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REV.1.0

PC100-D PC

User

’

s Manual

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Содержание PC100-D PC

Страница 1: ...REV 1 0 PC100 D PC User s Manual 2 0 2 0 0 9...

Страница 2: ...STALLATION 5 2 Troubleshooting 17 2 1 General 7 SECTION 6 WARRANTY AND SERVICES 2 2 Unpacking 7 6 1 Guarantee of Sevenstar 18 2 3 Mechanical Installation 7 6 2 Product Warranty 18 2 3 1 General 7 6 3...

Страница 3: ...ate store and distribute any part of this manual in mean of electric mechanical photocopy recording or other way without permission of Sevenstar This manual is not assured that there is no mistake and...

Страница 4: ...out any authorized and make sure that the label or and seal of product is not removed when returning for reworking recalibration and maintenance b Please contact professional for technical service Do...

Страница 5: ...ose valve completely to make sure that there is not error flow 1 4 General Pressure controller PC accurately measures and controls mass flow rates which is widely applied in the fields as semiconducto...

Страница 6: ...gital monitoring PC100 D series have wide range of power supply available for 15 24VDC Customer Secondary Development of control and sample software is available through the open protocol PC100 D PC d...

Страница 7: ...10 to 50 Mechanical interface 1 4 Compression Fitting 1 4VCR M Valve Type Normally Closed Leak Integrity External 1 x 10 10 scc sec He Leak Integrity Through closed valve 1 0 of orifice Full Scale Ni...

Страница 8: ...centimeter per minute SLM standard liter per minute Standard state Temperature 0 C 273 15K Pressure 101325Pa 760mmHg At standard state the gas density will be constant The multiplication of density an...

Страница 9: ...de is common plastic bag the inside is clean bag The outside bag should be removed in the entrance to the clean room In order to minimize the contamination the second clean bag should be removed in th...

Страница 10: ...8 of 22 Figure 2 1 PC100 D...

Страница 11: ...9 of 22 Figure 2 2 Product with Compression Fitting1 4 imensions...

Страница 12: ...Product with VCR1 4 M dimensions Attention The height which is showing in figure 2 2 and figure 2 3 of 138 2 mm without electric connectors of cable It should be added around 50mm more after adding th...

Страница 13: ...finger tight Scribe both nut and body in order to mark the position of the nut While holding the body with a wrench tighten the nut 1 8 turn past finger tight for 316L stainless steel and nickel gaske...

Страница 14: ...ut Please note you should use two spanners to operating one spanner for locking the fitting stable and another one for revolving the nut Especially when you dismantle the tube you should operate by th...

Страница 15: ...13 of 22 2 4 2 Connections The 9 pin male Sub D connector RB and RM are shown in figure2 7 Figure 2 7 9 pin male D sub connector...

Страница 16: ...uld be completed 2 5 1 Check that tubing is leak free 2 5 2 Check the process sequence and proper function of all other gas components involved 2 5 3 Check the voltage of command signals and power sup...

Страница 17: ...he PC in digital or analog mode For more information please refer to www mfcsevenstar cn Path Service Downloads Software download Communication Protocol 3 3 Valve Type The type of PC100 D valve is Nor...

Страница 18: ...ust liquid and oil stain If necessary the filter should be added to gas system for purification If the outlet of PC is connected to liquid sources a One way valve should be added to avoid the liquid b...

Страница 19: ...essure incorrect Check pressure condition Wrong control mode Change the control mode by the software Power failure Check Power and pin position Setpoint incorrect Check setpoint signal Contamination C...

Страница 20: ...products are guaranteed against defects in materials and workmanship if used in accordance with specifications and not subject to physical damage contamination alteration or retrofit Warranty periods...

Страница 21: ...ure must never exceed 3MPa C Electrical connection requirements are as follows The system must be wired carefully non observance of the pin out may irreversibly damage the electronic board inside the...

Страница 22: ...on and unreasonable usage 3 Operating and storing in inappropriate or execrable circumstance 4 Usage of instrument beyond user s manual 5 Unauthorized change or replacement of product For example It i...

Страница 23: ...Torr 1200M 1200mbar 0000X customized pressure please consult d for details e Control Modes U up a a Electronic connector RB DB9 B model RS485 anolog RM DB9 M model RS485 anolog f f Fittings CC Compres...

Страница 24: ...of Valve Normally closed Orifice Full Scale 2SLM Pressure Full Scale 1200mbar Control Modes up Electronic connector DB9 B model RS485 anolog Fittings Compression Fitting 1 4 Seal Materials Metal For...

Страница 25: ...o 368 Zhangjiang Road Pudong New District Shanghai Tel 86 21 63532370 Fax 86 21 63533265 Shenzhen Office Room 202 Section B No 1 Chuangjin No 125 Chuangye Erlu 28th Section Baoan District Shenzhen Zip...

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