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MT-17E-003-D

Seiko Instruments Inc.

Dec. 2001

STP-H600/H1000 Series

Turbomolecular Pump

INSTRUCTION MANUAL

(Third Edition-d)

Read through the Safety Precautions of this Manual
carefully before using the STP pump.

Keep this Manual in a place where you can quickly access
it at any time.

Содержание MT-17E-003-D

Страница 1: ...Inc All rights reserved Printed in Japan STP H600 H1000 Series Turbomolecular Pump INSTRUCTION MANUAL Third Edition d Read through the Safety Precautions of this Manual carefully before using the STP...

Страница 2: ...following symbols are used in this manual WARNING Death or Serious Personal Injury Failure to follow the guidelines marked with this symbol may result in death or serious personal injury CAUTION Mino...

Страница 3: ...from the vacuum equipment Residual gases in the STP pump may cause an accident which for certain gases may involve serious injury or death Confirm the characteristics of the gas to be used referring...

Страница 4: ...or the like when lifting them When lifting the STP pump by hands for unavoidable reasons it must always be lifted by two or more people Failure to do so may damage their hipbone or injure them due to...

Страница 5: ...and remove them before restarting the STP pump in the event of occurrence of a problem The use of the abnormal STP pump may result in product damage Always replace batteries once a year Failure to do...

Страница 6: ...type chemical specific For the specifications of other models of the STP H600 H1000 pump series contact Seiko Instruments In this manual the above STP pump series is collectively referred to as the S...

Страница 7: ...fice Japan Seiko Instruments Inc Vacuum Innovative Products Sales Department 1 8 Nakase Mihama ku Chiba shi Chiba 261 8507 JAPAN Telephone Vacuum Innovative Products Sales Department Direct Domestic 0...

Страница 8: ...3 Installation operation or maintenance using parts which are not specified by Seiko Instruments 4 Maintenance personnel other than those authorized by Seiko Instruments or its specified plant have d...

Страница 9: ...1000 Series Instruction Manual indication WARNING message on the LCD display 16 Overhaul and replacement of maintenance parts 4 SPARE PARTS Fuse and air cooling fan for control unit Touch down bearing...

Страница 10: ...re the STP Pump 3 8 3 3 4 Vacuum Piping 3 12 3 3 5 Connecting the Emergency Vent Valve 3 14 3 3 6 Connecting the Purge Port 3 14 3 3 7 Connecting the Ground Cable 3 15 4 Installation of the STP Contro...

Страница 11: ...urge Gas 7 1 7 2 Cooling the STP Pump 7 2 7 2 1 Water Cooling Method 7 2 7 2 2 Air Cooling Method 7 3 7 3 Baking the STP Pump 7 4 7 3 1 Attaching a Baking Heater 7 4 7 3 2 Interlocking the STP Pump Op...

Страница 12: ...ump 14 1 14 2 The STP Control Unit 14 1 14 3 The Battery 14 2 15 Troubleshooting 15 1 15 1 Troubleshooting Immediately After An Abnormality Error Occurs 15 1 15 2 Abnormalities When Powering ON 15 2 1...

Страница 13: ...1 Table 8 2 Rated Contacts for Relays CR1 to 4 CR7 CR8 and CR10 8 4 Table 8 3 Rated Contacts for Relays CR5 and 6 8 4 Table 8 4 DC I O TB3 Terminal Block 8 6 Table 8 5 START STOP TB5 Terminal Block 8...

Страница 14: ...Example of Securing the STP Control Unit 4 10 Figure 4 6 External Dimensions of Each Cable 4 11 Figure 4 7 External Dimensions of he Power Cable 4 12 Figure 4 8 How to Secure Primary Power Cable 4 16...

Страница 15: ...a problem due to the pumped gas CAUTION NEVER use corrosive gases chlorine fluorine or other system gases in the STP H600 STP H1000 pump or other models without anti corrosion treatment Introduce a dr...

Страница 16: ...eaker ON CAUTION NEVER touch any portions other than those designated when performing inspections Careless touch may cause electric shock and or a short circuiting of the internal circuit resulting in...

Страница 17: ...so as not to cause any accident during handling 4 STP Pump Installation Warning Label This label describes installation of the STP pump Install the STP pump according to the precautions of Section 3...

Страница 18: ...connectors from being disconnected while the STP pump is in operation 7 STP Control Unit Safety Instruction Label This label describes instructions before operating the STP control unit 8 High Voltage...

Страница 19: ...cement date after one year of batteries in the blank of the label when replacing them This label describes precautions for use of external batteries 10 Rotational Direction Instruction Label This labe...

Страница 20: ...lead to a considerable rise in temperatures outside the STP pump This label warns operators so as not to burn hands only when using the baking heater 13 Tuning Caution Label This label describes prec...

Страница 21: ...of a suspension tool under the base when installing the STP pump without fitting hole Observe national laws regulations safety standards and so on when lifting the STP pump Use a crane or other appro...

Страница 22: ...ft the STP control unit Lift the STP control unit using the two handles attached to the front panel Observe national laws regulations safety standards and so on when lifting the STP control unit Use a...

Страница 23: ...Introduces a purge gas In order to protect the inside of the STP pump when sucking reactive or corrosive gases The STP pump is delivered with a blank flange attached to this port 6 Cooling Water Port...

Страница 24: ...Flange 2 Outlet Port Flange 6 Cooling Water Port 6 Cooling Water Port 3 STP Connector 4 Motor Connector 5 Purge Port 7 Emergency Vent Valve 8 Ground Terminal Optional Accessory 9 Temperature Sensor C...

Страница 25: ...ng Environment l A place free of externally applied mechanical shock l A place free of a heat source Keep clean of the heat source or attach a thermal shield plate l A place free of a strong magnetic...

Страница 26: ...on 3 3 3 How to Secure the STP Pump The STP pump is provided with a high speed rotor Any internal abnormality error may result in a jump in rotational torque leading to personal injury or peripheral e...

Страница 27: ...s type C When you use gases including alkaline metals but excluding Li gases including Ga Hg In or Sn or HBr contact Seiko Instruments NEVER use corrosive gases chlorine fluorine or other system gases...

Страница 28: ...e vacuum equipment Take the following measures for cleaning the seals Clean off with a pure gas Wipe with proper solvent such as alcohol CAUTION A splinter shield is attached to the inlet port flange...

Страница 29: ...ng the STP pump in a horizontal or slanted position it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity This m...

Страница 30: ...r to 2 When securing the inlet port flange with claw clamps Refer to 1 When securing the inlet port with bolts Secure the inlet port with Claw Clamps with bolts No Yes Damper In some cases the damper...

Страница 31: ...andard Type of steel 1 Carbon steel Alloyed steel Stainless steel Carbon steel Alloyed steel Stainless steel Carbon steel Alloyed steel Stainless steel Recommended securing bolt for TMP Flange Strengt...

Страница 32: ...th all 8 screw holes for legs or all 8 attached legs Follow CAUTION on page 3 8 about legs and bolts for securing the base For the claw clamp type use the required number of claw clamps as specified i...

Страница 33: ...he base cannot be secured because of the equipment design install the pump with a torque restraint like the one shown in Figure 3 7 b Use a damper only at the vertically upright position DO NOT remove...

Страница 34: ...um equipment length and material of the piping Select an auxiliary pump in accordance with the capacity and starting method simultaneous starting starting after generating roughing vacuum suitable for...

Страница 35: ...oled l 13 Pa 0 1 Torr when TMS unit is used 2 Piping at the Outlet Port Flange Attach the outlet port to the inlet port flange of the auxiliary pump primary side pump Allowable backing pressure Pressu...

Страница 36: ...s from zero atmospheric pressure to 4 9x104 Pa gauge pressure zero atmospheric pressure to 0 5kgf cm2 gauge pressure Use a dry N2 gas or other 3 3 6 Connecting the Purge Port When sucking reactive or...

Страница 37: ...round Cable Connect the ground cable yellow green between the ground terminal of the STP pump and the ground terminal of the STP control unit When the resistance between the ground terminals is lower...

Страница 38: ...peration only l The NORMAL OPERATION lamp or the ACCELERATION lamp goes out and the BRAKE lamp lights simultaneously When the rotational speed is less than approx 2000 rpm while the STP pump is accele...

Страница 39: ...e inverter overload overspeed d When the battery is thoroughly worn out and cannot be charged e When the STP connection cable is not connected 11 EMERGENCY OPERATION Lamp red LED l Lights when any of...

Страница 40: ...STP H600 H1000 Series Instruction Manual 1 2 3 4 5 6 7 8 9 10 11 12 Figure 4 1 STP Control Unit Front Panel 4 3...

Страница 41: ...to secure the breaker at the OFF position 15 P CONNECTOR CON5A A maximum voltage 60VDC l For connection of the STP connection cable 16 INVERTER OUTPUT Connector CON2 A maximum voltage 55VDC l For con...

Страница 42: ...tting to MANUAL only start stop or other operations can be performed with the switches on the STP control front panel l When setting to REMOTE only start stop or other operations can be performed by i...

Страница 43: ...l For backup during a power failure 29 Internal Battery Connector l For connection of internal battery when using an internal battery connect it to this connector l The internal battery has been inst...

Страница 44: ...STP H600 H1000 Series Instruction Manual 25 26 30 27 28 29 30 31 32 Figure 4 3 Inside of the STP Control Unit 4 7...

Страница 45: ...ce free of exposure to direct sunlight l A place free of high humidity l A place free of dust l A place free of salty air l A place free of dripping water l A place free of explosive or inflammable ga...

Страница 46: ...m or more CAUTION The minimum bending radius of the STP connection cable is150 mm see Figure 16 2 External Appearance of the STP Control Unit Cable Space DO NOT excessively bend the cables and beware...

Страница 47: ...ont panel to a movable rack using the screw holes for the front panel l To protect the STP control unit during transport remove the rubber foot from the bottom and attach the STP control unit to the r...

Страница 48: ...alve Cable 45 Pin pin 41 Pin socket 5 Pin pin 5 Pin socket 22 8 Pin pin Emergency Vent valve Crimp Type Terminal Lug STP H600 H1000 Series 24 5 76 5 8 1 17 6 8 M4 1 Crimp Type Terminal Lug M4 1 STP H6...

Страница 49: ...yellow green Power Side STP Control Unit Side 3pin pin Plug type NEMA L6 30 a without the Power Plug b with the Power Plug 2 Power Cable Power Side STP Control Unit Side Crimp Type Terminal Lug M4 1 2...

Страница 50: ...ct each cable securely DO NOT place heavy objects on the cables nor bend them excessively Support each cable so as not to apply direct force to the connectors or terminals If any problem occurs in cab...

Страница 51: ...usted In some cases the configuration may need more adjustment Use the STP connection cable that has a label affixed STP H600 H1000 Series The use of different cables may result in product damage 3 Co...

Страница 52: ...L2 Blue Single phase 200 to 240 V AC 10 13A maximum Both 50 60 Hz 3 PE Yellow Green Ground Secure primary power cable to the STP control unit rear panel using the cable fitting tool see Figure 4 7 CAU...

Страница 53: ...600 H1000 Series Instruction Manual TB1 Magnified Primary Power Cable Cable Fitting Tool Ground Cable for Cover TB1 Cover part Secure using attached screws Figure 4 8 How to Secure Primary Power Cable...

Страница 54: ...g No and the cable length of the STP pump the STP control unit and the STP connection cable match 5 Are the labels affixed correctly to the STP connection cable and the motor connection cable STP H600...

Страница 55: ...side of the STP pump 5 4 Stop Procedures Close the vacuum valve located at the outlet port flange side just before or after stopping the STP pump After closing the valve stop the auxiliary pump CAUTIO...

Страница 56: ...MOTOR START switch on the front panel after powering ON to start and accelerate the STP pump The ACCELERATION lamp lights ACCELERATION state 2 When the STP pump attains the rated speed of rotations th...

Страница 57: ...WER ON OFF switch built in lamp remains lit ii When the STP pump stops under the above state the magnetic bearing stops and the rotor automatically lands at the time the BRAKE lamp goes out NOTICE The...

Страница 58: ...n Method Terminal Block Starting the Pump Stopping the Pump 1 TB5 1 Short the circuit between 3 2 STOP IN 2 Short the circuit between 2 1 START IN for 0 3 seconds or more However when inputting the si...

Страница 59: ...ON and BRAKE lamps is being lit If doing so under the above condition the STP pump may react as if there was a power failure NOTICE The brake of the STP pump disengages at approx 1000 rpm and the BRAK...

Страница 60: ...ration during a power failure 1 The STP control unit detects any power failure of 2 seconds or more and automatically switches to the BATTERY OPERATION mode and the STP pump decelerates Gases are intr...

Страница 61: ...d the REMOTE output signal at a power failure Also Table 6 2 shows operations of the STP pump after a power recovery Table 6 1 State of Lamps and REMOTE Output Signal at Power Failure LED lamps REMOTE...

Страница 62: ...ntroduce gases the STP pump stops and the EMERGENCY OPERATION lamp lights 6 1 4 Inverter Overload When the STP pump does not attain the rated speed within about 15 minutes after starting or when the A...

Страница 63: ...e became less than DC21V battery abnormal detection operates However when capacity of battery is less than operating limit value largely there may be the thing that battery abnormal detection does not...

Страница 64: ...he FAILURE lamp goes out and the FREE RUN state is reset 3 Press the MOTOR START switch and press the MOTOR STOP switch again The brake functions and the STP pump decelerates 4 After the STP pump stop...

Страница 65: ...fter the STP pump stops thoroughly power OFF switch the breaker OFF and remove the cause of the abnormality error Then restart the STP pump and check if it operates correctly NOTICE For probable cause...

Страница 66: ...m equipment from getting contaminated The allowable gas pressure ranges from zero atmospheric pressure to 4 9x104 Pa gauge pressure zero atmospheric pressure to 0 5kgf cm2 gauge pressure The rotor com...

Страница 67: ...magnetic bearing Rotor descends onto the touch down bearing EMERGENCY OPERATION ALARM E V valve OPEN signal The E V valve is opened The STP pump stops STP connection cable breakage STP connection cabl...

Страница 68: ...trol unit and heat sink FAILURE ALARM The STP pump stops Failure in the cooling fan Shielding of cooling air inlet and ventilation port Extraordinarily high temperature Overspeed Rotational speed of t...

Страница 69: ...em gases in the STP H600 STP H1000 pump or other models without anti corrosion treatment Cool the STP pump to within the operating pressure range to prevent the STP pump from overheating when sucking...

Страница 70: ...ter pressure 2 9 105Pa 3kgf cm2 or lower NOTICE Use clean water as much as possible Cooling water containing foreign materials may corrode or clog the cooling water pipe When the cooling system is clo...

Страница 71: ...ecting the power for the air cooling unit over 25 V AC to the remote terminal block secure the cable using the attached cable fitting tool DO NOT apply excessive force to the cable for the air cooling...

Страница 72: ...ent overheating NOTICE To exhaust the gas discharged from the vacuum equipment and the inner wall of the STP pump run the STP pump during baking 7 3 1 Attaching a Baking Heater 1 Attach a baking heate...

Страница 73: ...r Cooling Unit Standard Accessory Used when water cooled Air Cooling Unit Optional Accessory Used when air cooled This label is attached to the baking heater Optional Accessory WARNING Hot surface Can...

Страница 74: ...of the baking heater between I O TB2 AC POWER IN Terminals 19 20 3 Press the HEATING ON OFF switch an alternate type under the NORMAL OPERATION state the HEATING ON OFF switch built in green lamp ligh...

Страница 75: ...1 IN N1 AC POWER Terminal for inputting power for driving the baking heater auxiliary pump and air cooling unit The voltage input to this terminal is output to the specified terminal block through ope...

Страница 76: ...otor levitates COM 10 11 9 N O N C ALARM OUT Terminal for outputting the ALARM signal When an abnormality error is detected under the POWER ON state the terminal between 10 9 is closed and the termina...

Страница 77: ...terminal 11 12 14 16 15 17 18 13 AC POWER L1 N1 Power input terminals for baking heater auxiliary pump and air cooling unit R PUMP POWER ALARM OUT COM NO OUT NC OUT ALARM state signal output terminal...

Страница 78: ...C Maximum Contact Point Current 10 A Maximum Open Close Capacity AC 2500 VA DC 300 W AC 1250 VA DC 220 W Minimum Applicable Load 5 V DC 10 mA Table 8 3 shows rated contacts for relays CR5 and 6 see Fi...

Страница 79: ...5 V AC or over 60 V DC to terminals 1 to 6 19 and 20 secure the remote cable using the attached cable fitting tool see Figure 8 3 DO NOT apply excessive force to the remote cable DO NOT disconnect the...

Страница 80: ...t between I O TB2 R PUMP terminal 3 4 and stop the auxiliary pump The FAILURE lamp lights When this function is not used short the circuit between 3 4 shorted at delivery 2 4 HEATING N O IN Terminal f...

Страница 81: ...ncy vent valve open signal output terminal 5 7 2 4 9 10 6 8 1 k R P THER N C IN INHIBIT N C IN HEATING N O IN L VALVE N O OUT Ground terminal Unused terminal Remote Input Signal Terminal Block 1 k 1 k...

Страница 82: ...ing ON the breaker on the rear panel short the circuit for 5 seconds or more 2 Short the circuit between terminals 1 3 In this case terminal 2 is not used 2 3 N C STOP IN Terminal for the STOP signal...

Страница 83: ...nd cable for the terminal block cover Table 8 6 START STOP TB6 Terminal Block Terminal Description 1 2 START STOP IN Terminal for the voltage type START STOP signal terminal When the voltage of 25 to...

Страница 84: ...s the relationship between the ambient temperatures and the battery life CAUTION Replace the battery approx once a year to make sure it is always ready to back up the operation of the STP pump For ins...

Страница 85: ...Life of the Internal Battery 9 3 How to Charge the Internal Battery The battery is charged while the power is ON regardless of the operation state of the STP pump After a power failure charge the bat...

Страница 86: ...BATTERY NG lamp However when capacity of battery is less than operating limit value largely there may be the thing that battery abnormal detection does not operate For instructions on how to replace...

Страница 87: ...bel See Figure 9 3 on the front panel at delivery 9 5 1 How to Replace the Battery Case 1 Stop the STP pump and turn OFF the primary power switch the breaker OFF 2 Unscrew the 4 screws attached to fro...

Страница 88: ...led out toward you 4 Replace the four worn out batteries with new ones the side from which the cord projects up 5 Attach inside plate 10 6 Connect battery internal connector 6 and attach front plate 5...

Страница 89: ...ry Internal Connector 7 BATTERY NG Lamp 8 RESET Switch 9 Battery Instruction Label 10 Battery Case Inside Plate 11 Flat Head Screw M2 CAUTION Change batteries every year Do not use external batteries...

Страница 90: ...ng or leakage of the batteries when disposing of them To prevent the batteries from short circuiting remove the lead wires and connectors from the batteries Cut the lead wires one by one so as not to...

Страница 91: ...battery and ambient temperatures See technical data and information prepared by the battery manufacturer 10 1 Specifications for the External Battery When you use external batteries select one in acco...

Страница 92: ...wer Switch the breaker OFF 2 Unscrew the 4 screws attached to the front panel and bring it down towards you 3 Pull out the battery according to the method described in Section 9 5 1 How to Replace the...

Страница 93: ...f the External Battery Dispose of or collect worn out batteries in accordance with the guidelines given by each national and or local government If you procure the batteries dispose of them according...

Страница 94: ...pairs of active magnetic bearings The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor 3 and radial electromagnet 4 A p...

Страница 95: ...wn bearing 8 Touch down bearing 1 Rotor blade 2 Stator blade 4 Radial electromagnet 3 Radial sensor 3 Radial sensor 4 Radial electromagnet 6 Axial electromagnet 6 Axial electromagnet 5 Axial sensor Fi...

Страница 96: ...ooling unit DO NOT touch any of the blocks parts or connectors inside the STP control unit excluding the battery connector These parts are excluded from maintenance or inspection 12 1 Replacing the In...

Страница 97: ...P control unit See Section 4 1 3 Inside of the Control Unit F3 F4 250 V 5 A For control power protection F5 F6 F7 250 V 10 A arc extinguishing fuses For I O TB2 remote input output terminal protection...

Страница 98: ...s as a target Inspect the inside of the outlet port flange for adhesion of deposit while watching the outlet port flange If deposit has accumulated to some extent an overhaul cleaning is required Cont...

Страница 99: ...l Other semiconductor process 2 years Processes resulting in accumulation of deposits in the pump will require more frequent service Clean applications Only vacuum pumping 5 years Other use 2 years De...

Страница 100: ...ent external damage If any of the specifications has not been satisfied Seiko Instruments will not be responsible for any damage during transport i Always contact Seiko Instruments before returning th...

Страница 101: ...from one side of the cooling water port so that no water remains in the STP pump 5 Store the STP pump in a vertical position 6 DO NOT store the STP pump in the following places Place of high humidity...

Страница 102: ...ying agent Place of high temperature more than 55 C and low temperature less than 25 C excluding the battery NOTICE Storage temperatures of the battery range from 20 to 40 C 4 Place subjected to direc...

Страница 103: ...teristics of gas to be used referring to the Material Safety Data Sheet MSDS you obtain from the gas supplier CAUTION Seiko Seiki is not responsible for problems during or after disposal 14 2 The STP...

Страница 104: ...leakage of the battery at their disposal To prevent the battery from short circuiting remove lead wires and connectors from the battery Cut lead wires one by one so as not to cause short circuiting C...

Страница 105: ...URE lamp goes out and the FREE RUN state is reset ii Press the MOTOR START switch and press the MOTOR STOP switch again The brake functions and the STP pump decelerates iii After the STP pump stops th...

Страница 106: ...m valve at the outlet port flange and introduce gas from the purge port into the STP pump 3 Other Cases After the STP pump stops thoroughly power OFF switch the breaker OFF and remove probable causes...

Страница 107: ...n fuses F11 12 only REMOTE operation Replace the blown fuses 250 V 0 1 A 4 1 3 8 4 12 3 15 4 Abnormalities While the STP Pump is Rotating When any Abnormality Error Warning lamp lights see Section 15...

Страница 108: ...roken contact Seiko Seiki 4 2 1 4 2 2 12 2 7 Improper pressure of the inlet port Use the maximum working pressure or less 3 3 4 16 1 2 The STP pump stops 8 Improper pressure of the outlet port Use the...

Страница 109: ...R E BATTERY OPERATION FAILURE EMERGENCY OPERATION BATTERY NG front panel rear side PROCEDURE No No 1 No 2 No 3 No 4 No 5 When the power is turned on again this lamp goes out No 6 The lamp is being lit...

Страница 110: ...overheat 7 3 7 2 3 3 4 5 2 No 3 BATTERY OPERATION EMERGENCY OPERATION 1 Power failure Check a power failure 6 1 1 No 4 FAILURE 1 Incorrect connection of the emergency vent valve cable Connect the cabl...

Страница 111: ...6 Insufficient charging or deterioration of the battery Check that the battery is fully charged If the battery is not charged charge it Check the battery for deterioration and the next replacement dat...

Страница 112: ...the battery If the battery has deteriorated or the replacement date has passed replace the battery with a new one 3 After taking steps 1 and 2 above reset BATTERY NG 9 10 CAUTION When checking the BA...

Страница 113: ...1 When cooled water When TMS unit is used 400 3 Allowable backing pressure Pa Torr When cooled air When cooled natural air 267 2 Rated speed rpm 35 000 Starting time min 6 Stopping time min 6 Vibrati...

Страница 114: ...to 40 Mass 1 kg 40 Battery used 12 V 2Ah x 4 Japan Storage Battery Co Ltd Small Sized Sealed Lead Acid Battery PORTALAC series PE12V2WS Operation switches Front Panel POWER ON OFF Illuminated alterna...

Страница 115: ...or connection cable Emergency vent valve cable Ground cable Safety functions Magnetic bearing abnormality error detection Rotor vibration 100 m p p or more STP pump overheat detection Motor 110 over I...

Страница 116: ...connection plug 1 250 V 5 A 2 F3 4 250 V 10 A arc extinguishing fuses 2 F5 6 7 8 9 Spare fuses 250 V 0 1 A 2 F11 12 Instruction Manual 1 16 4 Recommended Spare Parts Table 16 4 Recommended Spare Part...

Страница 117: ...ange 253 ICF253 319 238 25 300 VG200 319 238 18 Model STP H600 Series STP H1000 Series Unit m m 2 0 1 JIS 2 JVIS ICF 2 203 VG 1 150 Motor connector Emergency Vent Valve Screw hole for rubber feet Bend...

Страница 118: ...30 2 5 4 80 40 34 5 130 34 5 24 35 40 0 35 30 5 4 4 16 3 2 3 2 48 0 Ventilation port Unit mm Ventilation port Ventilation port Ventilation port Ventilation port Figure 16 2 External Appearance of the...

Страница 119: ...r while breaker is ON CAUTION Loc k NO Use only designated type of cables Connect ground cable first CAUTION Install pump securely according to instruction manual W ARNING SEIK O SEIKI ROTATION Heavy...

Страница 120: ...AFETY INSTRUCTIONS Read instruction manual before operation Use pump control unit and connection cable with same serial number Use only designated type of cables Connect ground cable first CAUTION Loc...

Страница 121: ...UNIT VOLTS AC V SEIKO SEIKI MADE IN JAPAN Baking Heater Air Cooling Unit Figure 16 5 Label Affixing Positions for the Special Accessory WARNING Hot surface Can burn hands Do not touch Figure 16 5 Lab...

Страница 122: ...sult STATE OF PROBLEM Abnormality Warning OVER TEMPERATURE while the vacuum chamber is in operation etc Check lamps being lit BATTERY OPERATION OTHER INFORMATION FAILURE EMERGENCY OPERATION BATTERY NG...

Страница 123: ...m inch 1 100 1 00x10 3 39 4 0 01 1 10 0 0 394 1x10 3 0 10 1 39 4x10 3 25 4x10 3 2 54 25 4 1 Mass g kg lb 1 1 00x10 3 2 20x10 5 1x10 3 1 2 20 454 0 454 1 Pressure Pa Torr kgf cm 2 1 7 50x10 3 1 02x10 5...

Страница 124: ...nternational 81 47 475 3123 Company main Domestic 047 475 3111 International 81 47 475 3111 Facsimile Domestic 047 471 1544 International 81 47 471 1544 Supplier Seiko Instruments Inc 1 8 Nakase Miham...

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