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HRX-OM-K003

Chapter 8 Appendix

8.7 Compliance

HRW Series

8-14

8.7 Compliance

This system conforms to the following standards.

Table 8-7 Compliance

CE Marking

EMC Directive 2004/108/EC
Low Voltage
Directive

2006/95/EC

Machinery
Directive

2006/42/EC

SEMATECH

S2-93, S8-95

SEMI

S2-0703, S8-0701, F47-0200

E229305 / UL1995

Содержание HRW002-H

Страница 1: ...8 H HRW015 H HRW030 H HRW002 H1 HRW008 H1 HRW015 H1 HRW030 H1 HRW002 H2 HRW008 H1 HRW015 H2 HRW030 H2 HRW002 HS HRW008 HS HRW015 HS HRW030 HS HRW002 H1S HRW008 H1S HRW015 H1S HRW030 H1S HRW002 H2S HRW...

Страница 2: ...n The contents of this manual and related documents supplied with this system shall be neither regarded as a provision of the contract nor utilized to correct or modify the existing agreements commitm...

Страница 3: ...1 12 1 6 Emergency Measures 1 13 1 6 1 Emergency off EMO switch 1 13 1 7 Waste Disposal 1 15 1 7 1 Circulating fluid disposal 1 15 1 7 2 System disposal 1 15 1 8 Material Safety Data Sheet MSDS 1 15 C...

Страница 4: ...4 5 2 System shutdown 4 5 Chapter 5 System Operation 5 1 5 1 Operation Display Panel 5 1 5 2 Flow Chart of Operation Screen 5 2 5 3 Operation Screen 5 3 5 3 1 Model Indication screen 5 3 5 3 2 Status...

Страница 5: ...7 3 2 Draining of facility water 7 5 7 4 Periodic Replacement Parts 7 6 Chapter 8 Appendix 8 1 8 1 Specification 8 1 8 1 1 System specification 8 1 8 1 2 Communication specification 8 4 8 1 3 Alarm s...

Страница 6: ...HRX OM K003 Table of Contents HRW Series TOC 4...

Страница 7: ...or around this system are to have proper training and education on dangers specific to this system and safety measures against potential hazards A safety manager is responsible for observing safety s...

Страница 8: ...k carries useful information the relevant tips are given as well 1 2 2 Definitions of Serious injury and Minor injury Serious injury This term describes injuries such as loss of eyesight wound burns f...

Страница 9: ...sent the warning details in easy to understand manner Symbol of electrical hazard Symbol of heat hazard Symbol of Don ts Symbol of Dos This symbol denotes Don t item which you must not do in operation...

Страница 10: ...s of high voltage hazard Labels of hot surface hazard High voltage hazard This warning label is affixed on the part isolated with the cover panel of the system panel in which high voltage is applied D...

Страница 11: ...e contents of the hazard warning labels carefully and keep them in mind Do not peel off or deface the hazard warning labels Users are NOT allowed to change the locations of the hazard warning labels M...

Страница 12: ...HRX OM K003 Chapter 1 Safety 1 3 Hazard Warning Label HRW Series 1 6 Hot surface hazard Figure 1 7 Hot Surface Hazard Front Rear Hazard warning label No 4 Hazard warning label No 5...

Страница 13: ...ation of Model Label Information on your system such as Serial No and Model No need to be furnished when you contact the store you purchased from Serial No and model No are listed on the label as show...

Страница 14: ...in the vicinity of the system to alert them of your action Use appropriate tools and follow proper procedures See 1 5 4 Protective equipment to wear protective equipment properly Refer to your safety...

Страница 15: ...are activated when improper operation or hazardous conditions occur System operation shall be terminated when a safety interlock is activated An alarm message is displayed on the LCD screen when a sa...

Страница 16: ...his manual are required for system service Lockout is allowed only when the system come to a full stop A supervisor should be appointed to direct all personnel if multiple workers engage in system ser...

Страница 17: ...he padlock Releasing lockout 1 Remove the padlock from the lock mounting part 2 Turn the breaker handle to RESET The lock mounting part is pulled in The handle turns back to OFF if released Figure 1 1...

Страница 18: ...ow according to work type For system transportation installation and removal Protective footwear Protective gloves Hard hat For handling circulating fluid Protective footwear Protective gloves Protect...

Страница 19: ...e system comes to a halt if this button is pressed When press the emergency off EMO switch the control power for this system is shut off to bring the system to a stop The main breaker of this system h...

Страница 20: ...eliminate the cause of activating the EMO before resetting Potential serious accidents may occur if disregarded When the system is in remote mode the remote mode is retained despite the power outage...

Страница 21: ...l agency in accordance with local laws and regulations 1 8 Material Safety Data Sheet MSDS Material Safety Data Sheet MSDS is supplied separately Contact the system supplier if you need the MSDS regar...

Страница 22: ...HRX OM K003 Chapter 1 Safety 1 8 Material Safety Data Sheet MSDS HRW Series 1 16...

Страница 23: ...disengagement of the brakes is required when transporting the system Caster w brake Rotates 360 Operation display panel Emergency off EMO switch Main breaker Ventilating hole intake side Power cable...

Страница 24: ...HRX OM K003 Chapter 2 Name of Each Section 2 1 Name of Each Section HRW Series 2 2...

Страница 25: ...ion maintenance and inspection of the system Only personnel who have adequate knowledge and experiences with not only this system but associated equipment are allowed to perform transport installation...

Страница 26: ...e it Forklift insertion positions are on either left or right side of this system Always insert the forks all the way through Be careful not to hit the casters Do not set this system on its side for t...

Страница 27: ...the casters Potential damage to piping and panels may occur if disregarded System installation should be kept from areas with the potential of flammable gas leak Ignition may occur if leaked gas is co...

Страница 28: ...ating fluid in piping In operation 10 to 35 C Location where ambient humidity is out of the following range or where condensation forms In transportation and storage 15 to 85 In operation 30 to 70 Loc...

Страница 29: ...nce space is recommended See Figure 3 2 Figure 3 2 Recommended Installation Location To save space this system can be installed to allow access only in front and back for daily operation and inspectio...

Страница 30: ...on should be on a vibration free stable level plane See Appendix 8 2 Outer Dimensions in Chapter 8 on page 8 7 for the dimensions of this system 3 3 2 Procedure for system securing 1 Transfer this sys...

Страница 31: ...Contact signal P1 connector D Sub 25 pin male Serial RS 485 P2 connector D Sub 9 pin male Only designated personnel are allowed to install wiring Be sure to turn OFF the power prior to wiring to assur...

Страница 32: ...different operating characteristics depending on each model For the customer s equipment primary side use the breaker whose operating time is equal to or longer than the breaker of this product If the...

Страница 33: ...FF the main breaker of this system 3 Undo the screws 2 pcs to remove the front panel Be sure to use a Phillips screwdriver 4 Undo the screws 2 pcs to remove the breaker cover Be sure to use a Phillips...

Страница 34: ...contact Figure 3 7 Power Cable Insertion and Communication Cable Connection Correct phase rotation is required when attach the power cable to the breaker terminal Do not drop a screw or washer in the...

Страница 35: ...l M8 of the power cable to the earth bar Be sure to use a 13 mm open end wrench Recommended torque 12 5 N m 9 22 ft lbf Tips See Table 3 1 Power Cable and Main Breaker This System on page 3 7 for torq...

Страница 36: ...em failure attributed to insufficient cooling or froths in the circulating fluid in the tank Install circulating fluid piping not to exceed 10m high The maximum amount of circulating fluid in piping i...

Страница 37: ...mmended piping installation Table 3 4 Recommended Pipe No Name Size Material 1 Valve Rc3 4 Stainless steel 2 Y strainer 100 m Rc3 4 Stainless steel 3 Valve Rc3 4 Stainless steel 4 Y strainer 5 m Rc3 4...

Страница 38: ...HRX OM K003 Chapter 3 Transporting and Installation 3 3 Procedure for Installation HRW Series 3 14...

Страница 39: ...talled properly 4 1 4 Operating signal from your system Make sure that no remote signal is being issued from your system System startup takes effect upon power ON if this system receives a remote sign...

Страница 40: ...signated circulating fluid for a specific model High concentration EG in the circulating fluid may cause circulating pump overload which triggers Pump Breaker Trip FLT Potential cooling error may occu...

Страница 41: ...the internal transferring pump start pumping fluid from the Sub Tank into the Main Tank Thus the fluid level in the level gauge will start to drop During initial priming of the external piping additi...

Страница 42: ...omer side primary side Then turn ON the power 2 Turn ON the main breaker of this system The Model Indication screen are displayed in sequence on the LCD screen The screen will change to the Status scr...

Страница 43: ...d Shutdown 4 5 1 System startup Press the START STOP key on the operation display panel The RUN lamp on the operation display panel comes on and system operation is initiated 4 5 2 System shutdown Pre...

Страница 44: ...HRX OM K003 Chapter 4 System Startup and Shutdown 4 5 System Startup and Shutdown HRW Series 4 6...

Страница 45: ...anel Using sharp object will damage the panel Operation Display Panel RESET key Used to stop an alarm buzzer and initialize the alarm REMOTE lamp This comes on when the system is in remote mode RUN la...

Страница 46: ...n of this system Page 5 3 Page 5 5 Menu screen 1 2 Allows setting screen selection Page 5 5 Setting screen Allows the setting of TEMP SP value Page 5 6 Mode Selection screen Allows communication mode...

Страница 47: ...f error occurs in this system Table 5 2 Model Indication Screen No Item Descriptions 1 System model 2 System revision No 5 3 2 Status screen 1 Figure 5 4 Status Screen 1 Table 5 3 Status Screen 1 No I...

Страница 48: ...fset 4 OFFSET The current offset mode Tips See Appendix 8 4 Offset Function in Chapter 8 on page 8 9 on offset features 1 5 3 4 Status screen 3 Figure 5 6 Status Screen 3 Table 5 5 Status Screen 3 No...

Страница 49: ...iping set flow becomes total of flow on customer side and flow on by pass 1 5 3 6 Menu screen Figure 5 8 Menu Screen Table 5 7 Menu Screen No Item Descriptions 1 SETTING Swicthes to the Setting screen...

Страница 50: ...ge 8 1 for setting range 2 5 3 8 Mode Selection screen Figure 5 10 Mode Selection Screen This screen enables the selection of the communication mode The procedures for system start stop and TEMP SP va...

Страница 51: ...HRX OM K003 Chapter 5 System Operation HRW Series 5 3 Operation Screen 5 7 5 3 9 Initial Setting screen 1 2 3 4 5 6 7 8 9 10 11 12 13 Figure 5 11 Initial Setting Screen...

Страница 52: ...fluid does not reach the set flow rate Lift this alarm if the selection is 0 7 FLOW UNIT LPM GPM Allows the selection of the unit of flow rate 8 PRESS UNIT MPa PSI Allows the selection of the unit of...

Страница 53: ...lity water solenoid valve is closed forcefully Tips Available only if a solenoid value optional is provided 5 3 11 Option screen Figure 5 13 Option Screen Table 5 12 Option Screen No Item Setting 1 CU...

Страница 54: ...And message The Alarm Display screen is displayed only if an error is raised See section 6 2 Troubleshooting in Chapter 6 Error Message and Troubleshooting for alarm numbers and messages 5 3 13 Inform...

Страница 55: ...Set Temperature from 25 0 C to 34 1 C 1 Press the SEL key to display the Menu screen 1 Figure 5 17 Menu Screen 1 2 With the use of the arrow keys move the cursor to 1 SETTING and press the ENT key The...

Страница 56: ...key Used to move the cursor to the right Tips To cancel a selection press the SEL key not ENT key With the press of the SEL key the cancellation takes effect and the screen is switched to the Menu sc...

Страница 57: ...L and press the ENT key The Mode Selection screen is displayed The name of the current mode flashes Figure 5 24 Mode Selection Screen DIO REMOTE 3 Use the arrow keys to select LOCAL Figure 5 25 Mode S...

Страница 58: ...the Menu screen 1 Figure 5 28 Menu Screen 1 2 With the use of the arrow keys move the cursor to 3 INITIAL SET and press the ENT key The Initial Setting screen 1 is displayed Figure 5 29 Initial Settin...

Страница 59: ...een 3 ALARM1 6 Press the ENT key OUT flashes again and the selection takes effect Figure 5 33 Initial Setting Screen 3 Setting Confirmation OUT Tips To cancel a selection press the SEL key not ENT key...

Страница 60: ...HRX OM K003 Chapter 5 System Operation 5 4 Examples of System Operation HRW Series 5 16...

Страница 61: ...he ALARM lamp comes on Alarm buzzer comes on The Alarm Display screen is displayed on the LCD screen Error signal is issued through external communication See section 8 1 2 Communication specification...

Страница 62: ...p The fluid is pooled at the base of this system Check for fluid leak 02 Incorrect Phase Error FLT Stop The power phase rotation is wrong Check that a proper connection is established between the powe...

Страница 63: ...em supplier for request of inspection and repair 22 Memory Data Error FLT Stop An error was detected in data stored in the controller of this system Reset your specified value 23 Communication Error W...

Страница 64: ...HRX OM K003 Chapter 6 Error Message and Troubleshooting 6 2 Troubleshooting HRW Series 6 4...

Страница 65: ...NH4 L Max 1 0 Max 0 1 Residual chlorine mgCl L Max 0 3 Max 0 3 Free carbon dioxide mgCO2 L Max 4 0 Max 4 0 Filtration m Max 5 According to the Water quality guideline for refrigeration air conditionin...

Страница 66: ...irm the reading on the LCD screen Temperature should be within setpoint Discharge pressure of circulating fluid Confirm the reading on the LCD screen Reading should not have deviated much from last in...

Страница 67: ...Facility water quality should fall within the standards specified Ventilation hole and electrical parts No particles and dust should be present 7 3 Storage The following should be performed for system...

Страница 68: ...Circulating Fluid Recovery Use the clean container for circulating fluid recovery Reuse of the recovered circulating fluid with contaminated will cause insufficient cooling and system failure Be sure...

Страница 69: ...neath the piping connections on the rear of this system A 3L capacity or bigger drain pan is required Figure 7 2 Plug Attachment Figure 7 3 Drain Pan Attachment Be sure to drain the facility water onl...

Страница 70: ...Parts Replacement of consumables listed in the following table is recommended Contact the system supplier for request of part replacement Table 7 4 Periodic Replacement Part List Part Recommended repl...

Страница 71: ...re MPa 0 3 to 0 7 45 to 100 PSIG Facility water port Rc 3 4 Power supply 3 phase 50 60Hz AC200 200 to 208V 10 Main breaker size A 30 Main breaker amperes interrupting capacity kA 50 Dimensions 6 mm W3...

Страница 72: ...ater port Rc 3 4 Power supply 3 phase 50 60Hz AC200 200 to 208V 10 Main breaker size A 30 Main breaker amperes interrupting capacity kA 50 Dimensions 6 mm W380 D665 H860 W14 96xD26 18xH33 86 inch Weig...

Страница 73: ...apacity kA 50 Dimensions 6 mm W380 D665 H860 W14 96xD26 18xH33 86 inch Weight HRW H2 HRW H2S 7 kg Approx 90 198 lbs Approx 95 209 lbs Communication Serial RS 485 Dsub 9pin Contact signal Dsub 25pin 1...

Страница 74: ...ance load inductive load When using power source of your system AC DC 800mA resistance load inductive load Alarm signal Rated load voltage Max AC48V Max DC30V Max load current AC DC 800mA resistance l...

Страница 75: ...tion 8 5 Serial RS 485 Table 8 5 Serial RS 485 Item Specification Connector No P2 Connector type this system D sub9P female connector Standard EIA RS485 Protocol Modicon Modbus Circuit block diagram I...

Страница 76: ...igh Temp WRN 10 Alarm11 Reservoir High Temp WRN 11 Alarm12 Return Low Flow FLT 12 Alarm13 Return Low Flow WRN 13 Alarm14 Heater Breaker Trip FLT 14 Alarm15 Pump Breaker Trip FLT 15 Alarm17 Interlock F...

Страница 77: ...HRX OM K003 Chapter 8 Appendix HRW Series 8 2 Outer Dimensions 8 7 8 2 Outer Dimensions Figure 8 1 Outer Dimensions Top Left side Back Front...

Страница 78: ...et Rc3 4 Circulating fluid return Rc3 4 Circulating fluid bypass pipe Main tank Figure 8 2 Flow Chart Part 1 8 3 2 Part 2 HRW008 H HS HRW008 H1 H1S HRW008 H2 H2S HRW015 H HS HRW015 H1 H1S HRW015 H2 H2...

Страница 79: ...the discharge temperature of the circulating fluid E g TEMP SP value 20 C OFFSET value 2 C Circulating fluid discharge temp 22 C TEMP PV 22 C When MODE2 is selected This mode is used to exercise tempe...

Страница 80: ...ET value with OFFSET value set at 1 C Once the discharge temperature of the circulating fluid becomes 31 C 1 C thermal dissipation is assured to allow the circulating fluid in your system to be 30 C T...

Страница 81: ...l dissipation is assured to allow the circulating fluid in your system to be 30 C TEMP SP value is obtained for your system TEMP PV and communication data also express 30 C circulating fluid discharge...

Страница 82: ...f the BAND and REDY TIME Allows the setting of the communication output Figure 8 8 BAND READY function Examples of Setting TEMP SP 20 C BAND 2 C READY TIME 60sec TEMP READY is displayed on the operati...

Страница 83: ...o secure this system Figure 8 9 Anchor Bolt Mounting Position Anti seismic bracket optional Anchor bolt 4 14 Top Anti seismic bracket is an optional accessory which is required for the installation of...

Страница 84: ...14 8 7 Compliance This system conforms to the following standards Table 8 7 Compliance CE Marking EMC Directive 2004 108 EC Low Voltage Directive 2006 95 EC Machinery Directive 2006 42 EC SEMATECH S2...

Страница 85: ...oo se n e ss IN p re ss Flowra te Temp Operati ng c ondi tion Error Circ ulati ng fluid flowrate Circ ulati ng fl ui d outl et pres s Circ ulati ng fluid temp Fl ui d Lev el Cooling water Circulating...

Страница 86: ......

Страница 87: ...al 9 Troubles or damages that are not compliant with the 5 Warranty preconditions 4 Escape clause 1 Expenses of daily inspection and periodic inspection 2 Expenses of repair consigned with neither SMC...

Страница 88: ...101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any obligation on the part of the manufacturer 2018 SM...

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