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3. Mount the appropriate positioning inserts in the
corresponding mounting positions.
4. Place the mechanical clamp on the grid table.
Make sure that there is an open vacuum
feedthrough in the grid table within the sealing
frame.
5. Check the position.
ð
The positioning inserts lock positively into the slots.
ð
The VCMC-R is in full contact with the grid table.
ð
The sealing frame is on the bottom of the holding slot and seals off the vacuum area.
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