vi
WARNING
Sample gas danger prevention
When sample gas leaks from the system, toxicity may lead the risk of severe
injury or death. There is also a risk of fire, explosion, excessive heat, corrosion,
etc. Carefully observe the following points to prevent such risks.
z
Do not use the following gases in the system:
- Gases such as hydrogen fluoride which can corrode the gas-contacting
parts. (These parts are made of synthetic quartz, SUS316L, and fluorine
rubber.)
- Gases with a temperature higher than 35ºC or lower than 15ºC.
z
Ensure that no impurities such as moisture or oxygen which can react with
the sample gas remain in the system.
z
Ensure that the pressure of the sample gas does not exceed 500 kPa (gauge
pressure) at the SAMPLE inlet/outlet connectors.
z
Ensure that the pressure of the parge gas does not exceed 100 kPa (gauge
pressure) at the PERGE inlet/outlet connectors.
z
Always perform a leak test before starting to use the system to ensure that
there are no leaks in the system.
z
Protect the SAMPLE inlet/outlet connectors and the PERGE inlet/outlet
connectors from shocks and any strong force. Otherwise deformation may
occur which prevents correct measurement and may lead to gas leaks.
z
Take care to protect joints from stress when designing the pipe layout of
the system. Otherwise gas leaks may occur.
z
Verify the toxicity and other risks associated with the sample gas before
starting a measurement.
Содержание KS-93
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Страница 72: ...No 26123 05 11 Printed in Japan...