6.0 Specifications
|3
6.0 Specifications
Number of axes
3
Travel
70 mm
Step size
20 nm
Speed
(minimum) 0.1 µm per second
(maximum) 4 mm per second
Mechanical Resolution
<1 µm
Load Capacity
>0.2 Kg
Temperature range
Operation
15 to +40ºC
Storage
0 to +60ºC