SIGMAKOKI HIT-M, Руководство пользователя

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Point of view about INPOSITION range
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In the conition of closed loop control, a positioning of stage is completed when a reading of scale reaches inside a
range of INPOS. And Setting value of 1~99 is based on 1 pulse resolution from glass scale.
*) Regarding to Scale resolution, it depends on each stage, so please refer to sensor resolution in each stage.
<Example>
In case of sensor resolution 0.01 µ m
Setting Value=1: INPOS range is 1×±0.01 µ m=±0.01 µ m
Setting Value=99: INPOS range is 99×±0.01 µ m=±0.99 µ m
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～
24) RES_UNIT 0
～
7: Scale setting
Set Scale resolution and direction.
[Setting Range] -30000
～
30000
：
- input is reverse direction. Unit is nm.
Reference:
Stage RES_UNIT
OSMS(CS)20 500
OSMS(CS)26 500
OSMS(CS)33 500
HST(GS)-50 50
HST(GS)-100 50
HST(GS)-200 50