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SQC-122c
Thin Film Deposition Controller

User’s Guide

Version 2.0

Sigma

instruments

Содержание SQC-122c

Страница 1: ...SQC 122c Thin Film Deposition Controller User s Guide Version 2 0 Copyright Sigma Instruments Inc 1999 2002 Sigma instruments...

Страница 2: ...Safety Symbols WARNING Calls attention to a procedure practice or condition that could possibly cause bodily injury or death CAUTION Calls attention to a procedure practice or condition that could pos...

Страница 3: ...materials or workmanship are not covered by this warranty NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICU...

Страница 4: ...Definitions 2 1 2 2 Defining a Film 2 1 2 3 Defining a Process 2 5 2 4 Sensor Setup 2 7 2 5 Source Setup 2 10 2 6 Running a Process 2 11 2 7 Loop Tuning 2 15 2 8 Troubleshooting 2 17 Chapter 3 Menus 3...

Страница 5: ...Appendix A Material Parameters B Specifications C I O Connections D Handheld Remote Controller E Declaration of Conformity...

Страница 6: ...his chapter will aid you in the initial setup and operation of your system Please review the entire manual for detailed operational programming and safety information 1 1 Thin Film Process Overview Th...

Страница 7: ...setup menus The functions of the SoftKeys change to adapt to different operations and are displayed on the left of the screen Control Knob Used to adjust values and select menu items Pushing the cont...

Страница 8: ...control input I O 1 8 Connects 8 relays and 8 digital inputs to external equipment for process control See Appendix C for connections RS 232 Connects to computer for programming and data acquisition S...

Страница 9: ...rough Provides isolation between vacuum and atmosphere for electrical and cooling lines 6 BNC Cable Provides a flexible connection from the feedthrough to the oscillator Keep this cable as short as po...

Страница 10: ...wer Connection The SQC 122c automatically detects mains voltages of 100 120 and 200 240VAC 50 60Hz WARNING Verify that the power cable provided is connected to a properly grounded mains receptacle Sen...

Страница 11: ...Quick Setup SoftKey to view the quick setup parameters for the current process If no Quick Setup option is visible no processes are defined in the SQC 122c In that case press Film Menu then scroll th...

Страница 12: ...r In Edit mode adjust the control knob to set the desired parameter value Edit Layer 1 Spend some time navigating through the Quick Setup parameters and editing values When you are comfortable be sure...

Страница 13: ...ss Next Menu until the Switch Displays option is shown Press Switch Displays to display Sensor 1 and Sensor 2 in the lower status section of the screen At least one sensor should be ON and display a l...

Страница 14: ...Chapter 1 Quick Start 1 9 This page left blank for your notes...

Страница 15: ...sition and post conditioning variables necessary to accurately deposit the material Because the film definition does not include rate and thickness information a film can be used in several different...

Страница 16: ...he Density and Z Factor for the selected material now but it is unlikely those values are wrong To add a material name that is not listed you must use the SQC 122c setup software Once the material is...

Страница 17: ...ramp power to a level appropriate for wire feeding new material Refer to the Thin Film Process Overview in Chapter 1 for an illustration of pre and post conditioning Ramp1 Time Ramp2 Power Ramp2 Time...

Страница 18: ...tter and go to the Deposit phase Capture will override the shutter delay if accuracy is reached Set Shutter Delay and Capture to zero to disable this feature If the SQC 122c is unable to maintain the...

Страница 19: ...names Press Select then Edit to display the sequence of layers and films that comprise the selected process To add a layer scroll to the desired location in the layer sequence and press Insert Layer S...

Страница 20: ...Start mode allows you to have this layer start immediately on completion of the previous layer Auto mode Manual mode waits for a user signal via the front panel RS 232 or digital input to start the l...

Страница 21: ...uency of a new crystal typically 6 0e 06 Hz 6 MHz Due to manufacturing tolerances some crystals may oscillate above 6MHz initially which would be detected as a sensor error Setting the Max Frequency s...

Страница 22: ...ckness of 1 000 kA But suppose the actual substrate is deposited to 1 100 kA thickness as determined by some other means such as a stylus profilometer Then the tooling for this sensor would be 1 100 1...

Страница 23: ...the value should be near 100 If the Life is 0 00 or jumps around check your cabling and the installation of the sensor in its holder Sigma supplies a small 5 5MHz test crystal adapter with each oscil...

Страница 24: ...he supply connected to Output 1 set Scale 1 to the control voltage that corresponds to 100 output on the source supply The SQC 122c uses 0 volts as 0 output and the programmed value as 100 output Scal...

Страница 25: ...o highlight the desired process If the third SoftKey shows Edit when a process is highlighted then it is already the current process Otherwise press Select to set the highlighted process as the curren...

Страница 26: ...nt panel control knob In Manual Mode you will usually display the Rate Graph then manually adjust the output power to achieve the desired deposition rate It is easy to exceed a layer s Final Thickness...

Страница 27: ...HASE Soak 2 100 0 50 0 0 0 0 0 25 0 50 0 Power vs Time Next Menu Zero Auto Manual Stop Layer Abort 12 5 37 5 Preconditioning When Start is pushed the process starts with the first layer preconditionin...

Страница 28: ...pletely aborts the process You can only restart the process at Layer 1 Spend some time in Simulate mode verifying that the process sequences through each phase of each layer as expected If not use the...

Страница 29: ...t agree check your wiring and process setup In particular verify that the System Parameters output scale agrees with your power supply input specifications Determine Open Loop Gain Slowly adjust the...

Страница 30: ...ontrolled You don t need to totally eliminate ringing during the step if the steady state response is smooth preconditioning will minimize step changes Set Preconditioning The power level you recorded...

Страница 31: ...crystals exceed 6MHz when new Setting Frequency Max to 6 1 Hz will correct that problem with no bearing on instrument accuracy Press Film Menu Edit and assure that the proper sensors are enabled Press...

Страница 32: ...cause consistently low or high rate thickness values for every material Once the Xtal Tooling is set set Film Tooling in the Film Menu to 100 unless you are certain that another value is needed for a...

Страница 33: ...Chapter 2 Operation 2 19 This page left blank for your notes...

Страница 34: ...justed parameters for the current process and layer Process Menu A process is a sequence of layers of deposited film s Each layer in a process has a specific film final thickness and deposition rate s...

Страница 35: ...values are always displayed along the top of the screen The graph displays either Rate Rate Deviation or output Power The next section of the manual describes graph selection The status bar below the...

Страница 36: ...cesses System Params Sets system wide operating parameters Also used to map the 8 digital inputs and 8 relays to process functions Start Layer Each layer in a process can be defined as auto start or m...

Страница 37: ...raphs Switch Displays Toggles between data display options at the bottom of the SQC 122c screen Note the differences between the screens above and the Main Menu screen in the previous section Sensor I...

Страница 38: ...cess 8 7 My Process 7 6 My Process 6 5 My Process 5 4 My Process 4 3 My Process 3 2 My Process 2 1 My Process 1 Fnl Thk I Term D Term Sensor 1 Sensor 2 Output Max Power Slew Rate Material Copper 10 0...

Страница 39: ...turned on or off If the four sensor option card is installed Sensor 3 to 6 are also visible Output Selects the control voltage output that is active for the selected layer Max Power The maximum output...

Страница 40: ...Select Edit Select sets the highlighted process as the current process Edit displays the Layer Select Menu for the current process Delete Deletes the highlighted process and all of its layers Control...

Страница 41: ...process or Copied to the clipboard The layer on the clipboard can then be Pasted anywhere in the list of layers Insert Layer Shows the list of 25 films Select a film then press Enter to insert the fil...

Страница 42: ...ain Prev Menu Edit THICKNESS kA 0 000 POWER 0 0 My Process 2 Layer 2 AluminumOxide Parameter Value Units Init Rate 9 9 A s Time Setpoint 0 00 00 h mm ss Exit to Main Returns to the Main Menu Prev Menu...

Страница 43: ...Manual start is selected the previous layer ends at its idle power and waits for the user to push the Start button Ramp 1 During the deposition of a layer it may be desirable to change the deposition...

Страница 44: ...ATE A s 0 0 POWER 0 0 10 Film 10 9 Film 9 8 Film 8 7 Film 7 6 Film 6 5 Film 5 4 Film 4 3 Film 3 2 Film 2 1 Film 1 Main Screen Returns to the Main Menu Prev Menu Steps back through the film menus Film...

Страница 45: ...ameter Value Units P Term 50 None D Term 0 0 Sec Film Tooling 100 Exit to Main Returns to the Main Menu Prev Menu Returns to the Film Select Menu Edit Selects the highlighted parameter for edit SoftKe...

Страница 46: ...rameter Enter Stop editing and save values for selected parameter Control Knob Turn to adjust value Push to store value and move to next parameter Control Knob Scrolls through the list of film conditi...

Страница 47: ...and undo changes to selected parameter Enter Stop editing and save values for selected parameter Control Knob Turn to adjust value Push to store value and move to next parameter Control Knob Scrolls...

Страница 48: ...pletes or is aborted The next process run will return to Sensor 1 Film Tooling Compensates for sensor sensitivity to the selected material Use Xtal Tooling in the System Params menu to compensate for...

Страница 49: ...er is selected the instrument uses the last valid rate thickness and power readings to calculate the time required to reach final thickness The power is fixed at the last valid reading and deposition...

Страница 50: ...utter delay Control Error If the control loop cannot maintain the desired deposition rate due to loss of source material excess rate ramps or equipment malfunction a control error occurs The error con...

Страница 51: ...rams Menu I O Setup Exit to Main Edit THICKNESS kA 0 000 POWER 0 0 My Process 1 Layer 1 Aluminum Parameter Value Units Period 25 Sec Xtal Tool 1 100 Volts Exit to Main Returns to the Main Menu Edit Se...

Страница 52: ...simulates the quartz crystals based on the crystal frequencies set on this Simulate mode is useful for debugging process recipes Min Max Frequency The frequency values for the quartz crystal sensors...

Страница 53: ...Menu can be used to select a process but a password is required to make any changes on the Process Menu Password If password is enabled this parameter sets the sequence of SoftKeys to press to enter m...

Страница 54: ...Input 6 None Input 7 None Input 8 None Relay 1 None Relay 2 None Relay 3 None Exit to Main Returns to the Main Menu Prev Menu Returns to the System Parameters Menu Edit Selects the highlighted paramet...

Страница 55: ...cess is running not stopped Stopped Process is stopped not running Manual Mode Process is in Manual mode not under PID control Max Power Active output is at maximum power out of material Time Setpoint...

Страница 56: ...Chapter 3 Menus 3 23 This page left blank for your notes...

Страница 57: ...nt the ear then remove the rack mount ear Assemble the Extender Assemble the extender box using the eight 6 32 flat head screws two end panels and two main panels Thread two socket head captive panel...

Страница 58: ...87 Cobalt 8 71 0 343 Silver 10 5 0 529 Copper 8 93 0 437 Silver Bromide 6 47 1 18 Copper Sulfide 4 6 0 82 Silver Chloride 5 56 1 32 Copper Sulfide B 5 8 0 67 Sodium 0 97 4 8 Copper Sulfide A 5 6 0 69...

Страница 59: ...8 User Programmed See Chapter 3 5VDC non isolated 8 User Programmed See Chapter 3 30Vrms or 30VDC 2A maximum General Specifications Mains Power Supply Power Consumption Operating Transportation Envir...

Страница 60: ...is a Material plus these values Material 100 stored Density 0 40 to 99 99 gm cm3 Z Factor 0 100 to 9 900 P Term 1 to 9999 I Term 0 to 99 9 sec D Term 0 to 99 9 sec Sensor 1 2 On Off Output 1 or 2 Poc...

Страница 61: ...ust be limited to between 0 and 5 volts with respect to Ground WARNING Output relays are rated for 30Vrms or 30VDC at 2A maximum Proper fusing and adequate wiring insulation and separation should be p...

Страница 62: ...endix A Y adapter cable can be used to provide compatibility with older non color models of the SQC 122 as shown below Contact Sigma for information on purchasing this adapter or other custom I O cabl...

Страница 63: ...ller to the Remote jack on the SQC 122c front panel Select a Process using the SQC 122c front panel SoftKeys Press Next Menu until the Auto Manual SoftKey is displayed Press Auto Manual to change to M...

Страница 64: ...lectromagnetic Compatibility Directive uses the following standards EN 61010 1 Safety of Electrical Equipment for Measurement Control and Laboratory Use EN 50081 2 Generic Standard for Emissions EN 55...

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