 2021 3 17 Figure 13 CONFIG menu tree models with a single SMU 1 Select a value 2 Enter a value 3 Model 2635B only Press th...

Страница 34: ...annel To access press the CONFIG key and then Options For more information see SRC V source sense and low range I source low range and high capacitance mode Series 2600B Reference Manual Range Basic s...

Страница 35: ...the change 5 To return to the main menu press the EXIT LOCAL key To set a value using the numeric entry method 1 If the keypad is disabled press the MENU key then select DISPLAY NUMPAD ENABLE 2 Use th...

Страница 36: ...gation wheel to move the cursor to the digit that needs to be changed 3 Press the navigation wheel or the ENTER key to edit the source value The EDIT indicator is illuminated 4 Change the source value...

Страница 37: ...r on or off from the front panel 1 Press the MENU key and then select BEEPER 2 Select one of the following ENABLE DISABLE To turn the beeper on or off from the TSP command interface Set the beeper ena...

Страница 38: ...ISPLAY key to scroll through the various display modes shown in the figure below Refer to Display operations on page 3 22 for more information about the display For the 2602B 2604B 2612B 2614B 2634B a...

Страница 39: ...6 display getlastkey Capturing key press codes display gettext Displaying text messages on page 3 27 display inputvalue Parameter value prompting on page 3 30 display loadmenu add display loadmenu cat...

Страница 40: ...cted the measured reading can be displayed as volts amperes ohms or watts Configure the type of measured reading displayed by setting the display smuX measure func attribute The following programming...

Страница 41: ...display clear display setcursor and display settext are overlapped nonblocking commands The script does not wait for one of these commands to complete These nonblocking functions do not immediately up...

Страница 42: ...is truncated If the text is truncated the cursor is left at the end of the line Figure 15 Row and column format for display messaging 1 Columns for Row 1 2 Columns for Row 2 3 Row 1 4 Row 2 X Display...

Страница 43: ...bottom line display clear display setcursor 1 1 0 display settext Test in Process display setcursor 2 6 0 display settext Do Not Disturb Character codes The following special codes can be embedded in...

Страница 44: ...n the text string It is easy to forget that the character following the is part of the code For example if you want to display Hello on the top line and Nate on the bottom line send the following comm...

Страница 45: ...resent a user defined menu on the display The menu consists of the menu name on the top line and a selectable list of menu items on the bottom line To define a menu use the display menu menu items fun...

Страница 46: ...omitting the prevents negative value entry 0 Defines the digit positions for the value up to six zeros 0 Exponent field optional E include for exponent entry Include for positive negative exponent en...

Страница 47: ...termine which front panel display indicators are turned on use the display getannunciators function For example send the following commands annun display getannunciators print annun The 16 bit binary...

Страница 48: ...ent a test from being interrupted When locked this key becomes a NO OP no operation Configure the following attribute to lock or unlock the EXIT LOCAL key display locallockout lockout Where lockout is...

Страница 49: ...600B is turned off See Example 1 below Example 1 Assume a script with a function named DUT1 has been loaded into the 2600B and the script has not been saved in nonvolatile memory Now assume you want t...

Страница 50: ...nel To run a user factory or script test from the front panel 1 Press the LOAD key to display the LOAD TEST menu 2 Select the USER FACTORY or SCRIPTS menu item 3 Position the blinking cursor on the te...

Страница 51: ...sv file Administrative options LAN information and LXI information The web interface resides in the firmware of the instrument Changes you make through the web interface are immediately made in the in...

Страница 52: ...omputer keyboard to open the web interface of the instrument If the web interface does not open in the browser see LAN troubleshooting suggestions Web interface Welcome page The Welcome page provides...

Страница 53: ...ess assignment that uses a static address to an IP address assignment that uses a DHCP server If this happens you need to revert to either using the front panel to set the IP address or use an automat...

Страница 54: ...anel Select MENU then RESET PASSWORD For information on the TSP commands refer to localnode passwordmode in the Series 2600B Reference Manual To change the password 1 Select Set Password 2 In the Curr...

Страница 55: ...ing buffer from the Reading Buffer list The data is displayed in the table Initially the reading number and reading measurement values are displayed You can display additional data using the filters t...

Страница 56: ...data shown in the table on the Reading Buffers page is downloaded To download buffer data 1 From the web interface select Virtual Front Panel 2 Select Reading Buffers 3 From the Reading Buffer list s...

Страница 57: ...to send the command to the instrument The command is displayed in the Output box If there is a response to the command it is displayed after the command 4 To clear the Output box right click and selec...

Страница 58: ...trigger occurred in UTC 24 hour time 11 46 44 000 11 Mar 2020 Event ID Identifies the lan trigger N that generates an event LAN0 lan trigger 1 LAN1 lan trigger 2 LAN2 lan trigger 3 LAN3 lan trigger 4...

Страница 59: ...ro 0 Flags Contain data about the LXI trigger packet values are 1 Error 2 Retransmission 4 Hardware 8 Acknowledgments 16 Stateless bit 16 Data The values for this are always 0 zero Accessing the event...

Страница 60: ...imestamp PTP time Epoch from 1588 Flags Data See the table in Logging LAN trigger events in the event log on page 3 41 for detailed descriptions To generate log traffic send the code local id 1 lan tr...

Страница 61: ...ndling cables Putting the equipment into standby does not guarantee that the outputs are powered off if a hardware or software fault occurs Source measure capabilities From the front panel you can con...

Страница 62: ...10 nA 100 nA 1 A 10 A 100 A 1 mA 10 mA 100 mA 1 A 1 5 A 10 A5 202 mV 2 02 V 20 2 V 202 V N A 1 01 nA 10 1 nA 101 nA 1 01 A 10 1 A 101 A 1 01 mA 10 1 mA 101 mA 1 01 A 1 515 A 10 1 A 204 mV 2 04 V 20 4...

Страница 63: ...Manual For additional information on limits refer to Limit principles in the Series 2600B Reference Manual The only exception to the limit not being exceeded is the voltage limit when operating as a...

Страница 64: ...needed Press the ENTER key or the navigation wheel 3 Press the navigation wheel and set the limit to the new value 4 Press the ENTER key or the navigation wheel to complete editing 5 Press the EXIT LO...

Страница 65: ...e instrument or to the device under test DUT When operating as a sink voltage and current have opposite polarity the instrument is dissipating power rather than sourcing it An external source for exam...

Страница 66: ...system To prevent injury or death remove power from the instrument or test system and discharge any energy storage components for example capacitors or cables before changing any connections that migh...

Страница 67: ...rrent or voltage as shown in the following figure Figure 21 Fundamental source measure configurations Source V A Current meter Voltage source V Voltage meter When sourcing current you can measure volt...

Страница 68: ...nt electrical shock that could cause injury or death never make or break connections to the 2600B while the output is on Power off the equipment from the front panel or disconnect the main power cord...

Страница 69: ...ks Input output LOs are not connected between channels and are electrically isolated from chassis ground The chassis should never be used as a ground point for signal connections High frequencies more...

Страница 70: ...h terminal block uses two captive screws to secure it to the rear panel Figure 25 Models 2634B and 2636B input output and chassis ground terminals Model 2635B similar For the 2601B 2602B 2604B 2611B 2...

Страница 71: ...the FVR increases to dampen its effects For dc to 60 Hz the FVR is a virtual short 0 ohms Figure 26 Models 2601B 2602B 2604B 2611B 2612B and 2614B low noise chassis ground banana jack and chassis scre...

Страница 72: ...and measuring voltage in high impedance more than 1 k test circuits When using 2 wire local sensing connections make sure to properly configure the 2600B Sense mode selection on page 4 30 Figure 28 Tw...

Страница 73: ...ected from its corresponding force lead Even with the overvoltage protection set to the lowest value 2 V never touch anything connected to the terminals of the 2600B when the instrument is on Always a...

Страница 74: ...tential sources for this resistance include poor contact at the device under test DUT failing relay contacts on a switching card and wires that are too long or thin To use contact check the current li...

Страница 75: ...one of the following 0 or smuX CONTACT_FAST 1 or smuX CONTACT_MEDIUM 2 or smuX CONTACT_SLOW smuX contact threshold rvalue Set resistance threshold for the contact check function Contact check programm...

Страница 76: ...uit A metal safety shield must be connected to a known protective earth safety ground See Test fixtures on page 4 24 for important safety information on the use of a metal or a nonconductive enclosure...

Страница 77: ...Chassis screw 3 Device under test DUT 4 Protective earth safety ground 5 Equivalent schematic 6 Metal safety shield For the 2611B 2612B 2614B 2634B 2635B and 2636B the maximum output voltage for a cha...

Страница 78: ...Manual 4 18 2600BS 900 01 Rev A August 2021 Figure 32 Model 2611B 2612B or 2614B safety shield for hazardous voltage test circuit connections 1 Chassis 2 Chassis screw 3 Device under test DUT 4 Protec...

Страница 79: ...Section 4 Operation 2600BS 900 01 Rev A August 2021 4 19 Figure 33 Model 2634B 2635B or 2636B safety shield for hazardous voltage test circuit connections 1 Protective earth safety ground 2 Equivalent...

Страница 80: ...hat can exist between HI and LO Without guarding leakage and capacitance in the external high impedance test circuit could be high enough to adversely affect the performance of the 600B Guarding is re...

Страница 81: ...ve test fixtures must be rated to double the maximum capability of the test equipment in the system Connections to LO on the 2600B are not necessarily at 0 V Hazardous voltages could exist between LO...

Страница 82: ...is connected to LO The safety shield is connected to the chassis and to protective earth safety ground Connect the enclosure of all metal test fixtures to protective earth safety ground See your speci...

Страница 83: ...nabled The interlock helps facilitate safe operation of the equipment in a test system Bypassing the interlock could expose the operator to hazardous voltages that could result in personal injury or d...

Страница 84: ...r panel 7 Pin 23 8 Closing switch enables 200 V operation Test fixture You can use a test fixture to house a device or test circuit The test fixture can be a metal or nonconductive enclosure and is ty...

Страница 85: ...struction requirements for a nonconductive enclosure are also described in the warning above Test circuit isolation With the lid closed the test fixture must completely surround the test circuit A met...

Страница 86: ...LO of the 2600B is floating 10 V above chassis earth ground If LO of the 2600B was instead connected to chassis ground the external voltage source would be shorted to the chassis ground Figure 38 Sch...

Страница 87: ...mum floating common mode voltage for a source measure unit SMU is 250 V Exceeding this level may cause damage to the instrument and create a shock hazard Using an external source to float a SMU could...

Страница 88: ...source as indicated by the units in the source field on the display The flashing digit cursor indicates which value is presently selected for editing 2 Move the cursor to the digit to change then pres...

Страница 89: ...the RANGE keys The selected source range determines the measurement range When not measuring the source such as when sourcing V but measuring I you can select the measurement range selection manually...

Страница 90: ...ey or the navigation wheel If you pressed the MEAS key Select V MEAS SENSE MODE and then press the ENTER key or the navigation wheel 4 Select 2 WIRE or 4 WIRE as needed and then press the ENTER key or...

Страница 91: ...see Output off function on page 4 32 You can also specify current and voltage output off limits Output off limits compliance on page 4 33 When the output is turned off the output goes to either 0 V o...

Страница 92: ...only when the output is turned off and the 2600B is set to the normal output off mode smuX source offmode smuX OUTPUT_NORMAL You can set the output off function to CURRENT or VOLTAGE through the CONF...

Страница 93: ...ource offfunc smuX OUTPUT_DCAMPS smuX can be smua for channel A or smub for channel B Output off limits compliance You can set output off limits compliance for the current and voltage output off funct...

Страница 94: ...utput off state programming quick reference Command Description smuX source offmode smua OUTPUT_NORMAL Selects normal output off mode smuX source offmode smua OUTPUT_HIGH_Z Selects high impedance outp...

Страница 95: ...eplacement A fuse on the 2600B rear panel protects the power line input of the instrument See the following instructions to replace the fuse You do not need to return your instrument for service if th...

Страница 96: ...all tab is on the top of the fuse drawer item 2 Use a thin bladed knife or a screwdriver to pry this tab away from the ac receptacle 3 Slide the fuse drawer out to gain access to the fuse the fuse dra...

Страница 97: ...he test press the ENTER key When you press a key while the test is active the label name for that key is displayed to indicate that it is functioning properly When you release the key the message No k...

Страница 98: ...From the front panel you must use the USB flash drive Make sure the USB flash drive is empty except for the firmware file From the web interface Test Script Builder or remote interface you can select...

Страница 99: ...e status of the upgrade is displayed The instrument reboots automatically when the upgrade is complete To upgrade or downgrade the firmware from the web interface 1 Turn the instrument power off Wait...

Страница 100: ...Upgrade to install a newer version of firmware or Downgrade to install an older of firmware 7 Wait until the upgrade or downgrade is complete and the instrument shows the opening display Displaying t...

Страница 101: ...andbook Precision DC Current Voltage and Resistance Measurements Semiconductor Device Test Applications Guide Application notes Updated drivers Information about related products including Series 2600...

Страница 102: ...and trade names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Ro...

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