SENSIRION SFC53 Series Скачать руководство пользователя страница 3

 

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Version 1.0 

 Aug 2022 

 

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Copyright © Sensirion AG 2022.  

 

1.

 

How to choose your Mass Flow Controller (Mass Flow Meter) 

Sensirion offers several families of Mass Flow Controllers and Meters.  

 

SFC5500 (SFM5500) is ideal for first testing and projects with yearly volumes up to 50 pieces. It is available in fixed 
configurations  with  pre-configured  multiple  gas  calibrations,  different  flow  ranges,  exchangeable  fittings  and 
available via distribution. 

 

SFC54xx (SFM54xx) family is a make-to-order product and offers the highest configurability (flow rates, fluidic 
connectors, and communication interfaces), and suitable for projects of various sizes. 

 

SFC53xx (SFM53xx) 

product family are Sensirion’s 

OEM Mass Flow Controllers (Mass Flow Meters) best suited for 

projects with yearly volumes above 50 pieces. 

To help you choose the right Mass Flow Controller, a 

“S

election guide

 is available on the Sensirion website.  Please see 

“Useful resources” section below.

 

2.

 

How to operate your Mass Flow Controller 

The evaluation method depends on whether your Mass Flow Controller has a digital or an analog interface. 

2.1.

 

Digital interface 

Several different ways to operate Sensirion digital Mass Flow Controllers exist. They vary in complexity and implementation 
flexibilities. 
 
The EK-F5x evaluation kit is the fastest way to start working with your Mass Flow Controller. It combines a power supply 
(adapters for most sockets worldwide are included) and a USB-A plug for your PC. It is a simple plug-and-play system to 
evaluate all digital Mass Flow Controllers with a DB9 plug (an adapter is available for other plugs 

 please contact Sensirion). 

EK-F5x is available from distribution. Please note, Mass Flow Controller is not included and has to be purchased separately. 

 

The quickest way to start working with your device is  using the  EK-F5x  evaluation kit  together  with Sensirion 
Viewer Software. It is a plug-and-play solution, which will enable you to control and configure your device (e.g. 
choose the gas calibration). The Viewer Software can be used to control multiple Mass Flow Controllers by opening 
several instances of the program on a single PC. 

 

Another simple way to control your device is to use the evaluation kit together with the available LabVIEW drivers. 
This allows for more flexibility at an expense of some implementation effort. A LabVIEW implementation is suitable 
to most laboratory and prototyping applications. It is possible to control multiple Mass Flow Controllers with a 
single LabVIEW program, by giving the devices different addresses. 

 

Most  OEM  projects  will  require  designing  custom  cabling  (including  a  power  supply)  together  with  an 
implementation in the desired programming language. Sensirion provides  ready-to-use  libraries  in C,  C# and 
Python (see Section 

8.2.2

 in Useful Resources). These libraries can be used to control multiple devices at the same 

time  (please  make  sure  the  devices  have  unique  RS485  addresses)  or  to  add  the  Mass  Flow  Controllers  to  a 
measurement  sequence.  However,  this  also  involves  the  highest  implementation  effort  out  of  the  options 
mentioned here. 

It is also possible to use LabVIEW library with custom cabling, or to use C, C# and Python libraries with EK-F5x evaluation 
kit. 

 

Содержание SFC53 Series

Страница 1: ...SFM5xxx Summary This guide provides recommendations for evaluation testing and integration of Sensirion Mass Flow Controllers and Meters It is applicable to SFC55xx SFC54xx SFC53xx as well as SFM55xx...

Страница 2: ...recommendations 4 4 Common pitfalls 5 4 1 Flow appears to be off by several 5 4 2 Settling time is longer than specified 5 5 Design recommendations 5 5 1 Pressure drop and input pressure 5 6 Fluidic a...

Страница 3: ...aluate all digital Mass Flow Controllers with a DB9 plug an adapter is available for other plugs please contact Sensirion EK F5x is available from distribution Please note Mass Flow Controller is not...

Страница 4: ...ero flow It is possible to use Sensirion recalibration software to compensate for that effect The Recalibration software can be downloaded from the Sensirion website and is also linked in the Useful r...

Страница 5: ...The settling time of Sensirion s Mass Flow Controllers is specified for a step answer from 10 to 100 of full scale within 5 of setpoint When testing the settling time do not do so from a position of z...

Страница 6: ...ic manifold must be designed and manufactured by the user In Table 4 in the Useful resources Section 8 1 CAD models for a suggested manifold designs for SFC54xx SFM54xx and SFC53xx SFM53xx can be foun...

Страница 7: ...ssure 4 bar at inlet and atmospheric pressure at outlet any situation which leads to the factory calibration requiring adjustments due to the accuracy requirements e g vertical instead of horizontal i...

Страница 8: ...ass Flow Controllers SFC sensirion com products product categories mass flow controllers Mass Flow Meters SFM sensirion com products product categories gas flow sensors General technical download sect...

Страница 9: ...SFC5500 SFM5500 50sccm 0 5slm 2slm 10slm sensirion com resource cad sfc5500 SFC5400 SFM5400 sensirion com resource datasheet sfc5400 sensirion com resource cad sfc5400 sensirion com media d ocuments...

Страница 10: ...to the stability of the MEMS based sensor element and the robust mechanical design Sensirion Mass Flow Controllers do not drift and do not require recalibration in the field High manufacturing standar...

Страница 11: ...er s expense and the warranty period for any repaired or replaced product shall be limited to the unexpired portion of the original period This warranty does not apply to any equipment which has not b...

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