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SECTION 1
OUTLINE AND DESCRIPTIONS
4
263-13236
1
Fig.1-2
TMP-3203LM and TMP-3203LMC
INLET
FLANGE
Parts number
A
B
C
D
E
F
G
φ
H
φ
J
n-
φ
d
TMP-3203LM
TMP-3203LMC
VG350
P/N 262-78430-42 P/N 262-78430-52 287 294 289 270 375 420
22
φ
450
φ
420 12-
φ
15
ISO320B
Special
P/N 262-78430-43 P/N 262-78430-53 287 294 289 270 375 420 22.5
φ
425
φ
395 12-
φ
13
VG300
P/N 262-78430-47 P/N 262-78430-57 307 314 309 290 375 440 18.5
φ
400
φ
370 12-
φ
13
VG250
P/N 262-78430-48 P/N 262-78430-58 331 338 333 314 419 464 18.5
φ
350
φ
320 12-
φ
13
Содержание TMP-3203LM
Страница 13: ...Table of contents xii 263 13236 This page is intentionally left blank...
Страница 20: ...2 2IDENTIFICATION AND FUNCTION 2 1 Pump Main Unit...
Страница 22: ...3 3CONSTRUCTION AND PRINCIPLE 3 1 Pump Construction 3 2 Principle of Turbo Molecular Pumping...
Страница 41: ...SECTION 5 INSTALLATION 28 263 13236 5 This page is intentionally left blank...
Страница 48: ...7 7GAS PURGE...
Страница 51: ...SECTION 7 GAS PURGE 38 263 13236 7 This page is intentionally left blank...
Страница 55: ...SECTION 8 TURBO MOLECULAR PUMP RECONDITION 42 263 13236 8 This page is intentionally left blank...
Страница 56: ...9 9TROUBLESHOOTING 9 1 Vacuum Pressure Rise 9 2 Abnormal Noise and or Vibration...