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SHIMADZU CORPORATION. Internatinal Marketing Division

3. Kanda-Nishikicho 1-chome, Chiyoda-ku, Tokyo 101-8448, Japan
Phone:81(3)3219-5641 Fax:81(3)3219-5710

SHIMADZU PRECISION INSTRUMENTS, INC.

Santa Clara Office Vacuum Technology Group

2350 Walsh Avenue, Santa Clara, CA95051, U.S.A.
Phone:1(408)566-0960 Fax:1(408)566-0961

KRATOS ANALYTICAL LTD.

Wharfside, Trafford Wharf Road, Manchester M17 1GP U.K.
Phone:44(161)888-4400 Fax:44(161)888-4402

SHIMADZU (ASIA PACIFIC) PTE LTD.

16 Science Park Drive #01-01 The Pasteur Singapore Science Park, Singapore 118227,
Republic of Singapore
Phone:65-778-6280 Fax:65-779-2935

SHIMADZU INTERNATIONAL TRADING (SHANGHAI) Co., LTD.

Floor, Shanghai Xin-Hualian Building No.755 Huaihai Zhong Lu, Shanghai 200020

Phone:86(21)6472-8442 Fax:86(21)6472-8648

Содержание TMP-3203LM

Страница 1: ...r future reference Semiconductor Equipment Division Magnetically Levitated Turbo Molecular Pump Model TMP 3203M Air cooled type Model TMP 3203MC Air cooled chemical type Model TMP 3203LM Wide range ty...

Страница 2: ...pyrights and Disclaimers This document is copyrighted by Shimadzu Corporation Please refrain from reproducing or copying part or all of this document without permission from Shimadzu In an effort to i...

Страница 3: ...mpair safety of the pump proper WARNING Decisions on system compatibility should be made by the system designer or the person deciding the specifications after conducting tests as necessary The respon...

Страница 4: ...own torque should be generated when abnormality occurs in the pump by any chance Incidental accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by insufficient meth...

Страница 5: ...1 This turbo molecular pump is not approved for use in applications exhausting process gas containing gallium Ga e g triethyl gallium etc 2 Protect the pump from any and all types of impact during op...

Страница 6: ...ng to 5 1 2 Installation of the Pump 3 SECURITY seal This label certificates that the product was made or maintenanced by Shimadzu or by Shimadzu authorized facility In case this label is removed or t...

Страница 7: ...l cables to be in tension or to have very tight bending radii 3 Do not twist the turbo molecular pump control cable during connection Part Replacement The lifetime of parts are specified as below The...

Страница 8: ...material and or workmanship Shimadzu will at its discretion either repair it or exchange it with a new one for free Scope of the warranty The warranty covers only TMPs controllers and accessories sold...

Страница 9: ...lease contact Shimadzu for proper disposal of its products or parts There is a possibility to pollute the environment with the material of the parts when you dispose this product in an inap propriate...

Страница 10: ...period vii Conditional warranty vii Scope of the warranty vii Warranty of repaired or replacement parts vii Exemption from the warranty vii Disposal of Products and Parts viii LIMITATION OF LIABILITY...

Страница 11: ...ion 18 5 1 1 Pump Mounting Direction 18 5 1 2 Installation of the Pump 19 5 1 2 1 Installation of series of TMP 3203 21 5 1 2 2 Installation of TMP 3403LMC 23 5 1 3 Example of piping connection 24 5 1...

Страница 12: ...URGE Section 8 TURBO MOLECULAR PUMP RECONDITION 8 1 Turbo Molecular Pump Return Request 40 8 2 Turbo Molecular Pump Decontamination 41 8 3 Touch Down Bearing Replacement 41 8 4 Check of the rotor blad...

Страница 13: ...Table of contents xii 263 13236 This page is intentionally left blank...

Страница 14: ...UTLINE AND DESCRIPTIONS 1 1 Outline 1 2 Descriptions 1 2 1 Outside drawing of Pump Main Unit 1 2 1 1 Outside drawing of series of TMP 3203 1 2 1 2 Outside drawing of TMP 3403LMC 1 2 2 Standard Accesso...

Страница 15: ...ctor equipments Industrial equipments R D applications The other ultra high vacuum applications The turbo molecular pump one standard set consists of the following items Pump 1 Power Supply Unit 1 Con...

Страница 16: ...and TMP 3203MC INLET FLANGE Parts number A B C E F G H J n d TMP 3203M TMP 3203MC VG350 P N 262 78430 62 P N 262 78430 72 287 294 289 375 420 22 450 420 12 15 ISO320B Special P N 262 78430 63 P N 262...

Страница 17: ...3203LMC VG350 P N 262 78430 42 P N 262 78430 52 287 294 289 270 375 420 22 450 420 12 15 ISO320B Special P N 262 78430 43 P N 262 78430 53 287 294 289 270 375 420 22 5 425 395 12 13 VG300 P N 262 7843...

Страница 18: ...MP 3403LMC INLET FLANGE Parts number A B C D E F G K H n d VG350 P N 262 78503 52 287 294 270 375 420 22 450 360 420 12 15 ISO320B Special P N 262 78503 53 287 294 270 375 420 22 5 425 360 395 12 13 V...

Страница 19: ...ad M12 40 12PC 12 9 VG250 Stud Bolt M12 47 12PC 12 9 3 Centering with O ring 1 KF40 035 06004 14 4 Clamp 1 KF40 035 06004 03 5 Instruction manual 1 English 263 13236 Description Q ty Notes Parts numbe...

Страница 20: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit...

Страница 21: ...pecial VG30 VG250 are also available 2 PORT FOR GAS PURGE Gas purge adaptor port see Section 7 GAS PURGE 3 OUTLET FLANGE Outlet flange connect a backing vacuum pump or its related pipe connection KF40...

Страница 22: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping...

Страница 23: ...between the axial magnetic bearings Each magnetic bearing is provided with a gap sensor 10 to detect the rotor position Fig 3 2 illustrates the outline of 5 axes control The rotor is levitated by the...

Страница 24: ...3 Fig 3 1 Pump Sectional Drawing 1 High frequency motor 6 Spacer 11 Inlet flange 2 Receptacle 7 Radial magnetic bearing 12 Outlet flange 3 Drive shaft 8 Axial magnetic bearing 13 Protective net 4 Rot...

Страница 25: ...olecular pump by controlling the following 5 degrees of freedom excluding the rotational degree Z axis of freedom Fig 3 2 Outline of 5 Axes Control X2 Z X1 Y1 Y2 5 axes control X Y Z rotational axis P...

Страница 26: ...4 4SPECIFICATIONS 4 1 Pump Main Unit 4 1 1 Specification of series of TMP 3203 4 1 2 Specification of TMP 3403LMC 4 2 Standards Fulfilled...

Страница 27: ...a order 10 9 Pa order 10 8 Pa order Maximum Argon gas through put Note 2 250 mL min 400 mL min 1200 mL min 2200 mL min Maximum allowable inlet pressure Nitrogen gas 0 4 Pa 40 Pa Maximum allowable outl...

Страница 28: ...e 1 2200 mL min Maximum allowable inlet pressure Nitrogen gas 10 Pa Maximum allowable outlet pressure 270 Pa Pumping speed N2 Note 2 He H2 3300 L s 3100 L s 2400 L s Compression ratio N2 He H2 1 109 1...

Страница 29: ...SECTION 4 SPECIFICATIONS 16 263 13236 4 4 2 Standards Fulfilled Safety EN61010 1 2001 UL61010A 1 SEMI S2 EN1012 2 1996 EMC EN61326 1 1997 A1 1998 A2 2001 class A EN61000 3 2 1995 A14 2000 SEMI F47...

Страница 30: ...1 2 Installation of the Pump 5 1 2 1 Installation of series of TMP 3203 5 1 2 2 Installation of TMP 3403LMC 5 1 3 Example of piping connection 5 1 4 Center of gravity of the pump 5 2 Connection of th...

Страница 31: ...cally when installing the pump horizontally and obliquely When an installation direction is non appropriate reliability of operation may deteriorate Refer to Fig 5 1 Fig 5 1 Mounting Direction of Magn...

Страница 32: ...s inevitably exposed to significant vibration and impact 2 Unstable place 3 Place where the pump is inevitably exposed to magnetic field and radioactive ray The pump proper is a precision machine Be c...

Страница 33: ...pump does not move or fall down during installation or storage CAUTION The casters provided with the pump are only auxiliary equipment for installation and storage Use a trolley etc for long distance...

Страница 34: ...lt Note The special washers are attached to the inlet flange of TMP when shipping Do not remove them at the time of TMP installation Refer to Fig 5 4 for the details of the bolt attaching part Descrip...

Страница 35: ...d using the special washer Table 5 2 Tightening torque of the fixing bolt Size of bolt Tightening torque N m M12 16 26 M16 41 66 Special washer Inlet flange Bolt hole Inlet flange Special washer Sprin...

Страница 36: ...nded fixing bolt Note The special washers are attached to the inlet flange of TMP when shipping Do not remove them at the time of TMP installation Refer to Fig 5 4 for the details of the bolt attachin...

Страница 37: ...are not attached to this turbo molecular pump set Fig 5 6 Example of Exhaust Line When gas purge required connect the gas purge pipeline to the gas purge port For the gas purge detail see Section 7 G...

Страница 38: ...ile also holding the nozzle of the pump with a spanner in order to avoid deforming the cooling water pipe as illustrated in Fig 5 7 Fig 5 7 Cooling Water Piping Connection 5 1 4 Center of gravity of t...

Страница 39: ...of the connector pins After the insertion turn the cable connector clockwise until the rotation lock clicks CAUTION Don t disconnect each cable while the pump is running Particularly before disconnec...

Страница 40: ...tted don t cut off the power supply while ROTATION signal is being emitted Even when ALARM lamp lights don t cut off the power supply while ROTATION lamp lighting 3 If ALARM signal is emitted or ALARM...

Страница 41: ...SECTION 5 INSTALLATION 28 263 13236 5 This page is intentionally left blank...

Страница 42: ...6 6OPERATION 6 1 Outline 6 1 1 Introduction 6 2 Start up Preparation 6 2 1 Start up Preparation 6 3 Start up 6 3 1 Start up Sequence 6 4 Shutting Down 6 5 Baking Operation...

Страница 43: ...pump is running The touch down bearing may need to be replaced if the power is turned off repeatedly during operation If the power is turned off during rotation power from regenerative braking will k...

Страница 44: ...ck if the POWER lamp lights And the rotor of the turbo molecular pump is levitated by the magnetic bearing 3 Evacuate the turbo molecular pump by using a backing vacuum pump 4 Start up preparation is...

Страница 45: ...mber close the valve too 2 When purge gas is being fed into the turbo molecular pump stop the gas feed too 3 When forevacuum valve is provided between the turbo molecular pump and backing vacuum pump...

Страница 46: ...urbo Molecular Pump INSTRUCTION MANUAL 6 REFERENCE ROTATION lamp goes out or ROTATION signal turns off when the pump rotational speed is 60rpm or less Turning off the POWER switch permits the pump rot...

Страница 47: ...ump is 1x10 3 Pa or less It is necessary to apply baking to not only the vacuum chamber but also the pump proper in order to keep an exhausting vessel at super high vacuum However the baking temperatu...

Страница 48: ...7 7GAS PURGE...

Страница 49: ...shows the KF10 joint but the method of recognizing the orifice is the same for all joints Without orifice With orifice Fig 7 1 How to Recognize if the Gas purge Adaptor Incorporates an Orifice Fig 7...

Страница 50: ...se clogging Fig 7 3 Gas Purge Method diameter of orifice is 0 05mm Table 7 2 Table of Gas purge Ports diameter of orifice is 0 05mm Gas supply 20 10 kPa gauge pressure nitrogen gas Gas feed start Afte...

Страница 51: ...SECTION 7 GAS PURGE 38 263 13236 7 This page is intentionally left blank...

Страница 52: ...8 8TURBO MOLECULAR PUMP RECONDITION 8 1 Turbo Molecular Pump Return Request 8 2 Turbo Molecular Pump Decontamination 8 3 Touch Down Bearing Replacement 8 4 Check of the rotor blades...

Страница 53: ...r pump to Shimadzu or an approved service company for all service related requests 1 The turbo molecular pump must be void of all process gases Turbo molecular pumps that were operated in applications...

Страница 54: ...r and bigger rotational resistance and require replacement of touch down bearings Shimadzu recommends replacement of the touch down bearing by Shimadzu or an approved service company 8 4 Check of the...

Страница 55: ...SECTION 8 TURBO MOLECULAR PUMP RECONDITION 42 263 13236 8 This page is intentionally left blank...

Страница 56: ...9 9TROUBLESHOOTING 9 1 Vacuum Pressure Rise 9 2 Abnormal Noise and or Vibration...

Страница 57: ...molecular pump ever generate abnormal noise and or vibration the turbo molecular pump operation is to be stopped immediately But there is possible that a race of touch down bearing Fig 3 1 9 may make...

Страница 58: ...cuum pump 8 14 15 24 C CE MARKING 16 Cooling fan vi vii cooling water 8 25 corrosive gas 41 G gap sensor 10 gas purge 14 15 36 37 I inlet flange 8 11 O outlet flange 8 11 overhaul 40 P port for gas pu...

Страница 59: ...Index Index 2 263 13236 Magnetically Levitated Turbo Molecular Pump INSTRUCTION MANUAL This page is intentionally left blank...

Страница 60: ...1996 Low Voltage directive 73 23 EEC amended by 93 68 EEC EN61010 1 1993 A2 1995 EN61010 1 2001 EMC directive 89 336 EEC amended by 91 263 EEC 92 31 EEC 93 68 EEC 93 97 EEC EN61326 1997 A1 1998 A2 20...

Страница 61: ...t removed Type of attraction material Please fill out the etched material in etch system equipment GaAs substrate etc Please fill out the material of target in PVD system equipment sputter vacuum evap...

Страница 62: ...08 566 0960 Fax 1 408 566 0961 KRATOS ANALYTICAL LTD Wharfside Trafford Wharf Road Manchester M17 1GP U K Phone 44 161 888 4400 Fax 44 161 888 4402 SHIMADZU ASIA PACIFIC PTE LTD 16 Science Park Drive...

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